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公开(公告)号：US3479680A
公开(公告)日：1969-11-25
申请号：US3479680D
申请日：1967-05-08
Applicant: STEWART WARNER CORP
Inventor： CLINTON EDWIN T , KRAMCSAK MICHAEL JR
IPC: C23F1/12 , H01L21/205 , H01L21/3065 , B60B33/00
CPC classification number: H01L21/3065 , C23F1/12 , Y10S148/051 , Y10S148/054 , Y10S438/974 , Y10T16/1867
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