公开(公告)号：US20240076771A1

公开(公告)日：2024-03-07

申请号：US18321376

申请日：2023-05-22

Applicant: Samsung Display Co., Ltd.

Inventor： KYONGHO HONG ,  MYUNGKYU KIM ,  SUNGHO PARK ,  CHANG-KON PARK ,  SUKBEOM YOU ,  DONGJAE LEE

IPC: C23C14/04 ,  C23C14/24

CPC classification number: C23C14/042 ,  C23C14/24 ,  H10K59/1201

Abstract: A mask stage includes a stage inclined with respect to a vertical direction perpendicular to a plane defined by a first direction and a second direction intersecting each other, a plurality of first support units disposed between the stage and a mask frame disposed above the stage, and a plurality of second support units disposed on the stage and being adjacent to a lower side of the mask frame. The lower side of the mask frame extends in a first direction, and the second support units are respectively disposed under end portions of the lower side of the mask frame, which are opposite to each other in the first direction.

公开(公告)号：US20180161825A1

公开(公告)日：2018-06-14

申请号：US15828202

申请日：2017-11-30

Applicant: Samsung Display Co., Ltd.

Inventor： JINSEOK SON ,  MYUNGKYU KIM ,  KYUNGHOON CHUNG

IPC: B08B3/02 ,  B08B7/00 ,  B08B3/08 ,  B08B7/04

CPC classification number: B08B3/024 ,  B08B3/08 ,  B08B7/0042 ,  B08B7/0057 ,  B08B7/04 ,  C23C14/042 ,  H01L51/0011 ,  H01L51/5287 ,  H01L51/56 ,  H05B33/10

Abstract: A mask cleaning apparatus and method of using the same includes a preheating zone preheating a mask, a first ultraviolet cleaning zone irradiating the mask with a first ultraviolet laser beam at a first irradiation angle, a first cooling zone cooling the mask irradiated with the first ultraviolet laser beam, a second ultraviolet cleaning zone irradiating the mask with a second ultraviolet laser beam at a second irradiation angle, a second cooling zone cooling the mask irradiated with the second ultraviolet laser beam, an infrared cleaning zone irradiating the mask with an infrared laser beam at a third irradiation angle, and a peeling zone spraying air onto the mask irradiated with the infrared laser beam.

公开(公告)号：US20240044001A1

公开(公告)日：2024-02-08

申请号：US18336207

申请日：2023-06-16

Applicant: Samsung Display Co., LTD.

Inventor： YOUNGSUN CHO ,  JUNHYEUK KO ,  MYUNGKYU KIM ,  YOUNG KWANG LEE ,  Seung Min JIN ,  Jae Min HONG

IPC: C23C16/458 ,  C23C16/04

CPC classification number: C23C16/458 ,  C23C16/042

Abstract: A deposition apparatus according to an embodiment includes a deposition source, and a deposition portion that faces the deposition source. The deposition portion is disposed at an angle of about 4 degrees to about 14 degrees with respect to an imaginary vertical line that is perpendicular to ground. The deposition portion includes a frame including an opening, and an outer portion disposed around the opening, a substrate disposed on a first side of the frame, and a plurality of back stages disposed on a second side opposite to the first side of the frame. The frame moves by movement of the plurality of back stages.

公开(公告)号：US20230292482A1

公开(公告)日：2023-09-14

申请号：US18174513

申请日：2023-02-24

Applicant: Samsung Display Co., Ltd.

Inventor： MYUNGKYU KIM ,  KYONGHO HONG ,  CHANG-KON PARK ,  SUKBEOM YOU ,  DONGJAE LEE

IPC: H05K13/08 ,  H05K13/00

CPC classification number: H05K13/0812 ,  H05K13/0015

Abstract: A mapping device includes: a substrate engraved with an alignment pattern; an electrostatic chuck under the substrate and in contact with the substrate; and an anti-separation frame on the substrate and preventing the substrate from being separated.