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公开(公告)号：US12054820B2
公开(公告)日：2024-08-06
申请号：US17731799
申请日：2022-04-28
发明人： Minho Moon , Youngmin Moon , Ji-Hee Son , Seungyong Song
CPC分类号： C23C14/042 , B05C21/005 , H10K71/166
摘要： A deposition apparatus includes a chamber, a mask assembly disposed in the chamber and including an open sheet including a first area in which a first deposition hole is defined and a second area in which a second deposition hole spaced apart from the first deposition hole is defined, a first mask including multiple deposition openings that overlap the first area, and a second mask including multiple deposition openings that overlap the second area, a deposition substrate disposed on the mask assembly, and a deposition source spraying a deposition material to the mask assembly.
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公开(公告)号：US11825727B2
公开(公告)日：2023-11-21
申请号：US17396874
申请日：2021-08-09
发明人： Seul Lee , Minho Moon , Youngmin Moon , Ji-Hee Son , Seungyong Song , Sungsoon Im
CPC分类号： H10K71/00 , C23C14/042 , C23C16/042 , G03F7/0015 , H10K59/12
摘要： A method of providing a mask includes providing a first mask layer facing a second mask layer, in the second mask layer, providing a first opening which corresponds to a deposition opening of the mask, providing an auxiliary layer which faces the first mask layer with the second mask layer therebetween and covers the first opening, in the auxiliary layer, providing a second opening which corresponds to the first opening and exposes the first mask layer to outside the auxiliary layer, in the first mask layer, providing a third opening which corresponds to the first opening and the second opening by using the auxiliary layer as a mask and providing the auxiliary layer separated from the first mask layer and the second mask layer to provide the deposition mask having the first mask layer having the third opening and the second mask layer having the first opening.
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公开(公告)号：US09999943B2
公开(公告)日：2018-06-19
申请号：US15091913
申请日：2016-04-06
发明人： Youngmin Moon , Sungsoon Im , Minho Moon , Soonchul Chang
IPC分类号： H01L21/302 , H01L21/461 , C25F3/00 , B23P15/00 , C03C25/00 , C23F1/00 , C03C15/00 , C03C25/68 , B44C1/22 , B23K26/384 , B23K26/00 , B23K26/40 , C23C14/04 , H01L51/00 , B23K103/18
CPC分类号： B23K26/384 , B23K26/0093 , B23K26/40 , B23K2103/26 , C23C14/042 , G03F7/004 , H01L21/02063 , H01L21/76804 , H01L51/0011
摘要： A method of manufacturing a mask includes forming a first hole in a base material using a laser, the first hole penetrating through the base material from a first surface to a second surface different than the first surface, and expanding the first hole using an etchant to form a second hole.
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公开(公告)号：US12116660B2
公开(公告)日：2024-10-15
申请号：US17383787
申请日：2021-07-23
发明人： Ji-Hee Son , Minho Moon , Youngmin Moon , Seungyong Song , Seul Lee , Sungsoon Im
IPC分类号： C23C14/04 , C23C16/34 , C23C16/40 , C23C16/56 , G03F7/00 , G03F7/16 , C23C14/24 , C23C14/34 , H10K59/12 , H10K71/16
CPC分类号： C23C14/042 , C23C16/345 , C23C16/401 , C23C16/56 , G03F7/0015 , G03F7/167 , C23C14/24 , C23C14/34 , H10K59/12 , H10K71/166
摘要： A mask, a mask assembly, and a method of fabricating a mask are disclosed herein. The mask comprises a polymer film in which at least one cell region and at least one peripheral region are defined, the at least one peripheral region surrounding the at least one cell region, a conductive layer disposed on the polymer film and including a metal, an inorganic layer disposed between the polymer film and the conductive layer and including a silicon-based inorganic material, and holes that penetrate the polymer film, the conductive layer, and the inorganic layer and overlap the at least one cell region in a plan view.
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公开(公告)号：US12058923B2
公开(公告)日：2024-08-06
申请号：US17336543
申请日：2021-06-02
发明人： Youngmin Moon , Minho Moon , Seungyong Song , Sungsoon Im
CPC分类号： H10K71/166 , B23K26/38 , H10K71/00 , H10K71/164 , H10K71/861
摘要： A mask repairing apparatus includes a laser which emits a laser beam toward a welding portion between an opening sheet disposed on a mask frame and a cell mask disposed on the opening sheet, a fixing part disposed below the opening sheet to fix the opening sheet, and a suction part adjacent to the laser. The cell mask is separated from the opening sheet by the laser beam.
