公开(公告)号：US20140374868A1

公开(公告)日：2014-12-25

申请号：US14307620

申请日：2014-06-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Tae Hun LEE ,  Hee Geun JEONG ,  Byung Jun PARK ,  Eun Kyung PARK ,  Jung Chak AHN ,  Duck Hyung LEE ,  Gye Hun CHOI

IPC: H01L27/146

CPC classification number: H01L27/1463 ,  H01L27/14621 ,  H01L27/14627 ,  H01L27/14632 ,  H01L27/14634 ,  H01L27/1464 ,  H01L27/14687

Abstract: An image sensor includes a plurality of photo detectors and a plurality of trench isolations configured to isolate the photo detectors from each other. Each of the trench isolations includes a plurality of films in a multi-layer structure. A method of manufacturing an image sensor includes forming a plurality of trench isolations to isolate a plurality of photo detectors from each other, forming a first film in each of the trench isolations, and forming a second film that constructs a multi-layer structure together with the first film.

Abstract translation: 图像传感器包括多个光电检测器和多个沟槽隔离件，其被配置为将光电检测器彼此隔离。 每个沟槽隔离件包括多层结构的膜。 制造图像传感器的方法包括形成多个沟槽隔离以将多个光电检测器彼此隔离，在每个沟槽隔离中形成第一膜，并形成构造多层结构的第二膜以及 第一部电影