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公开(公告)号:US12131920B2
公开(公告)日:2024-10-29
申请号:US18139414
申请日:2023-04-26
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Kyong Sik Choi , Dong Hoon Shin , Hoon Chul Ryoo , Kyeong Mok Kim , Jae-Woong Moon , Kyong Ho Park , Ki Hwan Seok , Myoung Seok Son , Hong Ro Lee
CPC classification number: H01L21/67115 , H01L21/02675 , H01S5/0071
Abstract: A laser light source is provided including an airtight container. A first resonance mirror and a second resonance mirror are disposed outside the airtight container. The first resonance mirror includes a lens unit and a reflection coating layer. The lens unit includes a first surface and a second surface, and the first surface is inclined with respect to the second surface.
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公开(公告)号:US11705348B2
公开(公告)日:2023-07-18
申请号:US16874198
申请日:2020-05-14
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Kyong Sik Choi , Dong Hoon Shin , Hoon Chul Ryoo , Kyeong Mok Kim , Jae-Woong Moon , Kyong Ho Park , Ki Hwan Seok , Myoung Seok Son , Hong Ro Lee
CPC classification number: H01L21/67115 , H01L21/02675 , H01S5/0071
Abstract: A laser light source is provided including an airtight container. A first resonance mirror and a second resonance mirror are disposed outside the airtight container. The first resonance mirror includes a lens unit and a reflection coating layer. The lens unit includes a first surface and a second surface, and the first surface is inclined with respect to the second surface.
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公开(公告)号:US11835708B2
公开(公告)日:2023-12-05
申请号:US17242405
申请日:2021-04-28
Applicant: Samsung Display Co., LTD.
Inventor: Dong Eon Lim , Jeong Un Go , Hyun Jin Kim , Hoon Chul Ryoo , Yeong Jin Seol , Gil Yong On , Yeon Hak Lee , Hye Ji Cho
CPC classification number: G02B26/023 , G02B19/0014 , G02B27/144 , H01L27/1285
Abstract: A laser crystallization apparatus includes a plurality of laser generators which generate a plurality of laser beams, a plurality of attenuators which adjust energy intensity of the plurality of laser generators, and an optical module which overlap outputs of the plurality of attenuators to output a line beam. A first attenuator of the plurality of attenuators attenuates the energy intensity of the corresponding laser beam, and a second attenuator of the plurality of attenuators maintains the energy intensity of the corresponding laser beam.
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公开(公告)号:US20230260809A1
公开(公告)日:2023-08-17
申请号:US18139414
申请日:2023-04-26
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Kyong Sik CHOI , Dong Hoon Shin , Hoon Chul Ryoo , Kyeong Mok Kim , Jae-Woong Moon , Kyong Ho Park , Ki Hwan Seok , Myoung Seok Son , Hong Ro Lee
CPC classification number: H01L21/67115 , H01S5/0071 , H01L21/02675
Abstract: A laser light source is provided including an airtight container. A first resonance mirror and a second resonance mirror are disposed outside the airtight container. The first resonance mirror includes a lens unit and a reflection coating layer. The lens unit includes a first surface and a second surface, and the first surface is inclined with respect to the second surface.
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