Method of and apparatus for optically measuring displacement
    1.
    发明授权
    Method of and apparatus for optically measuring displacement 失效
    用于光学测量位移的方法和装置

    公开(公告)号:US4708481A

    公开(公告)日:1987-11-24

    申请号:US844682

    申请日:1986-03-27

    IPC分类号: G01B9/02 G01B11/00

    摘要: The magnitude of displacement of an object to-be-measured is measured by projecting light beams on the object to-be-measured and a reference plane and utilizing the interference of lights reflected therefrom. The reflected lights from the object to-be-measured and the reference plane have their phase difference changed cyclically and forcibly. The discontinuous change of the magnitude of phase shift at the moment at which the phase difference of the two reflected lights caused by the displacement of the object to-be-measured has been compensated, and the magnitude of displacement of the object to-be-measured is found from the counted result of the discontinuous changes and the magnitude of phase shift at the moment at which the phase difference has been compensated.

    摘要翻译: 通过将光束投射在被测量物体和参考平面上并利用从其反射的光的干涉来测量待测物体的位移大小。 来自待测对象的反射光和参考平面的相位差周期性和强度变化。 在由待测物体的位移引起的两个反射光的相位差已被补偿的时刻的相移幅度的不连续变化,以及要被测量的物体的位移的大小, 根据不连续变化的计数结果和相位差已被补偿的时刻的相移幅度求出测量值。

    Optical pressure detection method and apparatus
    2.
    发明授权
    Optical pressure detection method and apparatus 失效
    光学压力检测方法及装置

    公开(公告)号:US5929989A

    公开(公告)日:1999-07-27

    申请号:US639520

    申请日:1996-05-01

    CPC分类号: G01L11/02

    摘要: Light from a light source is fed to a sensing probe through a polarization plane-reserving fiber, and is split into two light beams, that is, a reference beam and a measurement beam. The reference beam is passed through a reference medium, and the measurement beam is passed through a pressure-sensitive medium, which may be in the form of gas. Then, the reference beam and the measurement beam are fed to a light-receiving portion via the polarization plane-reserving fiber, and are converted into electrical signals. The electrical signals are inputted into a signal processing portion, and the optical path length difference between the reference and measurement beams, passed through their respective mediums, is determined, and the pressure of the pressure-sensitive medium is detected from this optical path length difference.

    摘要翻译: 来自光源的光通过偏振面保留光纤馈送到感测探针,并被分成两个光束,即参考光束和测量光束。 参考光束通过参考介质,并且测量光束通过可以是气体形式的压敏介质。 然后,参考光束和测量光束经由偏振面保留光纤馈送到光接收部分,并被转换成电信号。 电信号被输入到信号处理部分,并且确定通过其各自介质的参考和测量光束之间的光程长度差,并且根据该光程长度差来检测压敏介质的压力 。

    Laser gauge interferometer and locating method using the same
    3.
    发明授权
    Laser gauge interferometer and locating method using the same 失效
    激光计干涉仪及其定位方法

    公开(公告)号:US4984891A

    公开(公告)日:1991-01-15

    申请号:US304653

    申请日:1989-02-01

    IPC分类号: G01B9/02 H01L21/027 H01L21/30

    CPC分类号: G01B9/02021 G01B2290/70

    摘要: A positional measuring laser interferometer splits a laser beam into a measuring beam and a correcting beam. Each of these beams is further split into a measurement beam and a reference beam. The reference beams travel along a fixed length path of fixed optical properties. Each of the measurement beams travels along respective optical paths in air adjacent each other so that they travel in air having substantially the same changing optical properties, such as the fraction index, preferably with the paths differing in length by a fixed amount regardless of the movement of the object to be measured. The reference beam and measurement beam, for each of the measuring and correcting beams, form an interference pattern that is detected to produce respective outputs correlated to positional information of the object and subjected to positional error due to changing refraction index of air. These two information signals are combined, preferably with a reference refraction index and a reference object position, to obtain a positional information signal of the object that is independent of varying optical characteristics of air. The solid/air interface surface for the interferometer, with respect to the measurement beams, is fixed in position independently of thermal or like expansion of the interferometer by an adjacent abutment surface spring biased into a fixed base abutment surface, which abutment surfaces are generally coplanar with the solid/air interface surface and perpendicular to the path of the measurement beams in air.

