公开(公告)号：US20240186174A1

公开(公告)日：2024-06-06

申请号：US18509104

申请日：2023-11-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Fumitaka MOROISHI ,  Tatsuya ISHIMOTO

IPC: H01L21/683 ,  H01L21/67

CPC classification number: H01L21/6838 ,  H01L21/67017 ,  H01L21/67092 ,  H01L21/67288 ,  H01L21/6836 ,  H01L2221/68327

Abstract: In order to provide a semiconductor manufacturing apparatus capable of realizing highly reliable mounting, a semiconductor manufacturing apparatus includes a pick-up head having a plurality of ejection holes for ejecting gas and a plurality of suction holes for suctioning the gas provided in a holding surface that holds a chip. A warpage measurement portion is configured to measure warpage of the chip held by the pick-up head, and a controller is configured to control at least one of a gas supply flow rate from the plurality of ejection holes and a suction flow rate from the plurality of suction holes in response to the measured warpage of the chip.

公开(公告)号：US20240183657A1

公开(公告)日：2024-06-06

申请号：US18527700

申请日：2023-12-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： Daisuke NAGATOMO ,  Shinji UEYAMA ,  Takamasa SUGIURA ,  Euisun CHOI ,  Fumitaka MOROISHI ,  Masanori IZUMITA ,  Takahiro TOKUMIYA ,  Tatsuya ISHIMOTO ,  Masato KAJINAMI

IPC: G01B11/30

CPC classification number: G01B11/303 ,  G01B11/306

Abstract: An optical device includes a monochromatic light source, a light distribution switching portion configured to transmit monochromatic light emitted from the monochromatic light source in one fan-shaped region among a plurality of fan-shaped regions centered on a central optical axis and block the monochromatic light in other fan-shaped regions, an objective lens, an aperture stop configured to collect reflected light from the object, an imaging lens, which has passed through the aperture stop, a light receiver on an imaging plane formed by the imaging lens and configured to receive the reflected light from the object and photoelectrically convert the received reflected light, and a controller configured to instruct the light distribution switching portion to change a region transmitting light over time, and calculate a normal direction of the object based on an electrical signal photoelectrically converted by the light receiver.

公开(公告)号：US20220139755A1

公开(公告)日：2022-05-05

申请号：US17375263

申请日：2021-07-14

Applicant: Samsung Electronics Co., Ltd.

Inventor： Naoyuki TAKADA ,  Masato KAJINAMI ,  Tatsuya ISHIMOTO

IPC: H01L21/683

Abstract: A semiconductor manufacturing apparatus comprises an adsorption unit defining a plurality of pressing holes in the adsorption unit, the plurality of pressing holes configured to eject gas, and defining a plurality of suction holes in the adsorption unit, the plurality of suction holes configured to suction the gas and to handle a semiconductor chip through the gas. At least one of the suction holes is adjacent to at least one of an apex of the adsorption unit or an edge of the adsorption unit.

公开(公告)号：US20230369078A1

公开(公告)日：2023-11-16

申请号：US18105653

申请日：2023-02-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Tatsuya ISHIMOTO ,  Fumitaka MOROISHI ,  Masato KAJINAMI

IPC: H01L21/67 ,  H01L21/683

CPC classification number: H01L21/67132 ,  H01L21/6838 ,  H01L21/67242

Abstract: A chip peeling apparatus is provided that includes a housing having a seating surface for mounting a wafer, a recessed portion and a first vacuum suction hole in the seating surface, and a second vacuum suction hole, a blow hole and a protrusion in the recessed portion. The chip peeling apparatus further includes: a vacuum suction source that evacuates the first vacuum suction hole and the second vacuum suction hole; a pressure detector that detects a degree of vacuum of the second vacuum suction hole; a pressurization source that sends a fluid to the blow hole; a flow rate control valve; and a controller that determines a flow rate of the fluid to be sent to the blow hole, based on the degree of vacuum, and controls, via the flow rate control valve, the fluid sent from the pressurization source to flow at the determined flow rate.

公开(公告)号：US20230178394A1

公开(公告)日：2023-06-08

申请号：US18062830

申请日：2022-12-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Tatsuya ISHIMOTO ,  Naoyuki TAKADA ,  Takahiro TOKUMIYA ,  Masato KAJINAMI

IPC: H01L21/67

CPC classification number: H01L21/67132

Abstract: A chip peeling apparatus may include a peeling device. The peeling device may include a plurality of vacuum adsorption holes and a plurality of first air blow holes arranged around the plurality of vacuum adsorption holes. The peeling device may be configured to peel a chip off a tape when the peeling device is arranged below a region of the tape on which the chip is attached, vacuum pressure is applied through the plurality of vacuum adsorption holes to adsorb the peeling device to the region of the tape, and a first air blow is directed through the plurality of first air blow holes to the region of the tape.

公开(公告)号：US20150159681A1

公开(公告)日：2015-06-11

申请号：US14562179

申请日：2014-12-05

Applicant: Samsung Electronics Co., Ltd.

Inventor： Masato KAJINAMI ,  Fumitaka MOROISHI ,  Keiji MURATA ,  Shinji UEYAMA ,  Tatsuya ISHIMOTO ,  Yoshiaki YUKIMORI

IPC: F15B15/28 ,  F15B15/06

CPC classification number: F15B15/088 ,  F15B15/063 ,  F15B15/1452 ,  F15B15/1461 ,  F15B15/2846 ,  F15B15/2876 ,  F15B2211/6336 ,  F15B2211/665 ,  F15B2211/6651 ,  F15B2211/8855

Abstract: A fluid pressure actuator including a fluid pressure cylinder having a first position detector and a second position detector, a piston body having a piston head and a rod, the piston head mounted on the rod and slidably accommodated in the fluid pressure cylinder, the rod including a first scale and a second scale, the first scale facing the first position detector and the first position detector configured to detect a position in a sliding direction of the piston body, the second scale facing the second position detector and the second position detector configured to detect a position of the rod in a rotation direction of the piston body, and a controller configured to perform a first positioning control of a position of the rod in the sliding direction and a second positioning control of the rod in the rotation direction may be provided.

Abstract translation: 一种流体压力致动器，包括具有第一位置检测器和第二位置检测器的流体压力缸，具有活塞头和杆的活塞体，所述活塞头安装在所述杆上并可滑动地容纳在所述流体压力缸中，所述杆包括 第一刻度和第二刻度，所述第一刻度面向所述第一位置检测器和所述第一位置检测器，所述第一位置检测器被配置为检测所述活塞体的滑动方向上的位置，所述第二刻度尺面向所述第二位置检测器，所述第二位置检测器被配置为 检测杆在活塞体的旋转方向上的位置，并且可以设置用于执行杆在滑动方向上的位置的第一定位控制和杆沿旋转方向的第二定位控制的控制器 。