公开(公告)号：US11646180B2

公开(公告)日：2023-05-09

申请号：US16856160

申请日：2020-04-23

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Kwanyong Lee ,  Sangmok Nam ,  Hyun-Woo Kim ,  Jaeho Byeon

IPC: H01J37/34 ,  H01J37/32 ,  C23C14/35

CPC classification number: H01J37/32669 ,  C23C14/35 ,  H01J37/3408 ,  H01J37/3455 ,  H01J37/3461

Abstract: A deposition apparatus, including: a substrate supporter, wherein a substrate is fixed to the substrate supporter; a target facing the substrate; a first magnet assembly disposed below the target and including a first magnet extending in a first direction and having a first length, and a second magnet at least partially surrounding the first magnet; and a second magnet assembly disposed below the target and spaced apart from the first magnet assembly in a second direction which is substantially perpendicular to the first direction, and including a first magnet extending in the first direction and having a second length greater than the first length, and a second magnet at least partially surrounding the first magnet, and wherein the second magnet of the first magnet assembly and the second magnet of the second magnet assembly have substantially the same length as each other in the first direction.

公开(公告)号：US11978615B2

公开(公告)日：2024-05-07

申请号：US17717521

申请日：2022-04-11

Applicant: Samsung Display Co., Ltd.

Inventor： Hyun-Woo Kim ,  Sangmok Nam ,  Jaeho Byeon ,  Jongho Hyun ,  Nam-Jin Hyung

IPC: H01J37/34 ,  C23C14/35

CPC classification number: H01J37/347 ,  C23C14/35 ,  H01J37/3435 ,  H01J37/3455 ,  H01J2237/332

Abstract: A sputtering apparatus includes a back plate supporting a sputtering target, a magnet module disposed under the back plate and including a magnet unit reciprocating in a first direction, a first shielding member attached on a portion of the magnet unit, moving together with the magnet unit, and covering at least a portion of the magnet unit, a protective sheet disposed between the back plate and the magnet module, and a second shielding member disposed between the back plate and the magnet module, and having a fixed position.