公开(公告)号：US20240186278A1

公开(公告)日：2024-06-06

申请号：US18457785

申请日：2023-08-29

Applicant: Samsung Electronics Co., Ltd.

Inventor： Masato KAJINAMI ,  Hansung CHO ,  Kazuya ONO ,  Byeongjin KIM ,  Daisuke NAGATOMO ,  Fumitaka MOROISHI ,  Masanori IZUMITA ,  Sungmin AHN

IPC: H01L23/00 ,  H01L21/67 ,  H01L21/68

CPC classification number: H01L24/74 ,  H01L21/67259 ,  H01L21/681 ,  H01L24/80 ,  H01L2224/74 ,  H01L2224/80895 ,  H01L2924/40

Abstract: Provided are mounting devices and mounting methods configured to realize high-precision mounting. A mounting device including a bonding actuator having a housing, a slider accommodated in the housing in a non-contact state and provided with a head, a coil and a yoke in a non-contact state, two voice coil motors (VCMs) driven in an X-axis direction, three VCMs driven in a Y-axis direction, and one VCM driven in a Z-axis direction may be provided. The coil may be fixed to the housing and the yoke may be fixed to the slider. The bonding actuator may perform bonding while adjusting a relative position and parallelism of a chip and a wafer, by driving the slider in six axial directions, which include the X-axis direction, the Y-axis direction, the Z-axis direction, a Tx direction, a Ty direction, and a Tz direction.

公开(公告)号：US20240183657A1

公开(公告)日：2024-06-06

申请号：US18527700

申请日：2023-12-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： Daisuke NAGATOMO ,  Shinji UEYAMA ,  Takamasa SUGIURA ,  Euisun CHOI ,  Fumitaka MOROISHI ,  Masanori IZUMITA ,  Takahiro TOKUMIYA ,  Tatsuya ISHIMOTO ,  Masato KAJINAMI

IPC: G01B11/30

CPC classification number: G01B11/303 ,  G01B11/306

Abstract: An optical device includes a monochromatic light source, a light distribution switching portion configured to transmit monochromatic light emitted from the monochromatic light source in one fan-shaped region among a plurality of fan-shaped regions centered on a central optical axis and block the monochromatic light in other fan-shaped regions, an objective lens, an aperture stop configured to collect reflected light from the object, an imaging lens, which has passed through the aperture stop, a light receiver on an imaging plane formed by the imaging lens and configured to receive the reflected light from the object and photoelectrically convert the received reflected light, and a controller configured to instruct the light distribution switching portion to change a region transmitting light over time, and calculate a normal direction of the object based on an electrical signal photoelectrically converted by the light receiver.

公开(公告)号：US20230187249A1

公开(公告)日：2023-06-15

申请号：US18078249

申请日：2022-12-09

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Daisuke NAGATOMO ,  Fumitaka Moroishi ,  Masanori Izumita ,  Shinji Ueyama ,  Takahiro Tokumiya ,  Takamasa Sugiura ,  Tatsuya Ishimoto ,  Masato Kajinami

IPC: H01L21/68 ,  G06T7/00 ,  H01L21/67 ,  H01L23/544

CPC classification number: H01L21/681 ,  G06T7/0004 ,  H01L21/67259 ,  H01L23/544 ,  H01L2223/54426 ,  G06T2207/30148

Abstract: A mounting device includes: a bonding head configured to hold a first object, a bonding stage configured to hold a second object, and a dual-field-of-view (FOV) optical system including an image sensor configured to simultaneously capture an image of a first alignment mark on the first object and an image of a second alignment mark on the second object to obtain a first image. At least one of the bonding head and the bonding stage is configured to adjust a relative position between the first object and the second object based on the first image, and bond the first object to the second object.