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公开(公告)号：US11864453B2
公开(公告)日：2024-01-02
申请号：US17452279
申请日：2021-10-26
发明人： Youngmin Moon , Minho Moon , Ji-Hee Son , Seungyong Song , Sungsoon Im , Junho Jo
IPC分类号： H01L51/56 , C23C14/04 , C23C14/24 , B23K26/244 , B23K26/364 , H10K71/00 , B23K26/0622
CPC分类号： H10K71/00 , B23K26/244 , B23K26/364 , C23C14/042 , C23C14/24 , B23K26/0622
摘要： Provided is a mask including a mask frame including a base part in which cell openings are defined, and a coating part surrounding edges of the cell openings, covering at least a portion of an upper surface of the base part, and including a materials that is different from that of the base part, and unit masks on the mask frame, respectively corresponding to the cell openings, including a material that is different from that of the coating part, and in which openings are defined.
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公开(公告)号：US20170369821A1
公开(公告)日：2017-12-28
申请号：US15632170
申请日：2017-06-23
发明人： Sungsoon Im , Kyuhwan Hwang , Youngmin Moon , Minho Moon , Inho Kong , Changsub Kim , Hotae Kim , Jaehwan Jin , Donguk Hwang
CPC分类号： C11D11/0047 , B08B3/08 , C11D1/143 , C11D3/042 , C11D3/046 , C11D3/2075 , C11D3/2086 , C11D11/0029
摘要： The present disclosure relates to a cleaning composition for removing an oxide including one selected from an organic acid, an inorganic acid, and any combination thereof; one selected from an organic salt, an inorganic salt, and any combination thereof; an oxidizing agent; a surfactant; and water, and a method of cleaning using the cleaning composition.
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公开(公告)号：US11891688B2
公开(公告)日：2024-02-06
申请号：US17748596
申请日：2022-05-19
发明人： Youngmin Moon , Jeongkuk Kim , Minho Moon , Ji-Hee Son , Seungyong Song , Areum Lee
IPC分类号： C23C16/04
CPC分类号： C23C16/042 , C23C16/045
摘要： A mask includes a protruding portion provided with a deposition hole formed therethrough and including an upper surface, a lower surface facing the upper surface, and a side surface disposed between the upper surface and the lower surface and inclined at an angle with respect to the lower surface, a peripheral portion including a first surface extending from the upper surface, a second surface facing the first surface and having a step difference with respect to the lower surface of the protruding portion, and a coating layer disposed on the protruding portion. The protruding portion includes at least one of a protrusion protruded from the side surface of the protruding portion and a groove formed by removing at least a portion of the protruding portion from the side surface of the protruding portion, and the coating layer covers at least one of the protrusion and the groove.
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公开(公告)号：US11678559B2
公开(公告)日：2023-06-13
申请号：US17030372
申请日：2020-09-24
发明人： Minho Moon , Jinoh Kwag , Inbae Kim , Seungyong Song , Duckjung Lee , Hyeyong Chu
CPC分类号： H01L51/56 , H01L51/0011 , C23C14/042
摘要： An apparatus for manufacturing a display device includes: a mask assembly, wherein the mask assembly includes: a mask frame including an open area; a first mask disposed on the mask frame, the first mask including at least one opening; a second mask disposed on the first mask, the second mask including a mesh portion having a mesh shape and a blocking member to shield a portion of the mesh portion; and a first support supporting a display substrate on the second mask and separating the display substrate from the second mask, wherein the blocking member overlaps the opening.
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公开(公告)号：US11574959B2
公开(公告)日：2023-02-07
申请号：US16847208
申请日：2020-04-13
发明人： Inbae Kim , Minho Moon , Kyuhwan Hwang
摘要： A display apparatus includes a substrate including first and display areas, wherein the first display area includes first and second pixel areas and a transmission area; a first pixel disposed in the first pixel area and including a first pixel electrode, a first counter electrode, and a first intermediate layer between the first electrode and the first counter electrode; and a second pixel disposed in the second pixel area and including a second pixel electrode, a second counter electrode, and a second intermediate layer between the second pixel electrode and the second counter electrode. The first and second counter electrodes are disposed in the first and second pixel areas, and the first and the second counter electrodes include a first contact area where the first and the second pixel areas are adjacent to each other. A method of manufacturing the display apparatus is provided.
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