公开(公告)号：US11835708B2

公开(公告)日：2023-12-05

申请号：US17242405

申请日：2021-04-28

申请人： Samsung Display Co., LTD.

发明人： Dong Eon Lim ,  Jeong Un Go ,  Hyun Jin Kim ,  Hoon Chul Ryoo ,  Yeong Jin Seol ,  Gil Yong On ,  Yeon Hak Lee ,  Hye Ji Cho

IPC分类号： G02B26/02 ,  H01L27/12 ,  G02B27/14 ,  G02B19/00

CPC分类号： G02B26/023 ,  G02B19/0014 ,  G02B27/144 ,  H01L27/1285

摘要： A laser crystallization apparatus includes a plurality of laser generators which generate a plurality of laser beams, a plurality of attenuators which adjust energy intensity of the plurality of laser generators, and an optical module which overlap outputs of the plurality of attenuators to output a line beam. A first attenuator of the plurality of attenuators attenuates the energy intensity of the corresponding laser beam, and a second attenuator of the plurality of attenuators maintains the energy intensity of the corresponding laser beam.