公开(公告)号：US20210265556A1

公开(公告)日：2021-08-26

申请号：US17181432

申请日：2021-02-22

Applicant: STMicroelectronics S.r.l.

Inventor： Gianluca LONGONI ,  Luca SEGHIZZI

IPC: H01L41/09 ,  H01L41/314 ,  H01L41/27 ,  H01L41/08 ,  H01L41/18 ,  H02N2/18 ,  B81B3/00

Abstract: A MEMS device is provided that includes a semiconductor substrate including a main surface extending perpendicular to a first direction and a side surface extending on a plane parallel to the first direction and to a second direction that is perpendicular to the first direction. At least one cantilevered member protrudes from the side surface of the semiconductor substrate along a third direction that is perpendicular to the first and second directions. The at least one cantilevered member includes a body portion that includes a piezoelectric material. The body portion has a length along the third direction, a height along the first direction and a width along the second direction, and the height is greater than the width. The at least one cantilevered member is configured to vibrate by lateral bending along a direction perpendicular to the first direction.

公开(公告)号：US20240130240A1

公开(公告)日：2024-04-18

申请号：US18535923

申请日：2023-12-11

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Gianluca LONGONI ,  Luca SEGHIZZI

IPC: H10N30/20 ,  B81B3/00 ,  H02N2/18 ,  H10N30/00 ,  H10N30/05 ,  H10N30/074 ,  H10N30/85

CPC classification number: H10N30/2042 ,  B81B3/0021 ,  H02N2/186 ,  H10N30/05 ,  H10N30/074 ,  H10N30/10513 ,  H10N30/85 ,  B81B2203/0118

Abstract: A MEMS device is provided that includes a semiconductor substrate including a main surface extending perpendicular to a first direction and a side surface extending on a plane parallel to the first direction and to a second direction that is perpendicular to the first direction. At least one cantilevered member protrudes from the side surface of the semiconductor substrate along a third direction that is perpendicular to the first and second directions. The at least one cantilevered member includes a body portion that includes a piezoelectric material. The body portion has a length along the third direction, a height along the first direction and a width along the second direction, and the height is greater than the width. The at least one cantilevered member is configured to vibrate by lateral bending along a direction perpendicular to the first direction.

公开(公告)号：US20240014718A1

公开(公告)日：2024-01-11

申请号：US18345863

申请日：2023-06-30

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Luca SEGHIZZI ,  Federico VERCESI ,  Gianluca LONGONI

IPC: H02K15/02 ,  H02K15/00

CPC classification number: H02K15/026 ,  H02K15/0068 ,  H02K2215/00

Abstract: A stator for an electric actuator or motor, including: a solid body; a ferromagnetic core region between the layers of semiconductor material, electrically insulated from the layers of semiconductor material; a plurality of conductive through vias through the solid body; a first plurality of conductive strips, which extend parallel to one another above the core; and a second plurality of conductive strips, which extend parallel to one another above the core and opposite to the first plurality of conductive strips; wherein the first plurality of conductive strips, the plurality of conductive through vias, and the second plurality of conductive strips form a winding or coil of the stator.