公开(公告)号：US20160195806A1

公开(公告)日：2016-07-07

申请号：US14881815

申请日：2015-10-13

申请人： Samsung Display Co., Ltd.

发明人： Ki Beom LEE ,  Hyun-Seok KIM ,  Hi Kuk LEE ,  Jae Hyuk CHANG

IPC分类号： G03F7/00 ,  G03F7/20 ,  G03F7/32 ,  G03F7/031

CPC分类号： G03F7/0007 ,  G03F7/031 ,  G03F7/20 ,  G03F7/325

摘要： A photoresist composition including 5 wt % to 10 wt % of a binder resin, 5 wt % to 10 wt % of a photopolymerization monomer, 1 wt % to 5 wt % of a photopolymerization initiator comprising an oxime ester-based compound and activated by light in a wavelength range of 400 nm to 410 nm, 5 wt % to 10 wt % of a black coloring agent, and a residual amount of a solvent.

摘要翻译： 包括5重量％至10重量％的粘合剂树脂，5重量％至10重量％的光聚合单体的光致抗蚀剂组合物，1重量％至5重量％的包含肟酯基化合物并由光活化的光聚合引发剂 在400nm至410nm的波长范围内，5重量％至10重量％的黑色着色剂和残留量的溶剂。

公开(公告)号：US20140030881A1

公开(公告)日：2014-01-30

申请号：US13683510

申请日：2012-11-21

申请人： SAMSUNG DISPLAY CO., LTD.

发明人： Ki Beom LEE ,  Chang Hoon KIM ,  Sang Hyun LEE ,  Hi Kuk LEE ,  Jae Hyuk CHANG ,  Kab Jong SEO ,  Jun Ho SIM

IPC分类号： G03F7/039 ,  H01L21/768

CPC分类号： G03F7/039 ,  G03F7/022 ,  G03F7/0226 ,  G03F7/0236 ,  H01L21/76838

摘要： A positive photoresist composition including a novolac resin, a photo active compound (PAC), a melamine crosslinking agent, and a solvent.

摘要翻译： 包含酚醛清漆树脂，光活性化合物（PAC），三聚氰胺交联剂和溶剂的正性光致抗蚀剂组合物。

公开(公告)号：US20160209756A1

公开(公告)日：2016-07-21

申请号：US14933896

申请日：2015-11-05

申请人： SAMSUNG DISPLAY CO., LTD.

发明人： Jae Hyuk CHANG ,  Sang Hyun YUN ,  Ki Beom LEE ,  Hi Kuk LEE

IPC分类号： G03F7/20

CPC分类号： G03F7/70141 ,  G03F7/201 ,  G03F7/213 ,  G03F7/22 ,  G03F7/70791 ,  G03F9/00 ,  G03F9/7088

摘要： Embodiments of the present invention provide a roll-to-roll exposure system having a reference mark array and alignment scope units for precisely measuring the position and orientation of an object on a flexible multilayered circuit film. A roll-to-roll exposure system according to an exemplary embodiment of the present invention includes: a plurality of rolls configured to move a flexible multilayered circuit film having an object positioned thereon; alignment scope units positioned so as to be spaced apart from each other and proximate to the rolls; and at least one exposure unit positioned so as to be spaced proximate to the rolls and spaced apart from sides of the alignment scope units, in which one of the rolls has a reference mark array on its surface.

摘要翻译： 本发明的实施例提供了具有参考标记阵列和对准范围单元的卷对卷曝光系统，用于精确测量柔性多层电路膜上的物体的位置和取向。 根据本发明的示例性实施例的卷对卷曝光系统包括：多个辊，其被配置为移动具有位于其上的物体的柔性多层电路膜; 定位范围单元定位成彼此间隔开并且靠近辊; 以及至少一个曝光单元，其定位成邻近所述辊并与所述对准示范单元的侧面间隔开，其中所述辊中的一个在其表面上具有参考标记阵列。

公开(公告)号：US20140204392A1

公开(公告)日：2014-07-24

申请号：US13959864

申请日：2013-08-06

申请人： Samsung Display Co., Ltd.

发明人： Hi Kuk LEE ,  Sang Don JANG ,  Jae Hyuk CHANG ,  Hyang-Shik KONG ,  Cha-Dong KIM ,  Chang Hoon KIM ,  Jung-In PARK ,  Sang Hyun YUN

IPC分类号： G01B11/14

CPC分类号： G03F7/70775

摘要： A stage transferring device invention includes: a transferring stage upon which an object is mounted and which transfers the object in an x-y plane; and a stage position measuring device. The stage position measuring device includes a one-dimensional scale on the transferring stage; a one-dimensional scale reading head which is configured to overlap the one-dimensional scale, irradiate a measuring beam to the overlapped one-dimensional scale and measure a 1D y-axis coordinate of the transferring stage; a two-dimensional encoder on the transferring stage; and a two-dimensional encoder reading head which is configured to overlap the two-dimensional encoder, irradiate a measuring beam to the overlapped two-dimensional encoder and measure a 2D x-axis coordinate and a 2D y-axis coordinate of the transferring stage.

摘要翻译： 舞台转移装置发明包括：传送台，物体安装在该传送台上，并在x-y平面内传送物体; 和台架位置测量装置。 舞台位置测量装置在转印台上包括一维刻度; 被配置为与一维刻度重叠的一维刻度读取头，将测量光束照射到重叠的一维刻度并测量转印台的1Dy轴坐标; 转印台上的二维编码器; 以及被构造成与二维编码器重叠的二维编码器读取头，将测量光束照射到重叠的二维编码器，并测量转印台的2D x轴坐标和2D y轴坐标。

公开(公告)号：US20140167298A1

公开(公告)日：2014-06-19

申请号：US13871732

申请日：2013-04-26

申请人： SAMSUNG DISPLAY CO., LTD.

发明人： Jae Hyuk CHANG ,  Hi Kuk Lee ,  Cha-Dong Kim ,  Sang Hyun Yun ,  Jung-In Park ,  Chang Hoon Kim ,  Kim Beom Lee

IPC分类号： G02F1/13 ,  G02F1/1339 ,  G02F1/1341 ,  G01B11/14

CPC分类号： G02F1/1341 ,  G01B11/272 ,  G02F1/1303 ,  G02F2001/133354 ,  G02F2001/133548

摘要： Exemplary embodiments of the invention relate to an alignment apparatus including a source unit providing an electromagnetic signal, a receiving unit detecting the provided electromagnetic signal, and a polarization element positioned between the source unit and the receiving unit and having a transmissive axis fixed in a predetermined direction. A substrate may be positioned between the source unit and the receiving unit, and may be formed with a polarizer including a plurality of metal lines with a minute linear pattern. The luminance or intensity of the electromagnetic signal may be detected by the receiving unit while rotating the substrate.

摘要翻译： 本发明的示例性实施例涉及一种对准装置，包括提供电磁信号的源单元，检测所提供的电磁信号的接收单元和位于源单元和接收单元之间的偏振元件，并且具有固定在预定的 方向。 衬底可以位于源单元和接收单元之间，并且可以由具有微小线性图案的多个金属线的偏振器形成。 在旋转基板的同时，可以由接收单元检测电磁信号的亮度或强度。