    摘要翻译: 位置测量激光干涉仪将激光束分成测量光束和校正光束。 这些光束中的每一个进一步分成测量光束和参考光束。 参考光束沿着具有固定光学特性的固定长度路径行进。 每个测量光束沿彼此相邻的空气中的相应光路行进,使得它们在空气中行进,具有基本相同的变化的光学特性,例如分数指数,优选地,长度不同的路径不同于移动 的待测物体。 对于每个测量和校正光束,参考光束和测量光束形成干涉图案,该干涉图案被检测以产生与物体的位置信息相关的各自的输出,并且由于空气的折射率变化而受到位置误差。 这两个信息信号优选地与参考折射率和参考对象位置组合,以获得与空气的变化的光学特性无关的物体的位置信息信号。 用于干涉仪的固体/空气界面表面相对于测量光束固定在与干涉仪的热或类似膨胀相关的位置上,相邻的邻接表面弹簧被偏压到固定的基座邻接表面中,该邻接表面通常是共面的 具有固体/空气界面表面并垂直于空气中测量光束的路径。

    Method of and apparatus for optically measuring displacement
    4.
    发明授权
    Method of and apparatus for optically measuring displacement 失效
    用于光学测量位移的方法和装置

    公开(公告)号:US4728194A

    公开(公告)日:1988-03-01

    申请号:US919765

    申请日:1986-10-16

    CPC分类号: G01D5/266

    摘要: A light beam is projected on a reference plane and an object to-be-measured, a phase difference between reflected lights from them is changed by a phase shifter, a drive voltage for causing the change of the phase difference is applied to the phase shifter, a magnitude of phase shift of the phase of the reflected lights is detected by a phase shift detector on the basis of the drive voltage at a point of time at which the change of the phase difference of the reflected lights has been compensated, and an up pulse or down pulse is generated by an up-down pulse generator upon detecting a discontinuous change in the magnitude of phase shift attributed to the displacement of the object to-be-measured, while a pulse is generated by another pulse generator upon sensing a change in brightness of an interference signal of the reflected lights attributed to the displacement of the object to-be-measured. Besides, a mode selecting circuit supplies the output of the up-down pulse generator to a counter when a displacement speed of the object to-be-measured is lower than a reference speed, whereas it supplies the output of the other pulse generator to the counter when the displacement speed is higher than the reference speed. The displacement of the object to-be-measured is measured by utilizing an output of the counter.

    摘要翻译: 将光束投影在参考平面和待测对象上,通过移相器改变来自它们的反射光的相位差,将相位差变化的驱动电压施加到移相器 基于在补偿了反射光的相位差的变化的时间点的驱动电压,由相移检测器检测反射光的相位的相移的大小, 在检测到归因于待测对象的位移的相移幅度的不连续变化时,上升脉冲发生器产生上升脉冲或下降脉冲,同时当感测到另一脉冲发生器产生脉冲时 归因于被测量物体位移的反射光的干涉信号的亮度变化。 此外,当待测对象的位移速度低于参考速度时,模式选择电路将上下脉冲发生器的输出提供给计数器,而将另一个脉冲发生器的输出提供给 当位移速度高于参考速度时的计数器。 通过利用计数器的输出来测量待测物体的位移。

    Physical quantity measurement apparatus and instrument therefor
    5.
    发明授权
    Physical quantity measurement apparatus and instrument therefor 失效
    物理量测量仪器及仪器

    公开(公告)号:US5675415A

    公开(公告)日:1997-10-07

    申请号:US500325

    申请日:1995-07-12

    CPC分类号: G01L9/0079 G01D5/268

    摘要: A physical quantity measuring apparatus in which the measurement range of the physical quantity such as displacement, pressure or the like can be widened. Laser beams different in wavelength are radiated through an optical fiber onto a diaphragm and the light reflected on the diaphragm and the light reflected on a reference face opposite to the diaphragm are returned to the optical fiber so that the distance between the reference face and the diaphragm which is transformed, and hence a pressure difference, is measured by a light interference method. The quantity of displacement of the diaphragm is measured optically by using laser beams different in wavelength from each other so that it is possible to make the measurement accuracy high and to effect measurement in a wide range with respect to a physical quantity such as displacement, pressure, or the like, without being influenced by a change in characteristic of the optical fiber.

    摘要翻译: 能够扩大诸如位移,压力等物理量的测量范围的物理量测量装置。 波长不同的激光束通过光纤被辐射到光阑上,并且在光阑上反射的光和与光阑相反的基准面反射的光返回到光纤,使得基准面和光阑之间的距离 通过光干涉法测量其变形,并因此测量压力差。 通过使用彼此不同波长的激光束光学测量光阑的位移量,使得可以使测量精度高并且能够在诸如位移,压力等物理量的宽范围内进行测量 等,而不受光纤特性变化的影响。

    Method and apparatus for controlling a small spacing between a magnetic
head and a magnetic recording medium
    7.
    发明授权
    Method and apparatus for controlling a small spacing between a magnetic head and a magnetic recording medium 失效
    用于控制磁头和磁记录介质之间的小间距的方法和装置

