公开(公告)号：US11852650B2

公开(公告)日：2023-12-26

申请号：US17675501

申请日：2022-02-18

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Francesco Rizzini ,  Nicolo' Manca ,  Cristian Dall'Oglio

IPC: G01P15/125 ,  B81B7/02 ,  G01P15/08 ,  G01P15/18

CPC classification number: G01P15/125 ,  B81B7/02 ,  G01P15/18 ,  B81B2201/0235 ,  G01P2015/082

Abstract: The present disclosure is directed to micro-electromechanical system (MEMS) accelerometers that are configured for a user interface mode and a true wireless stereo (TWS) mode of an audio device. The accelerometers are fabricated with specific electromechanical parameters, such as mass, stiffness, active capacitance, and bonding pressure. As a result of the specific electromechanical parameters, the accelerometers have a resonance frequency, quality factor, sensitivity, and Brownian noise density that are suitable for both the user interface mode and the TWS mode.