Method of and system for measuring physical quantities of a rotating
body at many points thereof
    2.
    发明授权
    Method of and system for measuring physical quantities of a rotating body at many points thereof 失效
    用于在其许多点测量旋转体的物理量的方法和系统

    公开(公告)号:US4248095A

    公开(公告)日:1981-02-03

    申请号:US063445

    申请日:1979-08-03

    摘要: A method and system are disclosed for measuring physical quantities of a rotating body at many points thereof in a contact-free manner. The present measurement comprises electromagnetically applying control signals to the rotating body outside the body and taking out such physical quantities as mechanical strains, temperatures, etc. at many points of a rotating body with high accuracy, in a desired manner irrespective of the revolution of the body. Detecting circuits for detecting physical quantities such as mechanical strains or temperatures of a rotating body are additively and detachably provided at many measuring points of the body. The rotating body is also provided with electronic switches which can be arbitrarily changed over by control signals transmitted electromagnetically from the stationary side. The output signals from the detecting circuits are switched over by the electronic switches and transmitted electromagnetically to the stationary side.

    摘要翻译: 公开了用于以无接触的方式在其许多点处测量旋转体的物理量的方法和系统。 本测量包括将控制信号电磁地施加到身体外部的旋转体,并以期望的方式以高精度在旋转体的许多点处取出诸如机械应变,温度等的物理量,而不管旋转体的旋转如何 身体。 用于检测诸如机械应变或旋转体的温度之类的物理量的检测电路在身体的许多测量点被相加和可拆卸地设置。 旋转体还设置有电子开关,其可以通过从静止侧电磁传输的控制信号任意地切换。 来自检测电路的输出信号由电子开关切换并以电磁方式传输到固定侧。

    Method and apparatus for treating surface of substrate plate
    3.
    发明授权
    Method and apparatus for treating surface of substrate plate 失效
    用于处理基板表面的方法和装置

    公开(公告)号:US06821906B2

    公开(公告)日:2004-11-23

    申请号:US09988559

    申请日:2001-11-20

    IPC分类号: H01L2100

    CPC分类号: B08B7/0057 B08B7/0035

    摘要: Method and apparatus for treating a surface of a substrate plate under irradiation of ultraviolet ray emitted from a dielectric barrier discharge lamp. Upon admission into a treating chamber, oxygen is removed from a treating surface and surrounding atmosphere of a substrate plate in order to suppress energy losses of ultraviolet ray to a minimum.

    摘要翻译: 用于在从电介质阻挡放电灯发射的紫外线的照射下处理基板的表面的方法和装置。 进入处理室时,从基板的处理面和周围的气氛除去氧,以将紫外线的能量损失抑制到最小。

    Method and apparatus for drying substrate plates
    4.
    发明授权
    Method and apparatus for drying substrate plates 失效
    干燥基板的方法和装置

    公开(公告)号:US06421932B2

    公开(公告)日:2002-07-23

    申请号:US09780498

    申请日:2001-02-12

    IPC分类号: F26B300

    CPC分类号: F26B5/14 F26B15/12 F26B21/004

    摘要: While being transferred in substantially horizontal state along a predetermined path of transfer by a conveyer means, a substrate plate is dried by a jet of compressed air which is spurted out from a slit-like mouth of an air knife nozzle crosswise of the entire width of the substrate plate and at a predetermined angle of incidence with respect to a drying surface of the substrate plate to scrape off a liquid. The angle of incidence of jet air is made shallower as soon as the substrate on the conveyer means comes to a point of entry to an air blasting zone and is made deeper at latest when the substrate plate comes to a position immediately before a point of disengagement from the air blasting zone.

    摘要翻译: 当沿着预定的传送路径以大致水平的状态转移时,通过压缩空气的喷射流干燥衬底板,压缩空气从空气刀喷嘴的狭缝状口喷出,横截面为整个宽度 并且相对于基板的干燥表面以预定的入射角度刮去液体。 一旦输送装置上的基板进入到喷气区,喷射空气的入射角变得更浅,并且当基板刚刚脱离接合点之前立即变得更深 从喷砂区。

    Method and apparatus for laser-texturing disk surfaces
    5.
    发明授权
    Method and apparatus for laser-texturing disk surfaces 失效
    用于激光纹理化磁盘表面的方法和装置

    公开(公告)号:US06004487A

    公开(公告)日:1999-12-21

    申请号:US111376

    申请日:1998-07-07

    摘要: Method and apparatus for a disk texturing operation in which laser pulses are successively bombarded against a delimited surface area on the face of a rotating disk, from an optical laser pulse irradiating means which is put in movement in a radial direction relative to the disk to provide a textured zone of a predetermined width on the disk. A pulsed laser beam from a laser light source is adjusted to an optimum power level for an aimed bump diameter. The laser beam is then transformed into an annular beam of a collimated light flux having specified inner and outer diameters, and the resulting laser pulses are successively bombarded on the texturing zone through an objective optical system condensing said laser pulses into a specified spot diameter thereby to form minute bumps of predetermined shape and diameter uniformly on the surface of the disk.

