Optical waveguide element
    1.
    发明授权

    公开(公告)号:US11327347B2

    公开(公告)日:2022-05-10

    申请号:US17043407

    申请日:2019-01-24

    Abstract: Provided is an optical waveguide element capable of connection such as wire bonding, suppressing usage of gold, and suppressing deterioration of a conductor loss. An optical waveguide element includes a substrate 1 having an electro-optic effect, an optical waveguide 2 formed on the substrate, and a control electrode (30, 31) provided on the substrate and controlling a light wave propagating through the optical waveguide. The control electrode is made of a material other than gold, and the gold is disposed on at least a wire bonding portion 4 of the control electrode.

    ELECTRODE-PLACED SUBSTRATE
    3.
    发明申请
    ELECTRODE-PLACED SUBSTRATE 审中-公开
    电极接地基板

    公开(公告)号:US20160313503A1

    公开(公告)日:2016-10-27

    申请号:US14867586

    申请日:2015-09-28

    Abstract: An optical modulation device includes a substrate having a principal surface, and electrodes provided on the principal surface of the substrate. The electrodes have end portion regions on the outer edge side of the principal surface of the substrate in a plan view, and planar-view corner portions provided between tip end outer edges which define the tip end shapes of the end portion regions in a first direction and side surface outer edges which define the side surface shapes of the end portion regions in the plan view have chamfered shapes.

    Abstract translation: 光调制装置包括具有主表面的基板和设置在基板的主表面上的电极。 电极在平面图中具有在基板的主表面的外边缘侧的端部区域,并且设置在顶端外边缘之间的平面视角部分,其限定端部区域的第一方向的顶端形状 并且在平面图中限定端部区域的侧表面形状的侧表面外边缘具有倒角形状。

    Optical waveguide device
    4.
    发明授权
    Optical waveguide device 有权
    光波导器件

    公开(公告)号:US08805149B2

    公开(公告)日:2014-08-12

    申请号:US13630659

    申请日:2012-09-28

    Abstract: An optical waveguide device that uses a thin substrate having an electro-optical effect and a thickness of 10 μm or less, in which slab propagation light that is reflected from an end face of the device is removed and thus deterioration in an operational characteristic is suppressed. The optical waveguide device includes: a thin substrate which has an electro-optical effect and thickness of 10 μm or less, and in which an optical waveguide is formed; and a supporting substrate that is adhered to the thin substrate through an adhesion layer. An antireflective film is formed on a part of a side surface of the optical waveguide device.

    Abstract translation: 使用具有电光效应和厚度为10μm以下的薄基板的光波导装置,其中从装置的端面反射的板状传播光被去除,从而抑制了操作特性的劣化 。 光波导装置包括:具有电光效应,10μm以下的厚度的薄基板,形成有光波导; 以及通过粘合层粘附到薄基板的支撑基板。 在光波导器件的侧面的一部分上形成防反射膜。

    OPTICAL MODULATION ELEMENT
    5.
    发明申请

    公开(公告)号:US20200026146A1

    公开(公告)日:2020-01-23

    申请号:US16497943

    申请日:2018-03-27

    Abstract: In a waveguide-type optical modulation element that modulates light by applying radio frequency signals to an electrode, the realization of the additional broadening of the bandwidth by improving the degree of freedom in the design of the electrode is enabled. An optical modulation element, which includes optical waveguides provided in a substrate and electrodes that control light waves propagating through the optical waveguides and modulates light by propagating radio frequency signals to the electrodes, in which the electrodes include conductive layers made of copper or a copper alloy and protective layers made of a material other than copper and a copper alloy.

    Waveguide type optical element
    6.
    发明授权

    公开(公告)号:US09946100B2

    公开(公告)日:2018-04-17

    申请号:US15516196

    申请日:2016-03-24

    Abstract: To effectively prevent the acceleration of the drift phenomenon generated by the application of a high electric field to a substrate through a bias electrode in a waveguide type optical element. A waveguide type optical element includes a substrate (100) having an electro-optic effect, two optical waveguides (104 and 106) disposed on a surface of the substrate, a non-conductive layer (120) which is disposed on the substrate and is made of a material having a lower dielectric constant than the substrate, and a control electrode (150) which is disposed on the non-conductive layer and is intended to generate a refractive index difference between the two optical waveguides by respectively applying electric fields to the two optical waveguides, and the non-conductive layer is constituted of a material which includes silicon oxide, an oxide of indium, and an oxide of titanium and has a ratio between a molar concentration of the titanium oxide and a molar concentration of indium oxide of 1.2 or more, and a voltage generating an electric field of 1 V/μm or more in the substrate is applied to the control electrode.

