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公开(公告)号:US20230048180A1
公开(公告)日:2023-02-16
申请号:US17872634
申请日:2022-07-25
Applicant: Samsung Electronics Co., Ltd.
Inventor: Segab Kwon , Hyoshin Ahn , Daesin Kim , Inkook Jang
IPC: H01L27/24
Abstract: A memory device includes a plurality of first conductive lines on a substrate and extending in a first direction, a plurality of second conductive lines on the plurality of first conductive lines and extending in a second direction intersecting the first direction, and a plurality of memory cells respectively between the plurality of first conductive lines and the plurality of second conductive lines. Each of the plurality of memory cells includes a switching element and a variable resistance material layer. The switching element includes a material having a composition of [GeX PY SeZ](1-W) [O]W, where 0.15≤X≤0.50, 0.15≤Y≤0.50, 0.35≤Z≤0.70, and 0.01≤W≤0.10.
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公开(公告)号:US09711520B2
公开(公告)日:2017-07-18
申请号:US14735811
申请日:2015-06-10
Applicant: Samsung Electronics Co., Ltd.
Inventor: Etienne Nowak , Xia Zhiliang , Daesin Kim , Young-Gu Kim , Narae Jeong
IPC: H01L27/115 , H01L27/11573 , H01L27/11578 , G11C16/04 , H01L29/423 , H01L27/11565 , H01L27/11582 , G11C8/14
CPC classification number: H01L27/11573 , G11C8/14 , G11C16/04 , H01L27/11565 , H01L27/11578 , H01L27/11582 , H01L29/42344
Abstract: A semiconductor memory device includes a semiconductor substrate including a common source region and a drain region, a lower structure provided on the semiconductor substrate and including a plurality of lower transistors connected in series between the common source region and the drain region, a stack including a plurality of word lines stacked on the lower structure, and semiconductor pillars penetrating the stack and controlling gate electrodes of respective ones of the lower transistors.
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