    公开(公告)号:US5392173A

    公开(公告)日:1995-02-21

    申请号:US87355

    申请日:1993-07-08

    CPC分类号: G11B7/0908 G11B21/21 G11B5/58

    摘要: The spacing between a magnetic disk surface and a magnetic head tends to greatly decrease with an increasing request for higher density records. Measuring and controlling the small spacing is important for stabilized recording or reading. A substrate is attached to a side of a support which supports the magnetic head. Light is irradiated onto a surface of the substrate and totally reflected thereby. The small spacing is measured by measuring the quantity of the totally reflected light. An actuator is controlled such that the measured small spacing is maintained at a target value to thereby realize constant small-spacing control.

    摘要翻译: 随着对更高密度记录的要求的增加,磁盘表面和磁头之间的间隔趋于大大降低。 测量和控制小间距对于稳定的记录或读数是重要的。 衬底附接到支撑磁头的支撑体的一侧。 光照射到基板的表面上并由此完全反射。 通过测量全反射光的量来测量小间距。 控制致动器使得测量的小间距保持在目标值,从而实现恒定的小间距控制。

    Grip device
    8.
    发明授权
    Grip device 失效
    抓握装置

    公开(公告)号:US4667997A

    公开(公告)日:1987-05-26

    申请号:US792284

    申请日:1985-10-28

    摘要: In a grip device wherein bimorph type piezoelectric elements are employed for fingers or claws for grasping a workpiece, a grip device comprising bimorph type piezoelectric elements which are mounted on a grip body and which form finger or claws, a voltage feed circuit which is connected to the piezoelectric elements in order to bend and deform the piezoelectric elements, and a control circuit is connected to an end of the piezoelectric elements providing an output signal for controlling a grasping force for a workpiece.

    摘要翻译: 在其中采用双压电晶片式压电元件用于抓握工件的手指或爪的夹持装置中,包括安装在手柄主体上并形成手指或爪的双压电晶片型压电元件的夹持装置,电压馈送电路连接到 压电元件为了使压电元件弯曲和变形,并且控制电路连接到压电元件的端部,提供用于控制工件的抓取力的输出信号。

    Method and apparatus for optically measuring clearance change
    9.
    发明授权
    Method and apparatus for optically measuring clearance change 失效
    用于光学测量间隙变化的方法和装置

    公开(公告)号:US4632556A

    公开(公告)日:1986-12-30

    申请号:US540157

    申请日:1983-10-07

    申请人: Toshio Akatsu

    发明人: Toshio Akatsu

    IPC分类号: G01B11/00 G01B11/14 G01B9/02

    CPC分类号: G01B11/14

    摘要: A clearance formed between two members is measured by optical means projecting a light beam on the respective members and utilizing lights reflected therefrom.The reflected lights from the two members are passed through means capable of regulating an optical length and polarization means, whereupon they are caused to interfere. The irradiance of the interference light is converted into an electric signal. The electric signal is applied to a control circuit, and is fed back to the means capable of regulating an optical length so that the optical-path difference of the reflected lights may be held constant. The change of the clearance between the two members is found by measuring the factor of the feedback.

    摘要翻译: 通过光学装置测量两个构件之间形成的间隙,将光束投射在各个构件上并利用从其反射的光。 来自两个构件的反射光通过能够调节光学长度和偏振装置的装置,于是它们被干扰。 干涉光的辐照度被转换为电信号。 电信号被施加到控制电路,并且被反馈到能够调节光学长度的装置,使得反射光的光程差可以保持恒定。 通过测量反馈因子来确定两个成员之间的间隙的变化。

    Welding position detecting apparatus
    10.
    发明授权
    Welding position detecting apparatus 失效
    焊接位置检测装置

    公开(公告)号:US4667082A

    公开(公告)日:1987-05-19

    申请号:US812844

    申请日:1985-12-23

    摘要: A welding position detecting apparatus provided on a welding torch which forms an arc between a welding wire and a groove face on a work piece. The apparatus has an optical system for irradiating the groove face with a converging ray at a point in advance of the point of the arc so as to form a groove face crossing image, and an observing optical system which introduces this groove face crossing image and an arc image into its field of view and by which the groove face crossing image and the arc image are detected at the same time.

    摘要翻译: 一种焊接位置检测装置,其设置在焊炬上,焊炬在工件上的焊丝与槽面之间形成电弧。 该装置具有光学系统,用于在弧的点之前的点处以会聚光照射槽面,以形成沟面交叉图像;以及观察光学系统,其将该沟面交叉图像和 将弧形图像转换成其视野并同时检测凹槽面交叉图像和圆弧图像。