-
公开(公告)号:US20170012112A1
公开(公告)日:2017-01-12
申请号:US15056033
申请日:2016-02-29
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: JONGYUN KIM , WALJUN KIM , JUNGHYUN KIM , KIWAN AHN
IPC: H01L29/66 , H01L21/027 , H01L21/3213 , H01L21/266
CPC classification number: H01L29/66757 , H01L21/0273 , H01L21/266 , H01L21/32134 , H01L27/1288 , H01L29/78621 , H01L2227/323
Abstract: Provided is a method of manufacturing a thin-film transistor substrate, the method includes forming a semiconductor pattern layer on a substrate. A first insulating film is formed on the semiconductor pattern layer. A metal pattern layer including a gate electrode and first and second alignment electrodes respectively spaced apart from two sides of the gate electrode is formed on the first insulating film. A cover layer covering the gate electrode is formed. The first and second alignment electrodes are removed. A first doping process is performed by doping the semiconductor pattern layer with a first impurity by using the cover layer as a mask. The cover layer is removed. A second doping process is performed by doping the semiconductor pattern layer with a second impurity having a lower impurity concentration than the first impurity by using the gate electrode as a mask.
Abstract translation: 提供一种制造薄膜晶体管基板的方法,该方法包括在基板上形成半导体图案层。 在半导体图案层上形成第一绝缘膜。 在第一绝缘膜上形成包括栅电极的金属图案层和分别与栅电极的两侧间隔开的第一和第二取向电极。 形成覆盖栅电极的覆盖层。 去除第一和第二对准电极。 通过使用覆盖层作为掩模,通过用第一杂质掺杂半导体图案层来执行第一掺杂工艺。 盖层被去除。 通过使用栅电极作为掩模,通过掺杂具有比第一杂质更低的杂质浓度的第二杂质的半导体图案层来进行第二掺杂工艺。
-
公开(公告)号:US20180157118A1
公开(公告)日:2018-06-07
申请号:US15670188
申请日:2017-08-07
Applicant: Samsung Display Co., LTD.
Inventor: HEE-KWANG SONG , YOUNGCHUN KIM , JUNGHYUN KIM
IPC: G02F1/1335
CPC classification number: G02F1/133603 , H01L33/486 , H01L33/54 , H01L33/60
Abstract: A light emitting package includes a light source which generates light provided to a display panel which displays an image with the light; a lead frame on which the light source is disposed and to which power for driving the light source is applied; an encapsulation mold which covers an upper portion and a side portion of the light source to protect the light source; a reflector mold in which the light source, the lead frame and the encapsulation mold are disposed, the reflector mold including a reflection surface which reflects the light generated from the light source, by mirror surface reflection, and with the light source and the encapsulation mold disposed in the reflector mold, an air layer disposed between the reflection surface of the reflector mold and the encapsulation mold.
-
公开(公告)号:US20160372498A1
公开(公告)日:2016-12-22
申请号:US14987615
申请日:2016-01-04
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: KIWAN AHN , JUNGHYUN KIM , SEUNGHWAN CHO
CPC classification number: H01L27/1288 , H01L29/66757 , H01L29/78621 , H01L29/78645
Abstract: A method of manufacturing a thin film transistor substrate includes forming a semiconductor pattern on a substrate, wherein the semiconductor pattern includes a first area, a second area, and a third area, wherein the second area and the third area are located on each side of the first area; forming an insulating layer on the substrate to cover the semiconductor pattern; forming a metal pattern layer on the insulating layer using a first photosensitive pattern; doping the semiconductor pattern with first impurities using the first photosensitive pattern; forming a gate electrode by patterning the metal pattern layer using a second photosensitive pattern; and doping the semiconductor pattern with second impurities having a lower concentration than the first impurities.
Abstract translation: 制造薄膜晶体管基板的方法包括在基板上形成半导体图案,其中半导体图案包括第一区域,第二区域和第三区域,其中第二区域和第三区域位于 第一区; 在所述衬底上形成绝缘层以覆盖所述半导体图案; 使用第一感光图案在所述绝缘层上形成金属图案层; 使用第一感光图案,用第一杂质掺杂半导体图案; 通过使用第二感光图案图案化所述金属图案层来形成栅电极; 并且用具有比第一杂质低的浓度的第二杂质来掺杂半导体图案。
-
-