    摘要翻译: 一种用于盘纹理操作的方法和装置,其中激光脉冲从光学激光脉冲照射装置相对于旋转盘的表面上的划定的表面区域被连续地轰击,光学激光脉冲照射装置相对于盘沿径向移动,以提供 在盘上具有预定宽度的纹理区域。 来自激光光源的脉冲激光束被调节到用于目标凸起直径的最佳功率水平。 然后将激光束变换成具有规定的内径和外径的准直光束的环形光束,并且通过将所述激光脉冲冷凝成指定光斑直径的物镜光学系统将所得到的激光脉冲连续地轰击在纹理区上,从而 在盘的表面上均匀地形成预定形状和直径的微小凸起。

    Method and apparatus for controlling a small spacing between a magnetic
head and a magnetic recording medium
    6.
    发明授权
    Method and apparatus for controlling a small spacing between a magnetic head and a magnetic recording medium 失效
    用于控制磁头和磁记录介质之间的小间距的方法和装置

    公开(公告)号:US5392173A

    公开(公告)日:1995-02-21

    申请号:US87355

    申请日:1993-07-08

    CPC分类号: G11B7/0908 G11B21/21 G11B5/58

    摘要: The spacing between a magnetic disk surface and a magnetic head tends to greatly decrease with an increasing request for higher density records. Measuring and controlling the small spacing is important for stabilized recording or reading. A substrate is attached to a side of a support which supports the magnetic head. Light is irradiated onto a surface of the substrate and totally reflected thereby. The small spacing is measured by measuring the quantity of the totally reflected light. An actuator is controlled such that the measured small spacing is maintained at a target value to thereby realize constant small-spacing control.

    摘要翻译: 随着对更高密度记录的要求的增加,磁盘表面和磁头之间的间隔趋于大大降低。 测量和控制小间距对于稳定的记录或读数是重要的。 衬底附接到支撑磁头的支撑体的一侧。 光照射到基板的表面上并由此完全反射。 通过测量全反射光的量来测量小间距。 控制致动器使得测量的小间距保持在目标值,从而实现恒定的小间距控制。

    Apparatus and method for processing a substrate
    7.
    发明授权
    Apparatus and method for processing a substrate 失效
    用于处理衬底的装置和方法

    公开(公告)号:US06631726B1

    公开(公告)日:2003-10-14

    申请号:US09631619

    申请日:2000-08-04

    IPC分类号: B08B704

    摘要: A lamp house is located face to face with a substrate which is transferred by a conveyer means. A dielectric barrier discharge lamp is provided in the lamp house to irradiate the substrate with ultraviolet light, while a moistened inert gas, consisting of an inert gas and water vapor, is supplied to a space between the substrate and the dielectric barrier discharge lamp from a moistened inert gas generating means. Under irradiation of ultraviolet light from the dielectric barrier discharge lamp, water vapor in the moistened inert gas is split into a reducing active member [H·] and an oxidative active member [·OH].

    摘要翻译: 一个灯座与一个由传送装置传送的基片面对面。 介电阻挡放电灯设置在灯室中以紫外线照射基板,同时由惰性气体和水蒸气组成的润湿惰性气体从基板和介质阻挡放电灯之间的空间 润湿惰性气体发生装置。 在来自介电阻挡放电灯的紫外线照射下,湿润的惰性气体中的水蒸气被分解成还原活性成分[H]和氧化活性成分[.OH]。

    Method and apparatus for measuring the size of wire rod with laser beam
and reference rod
    8.
    发明授权
    Method and apparatus for measuring the size of wire rod with laser beam and reference rod 失效
    用激光束和参考杆测量线材尺寸的方法和装置

    公开(公告)号:US4871910A

    公开(公告)日:1989-10-03

    申请号:US223097

    申请日:1988-07-22

    IPC分类号: G01B11/08

    CPC分类号: G01B11/08

    摘要: A method for measuring the size of a wire rod comprises the steps of turning a laser beam from a laser beam source into a parallel beam used for scanning, disposing a first wire rod having an unknown size and a second wire rod having an already known size larger than the diameter of the spot of the laser beam adjacent to each other in a direction of scanning with the laser beam, receiving the laser beam traversed the first and second wire rods thereby generating a corresponding electrical output signal, and calculating the size of the first wire rod on the basis of the electrical output signal.

    摘要翻译: 用于测量线材尺寸的方法包括以下步骤:将来自激光束源的激光束转换成用于扫描的平行光束,布置具有未知尺寸的第一线材和具有已知尺寸的第二线材 大于在激光束扫描方向上彼此相邻的激光束的光斑的直径,接收穿过第一和第二线材的激光束,从而产生相应的电输出信号,并且计算 第一根线条根据电气输出信号。