MICROELECTROMECHANICAL DEVICE INCORPORATING A GYROSCOPE AND AN ACCELEROMETER

    公开(公告)号:US20160091528A1

    公开(公告)日:2016-03-31

    申请号:US14964469

    申请日:2015-12-09

    CPC classification number: G01P15/18 G01C19/574 G01P15/125

    Abstract: A microelectromechanical device includes: a supporting structure; two sensing masses, movable with respect to the supporting structure according to a first axis and a respective second axis; a driving device for maintaining the sensing masses in oscillation along the first axis in phase opposition; sensing units for supplying sensing signals indicative of displacements respectively of the sensing masses according to the respective second axis; processing components for combining the sensing signals so as to: in a first sensing mode, amplify effects on the sensing signals of concordant displacements and attenuate effects of discordant displacements of the sensing masses; and in a second sensing mode, amplify effects on the sensing signals of discordant displacements and attenuate effects of concordant displacements of the sensing masses.

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