公开(公告)号：US09695522B2

公开(公告)日：2017-07-04

申请号：US14947714

申请日：2015-11-20

Applicant: Samsung Display Co., Ltd.

Inventor： Sungsoon Im ,  Kyu H. Hwang ,  Jaesik Kim ,  Minho Moon ,  Youngmin Moon ,  Soonchul Chang ,  Taewook Kang

IPC: C25D21/12 ,  B05B15/04 ,  C25D1/10 ,  B05C21/00 ,  H01L51/00

CPC classification number: C25D1/10 ,  B05B12/20 ,  B05C21/005 ,  H01L51/0011

Abstract: A deposition mask including a mask body including a plurality of pattern holes; a plurality of protrusions protruding from the mask body; and a plurality of grooves formed in the mask body. A grain size of the mask body is in arrange of about 10 μm to about 1000 μm, and a difference between a maximum height of the plurality of protrusions and a maximum height of the plurality of grooves is equal to or less than 0.5 μm.