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1.
公开(公告)号:US20230352330A1
公开(公告)日:2023-11-02
申请号:US18347971
申请日:2023-07-06
Applicant: Samsung Display Co., LTD.
Inventor: Heungyeol NA , Mingyoun KANG , Dongwon SEOL
IPC: H01L21/677 , H01L21/68 , H01L21/687 , B25J19/02 , G06T7/70 , B25J9/16
CPC classification number: H01L21/67736 , H01L21/681 , H01L21/687 , H01L21/67706 , H01L21/67766 , B25J19/023 , G06T7/70 , B25J9/1697 , Y10T29/49004 , Y10T29/53261
Abstract: A system for transferring a substrate includes a substrate transporter at which is captured a first image with which a position of the substrate at the substrate transporter is determined; a tray at which is captured a second image with which a position of each of a plurality of substrates relative to the tray is determined; a substrate mover with which the substrate is movable in a revolving manner between the substrate transporter and the tray, the substrate mover including: an arm portion movable in the revolving manner between the substrate transporter and the tray, and a substrate securing portion movable together with the arm portion; and an imager with which the first image and the second image are captured, the imager connected to the arm portion and movable in the revolving manner between the substrate transporter and the tray together with the arm portion.
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2.
公开(公告)号:US20230398625A1
公开(公告)日:2023-12-14
申请号:US18113905
申请日:2023-02-24
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Yonghyun KIM , Seungho MYOUNG , Taehun KIM , Heungyeol NA
IPC: B23K26/03 , B23K26/08 , B23K26/12 , B23K26/035 , B23K26/14
CPC classification number: B23K26/032 , B23K26/083 , B23K26/127 , B23K26/035 , B23K26/1436
Abstract: An apparatus for manufacturing a display apparatus includes a chamber in which a loading area is defined, a stage unit disposed in the loading area, where the stage unit fixes a fixing surface of a target, an optical unit disposed outside the chamber, where the optical unit processes a processing surface of the target. The optical unit includes a laser radiating unit which radiates a laser toward the processing surface of the target and a laser moving unit which moves the laser radiating unit along a processing path in a plan view.
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3.
公开(公告)号:US20200176295A1
公开(公告)日:2020-06-04
申请号:US16565670
申请日:2019-09-10
Applicant: Samsung Display Co., LTD.
Inventor: Heungyeol NA , Mingyoun KANG , Dongwon SEOL
IPC: H01L21/677 , H01L21/687 , H01L21/68
Abstract: A system for transferring a substrate includes a substrate transporter at which is captured a first image with which a position of the substrate at the substrate transporter is determined; a tray at which is captured a second image with which a position of each of a plurality of substrates relative to the tray is determined; a substrate mover with which the substrate is movable in a revolving manner between the substrate transporter and the tray, the substrate mover including: an arm portion movable in the revolving manner between the substrate transporter and the tray, and a substrate securing portion movable together with the arm portion; and an imager with which the first image and the second image are captured, the imager connected to the arm portion and movable in the revolving manner between the substrate transporter and the tray together with the arm portion.
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公开(公告)号:US20230294209A1
公开(公告)日:2023-09-21
申请号:US18097122
申请日:2023-01-13
Applicant: Samsung Display Co., Ltd.
Inventor: Heungyeol NA , Yoonchul KIM , Seong Jin YEON , Jungwoo CHOI
IPC: B23K26/362
CPC classification number: B23K26/362
Abstract: A laser etching method include performing a first emission process by emitting a laser beam from a laser module toward a substrate fastened to a chuck in a laser etching chamber, moving a protection window between the chuck and the laser module in a first direction by a first distance after the performing the first emission process, performing a second emission process by emitting a laser beam from the laser module after the moving the protection window in the first direction by the first distance, moving the protection window in an opposite direction of the first direction by a second distance after the performing the second emission process, and performing a third emission process by emitting a laser beam from the laser module after the moving the protection window in the opposite direction of the first direction by the second distance.
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公开(公告)号:US20230249286A1
公开(公告)日:2023-08-10
申请号:US18163327
申请日:2023-02-02
Applicant: SAMSUNG DISPLAY CO., LTD.
Inventor: Heungyeol NA , Jungwoo CHOI , Yonghyun KIM
CPC classification number: B23K26/0838 , H10K59/1201 , B23K26/127
Abstract: An apparatus for manufacturing a display device include: a tray on which a window is seated, a belt on which the tray is seated, where the tray is moved by the belt, a first pulley which rotatably supports the belt, a second pulley arranged to be spaced apart from the first pulley, where the second pulley rotatably supports the belt, and a driving portion connected to the second pulley, where the driving portion rotates the second pulley.
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