公开(公告)号：US09876164B1

公开(公告)日：2018-01-23

申请号：US15367014

申请日：2016-12-01

Applicant: Samsung Electronics Co., Ltd.

Inventor： Xueti Tang ,  Mohamad Towfik Krounbi ,  Dustin Erickson ,  Donkoun Lee ,  Gen Feng

IPC: H01L29/76 ,  H01L29/94 ,  H01L31/062 ,  H01L31/113 ,  H01L43/10 ,  H01L43/12 ,  H01L43/08 ,  H01L27/22 ,  G11C11/16

CPC classification number: H01L43/10 ,  G11C11/161 ,  G11C11/165 ,  H01L27/226 ,  H01L43/08 ,  H01L43/12

Abstract: A magnetic junction and method for providing the magnetic junction are described. The magnetic junction resides on a substrate and is usable in a magnetic device. The magnetic junction includes free and pinned layers separated by a nonmagnetic spacer layer. The free layer is switchable between stable magnetic states when a write current is passed through the magnetic junction. The free layer has a free layer perpendicular magnetic anisotropy energy greater than a free layer out-of-plane demagnetization energy. The free layer includes an alloy. The alloy includes [CoxFeyBz]uMgt, where u+t=1 and x+y+z=1.

公开(公告)号：US09666794B2

公开(公告)日：2017-05-30

申请号：US15081831

申请日：2016-03-25

Applicant: Samsung Electronics Co., Ltd.

Inventor： Volodymyr Voznyuk ,  Dustin Erickson

IPC: H01L43/12 ,  H01L43/08

CPC classification number: H01L43/12 ,  H01L43/08

Abstract: An MTJ structure and method for providing the same are described. The method may include providing a free layer, a pinned layer, and a nonmagnetic spacer layer between the free layer and the pinned layer. Providing the free layer and/or the pinned layer may include depositing a portion of the desired MTJ layer, depositing a sacrificial layer, annealing the MTJ and sacrificial layer, removing at least a portion of the sacrificial layer, and depositing a remaining portion of the desired MTJ layer. The steps of depositing a sacrificial layer, annealing, and removing the sacrificial layer may be repeated multiple times with process conditions selected for each stage so as to reduce the risk of damage to the underlying MTJ layer. The desired MTJ layer may be the free layer, the pinned layer, or both.

公开(公告)号：US09825220B2

公开(公告)日：2017-11-21

申请号：US15080576

申请日：2016-03-24

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dmytro Apalkov ,  Xueti Tang ,  Dustin Erickson ,  Vladimir Nikitin ,  Roman Chepulskyy

IPC: H01L29/82 ,  H01L43/12 ,  H01L43/08 ,  G11C11/16

CPC classification number: H01L43/12 ,  G11C11/161 ,  H01L43/08

Abstract: A magnetic tunnel junction device and a method to make the device are disclosed. The magnetic tunnel junction device comprises a first reference magnetic material layer, a tunnel barrier material layer, a free magnetic material layer between the first reference magnetic material layer and the tunnel barrier material layer, and a second reference magnetic material layer disposed on an opposite side of the tunnel barrier material layer from the free magnetic material layer, in which the second reference magnetic material layer is anti-magnetically exchanged coupled with the first reference magnetic material layer. A shift field Hshift experienced by the free magnetic material layer is substantially canceled by the anti-magnetic exchange coupling between the first reference magnetic material layer and the second reference magnetic material layer.