公开(公告)号：US11835708B2

公开(公告)日：2023-12-05

申请号：US17242405

申请日：2021-04-28

Applicant: Samsung Display Co., LTD.

Inventor： Dong Eon Lim ,  Jeong Un Go ,  Hyun Jin Kim ,  Hoon Chul Ryoo ,  Yeong Jin Seol ,  Gil Yong On ,  Yeon Hak Lee ,  Hye Ji Cho

IPC: G02B26/02 ,  H01L27/12 ,  G02B27/14 ,  G02B19/00

CPC classification number: G02B26/023 ,  G02B19/0014 ,  G02B27/144 ,  H01L27/1285

Abstract: A laser crystallization apparatus includes a plurality of laser generators which generate a plurality of laser beams, a plurality of attenuators which adjust energy intensity of the plurality of laser generators, and an optical module which overlap outputs of the plurality of attenuators to output a line beam. A first attenuator of the plurality of attenuators attenuates the energy intensity of the corresponding laser beam, and a second attenuator of the plurality of attenuators maintains the energy intensity of the corresponding laser beam.

公开(公告)号：US20220120938A1

公开(公告)日：2022-04-21

申请号：US17379484

申请日：2021-07-19

Applicant: Samsung Display Co., LTD.

Inventor： Dong Eon Lim ,  Kyong Sik Choi ,  Kwang-Jun Koo ,  Jeong-Mok Kim

IPC: G02B3/00 ,  H01L21/02

Abstract: A laser crystallization apparatus includes light sources that emit a first laser beam and a second laser beam; a first beam homogenizer through which the first laser beam passes; a second beam homogenizer through which the second laser beam passes; and an optical array on which the first laser beam passed through the first beam homogenizer and the second laser beam passed through the second beam homogenizer are incident. A first path of the first laser beam passed through the first beam homogenizer and a second path of the second laser beam passed through the second beam homogenizer are different from each other. The first beam homogenizer includes first lenses having a first pitch. The second beam homogenizer includes second lenses having a second pitch. The first pitch of the first lenses and the second pitch of the second lenses are same each other.