    Optical modulation element
    7.
    发明授权

    公开(公告)号:US10895765B2

    公开(公告)日:2021-01-19

    申请号:US16497943

    申请日:2018-03-27

    Abstract: In a waveguide-type optical modulation element that modulates light by applying radio frequency signals to an electrode, the realization of the additional broadening of the bandwidth by improving the degree of freedom in the design of the electrode is enabled. An optical modulation element, which includes optical waveguides provided in a substrate and electrodes that control light waves propagating through the optical waveguides and modulates light by propagating radio frequency signals to the electrodes, in which the electrodes include conductive layers made of copper or a copper alloy and protective layers made of a material other than copper and a copper alloy.

    Optical control element
    8.
    发明授权

    公开(公告)号:US10739624B2

    公开(公告)日:2020-08-11

    申请号:US16367762

    申请日:2019-03-28

    Abstract: An optical control element including an optical waveguide formed by using diffusion of titanium that is formed on a lithium niobate substrate and a control electrode formed on the lithium niobate substrate that is provided in the vicinity of the optical waveguide, in which an amount of a hydroxyl group absorbed into the lithium niobate substrate is set to be in a range of 0.5 to 2.5 cm−1.

    Optical waveguide element
    9.
    发明授权
    Optical waveguide element 有权
    光波导元件

    公开(公告)号:US09291838B2

    公开(公告)日:2016-03-22

    申请号:US14389416

    申请日:2013-03-29

    Abstract: An object of the present invention is to provide an optical waveguide element that effectively diffuses charges accumulated in a substrate, and suppress DC drift or temperature drift. The optical waveguide element includes a substrate having an electro-optical effect, optical waveguides formed in the substrate, a buffer layer (BF layer) formed on the substrate, and modulation electrodes (signal electrode and ground electrode) that are formed on the buffer layer and modulate optical waves propagating through the optical waveguides, a charge diffusion layer that diffuses charges generated in the substrate is formed between the substrate and the buffer layer, and the charge diffusion layer is electrically connected with a ground electrode constituting the modulation electrode.

    Abstract translation: 本发明的目的是提供一种有效地扩散在基板中累积的电荷并抑制直流漂移或温度漂移的光波导元件。 光波导元件包括具有电光效应的基板,形成在基板中的光波导,形成在基板上的缓冲层(BF层)和形成在缓冲层上的调制电极(信号电极和接地电极) 并且调制通过光波导传播的光波,在衬底和缓冲层之间形成扩散在衬底中产生的电荷的电荷扩散层,并且电荷扩散层与构成调制电极的接地电极电连接。

    OPTICAL WAVEGUIDE ELEMENT
    10.
    发明申请
    OPTICAL WAVEGUIDE ELEMENT 有权
    光学元件

    公开(公告)号:US20150078701A1

    公开(公告)日:2015-03-19

    申请号:US14389416

    申请日:2013-03-29

    Abstract: An object of the present invention is to provide an optical waveguide element that effectively diffuses charges accumulated in a substrate, and suppress DC drift or temperature drift. The optical waveguide element includes a substrate having an electro-optical effect, optical waveguides formed in the substrate, a buffer layer (BF layer) formed on the substrate, and modulation electrodes (signal electrode and ground electrode) that are formed on the buffer layer and modulate optical waves propagating through the optical waveguides, a charge diffusion layer that diffuses charges generated in the substrate is formed between the substrate and the buffer layer, and the charge diffusion layer is electrically connected with a ground electrode constituting the modulation electrode.

    Abstract translation: 本发明的目的是提供一种有效地扩散在基板中累积的电荷并抑制直流漂移或温度漂移的光波导元件。 光波导元件包括具有电光效应的基板,形成在基板中的光波导,形成在基板上的缓冲层(BF层)和形成在缓冲层上的调制电极(信号电极和接地电极) 并且调制通过光波导传播的光波,在衬底和缓冲层之间形成扩散在衬底中产生的电荷的电荷扩散层,并且电荷扩散层与构成调制电极的接地电极电连接。

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