公开(公告)号：US20150130027A1

公开(公告)日：2015-05-14

申请号：US14538100

申请日：2014-11-11

Applicant: Samsung Electronics Co., Ltd.

Inventor： Se jun PARK ,  Ho jun KIM ,  Jaihyung WON ,  Gyuwan CHOI ,  Dohyung KIM

IPC: H01L21/308 ,  H01L21/311 ,  H01L29/06 ,  H01L21/033

CPC classification number: H01L21/0332 ,  C23C16/26 ,  C23C16/50 ,  H01L21/02118 ,  H01L21/02274

Abstract: A method of forming a carbon-containing thin film and a method of manufacturing a semiconductor device using the method of forming the carbon-containing thin film are described. The method of forming a carbon-containing thin film includes the steps of introducing a substrate into a chamber, injecting hydrocarbon gas and at least nitrogen gas simultaneously into the chamber, and depositing a carbon-containing thin film including carbon and nitrogen on the substrate, thereby forming a carbon-containing thin film having high selectivity and uniform thickness.

Abstract translation: 描述了形成含碳薄膜的方法和使用形成含碳薄膜的方法制造半导体器件的方法。 形成含碳薄膜的方法包括以下步骤：将基材引入室中，同时将烃气体和至少氮气注入到室中，以及在基板上沉积包含碳和氮的含碳薄膜， 从而形成具有高选择性和均匀厚度的含碳薄膜。

公开(公告)号：US20130302959A1

公开(公告)日：2013-11-14

申请号：US13790076

申请日：2013-03-08

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seonghwee CHEONG ,  Mansug KANG ,  Joon KIM ,  Kihong NAM ,  Gyuwan CHOI

IPC: H01L29/66

CPC classification number: H01L29/66666 ,  H01L27/1052 ,  H01L27/10876 ,  H01L27/228 ,  H01L27/2454

Abstract: A semiconductor device with vertical channel transistors and a method of fabricating the same are provided. A method of fabricating the semiconductor device includes patterning a substrate to form a trench that defines an active region, forming a sacrificial pattern in a lower region of the trench, forming a spacer on an upper sidewall of the trench, recessing a top surface of the sacrificial pattern to form a window exposing a sidewall of the active region between the spacer and the sacrificial pattern, doping a sidewall of the trench through the window to form a doped region in the active region, and forming a wiring in the trench to be connected to the doped region.

Abstract translation: 提供了具有垂直沟道晶体管的半导体器件及其制造方法。 一种制造半导体器件的方法包括图案化衬底以形成限定有源区的沟槽，在沟槽的下部区域中形成牺牲图案，在沟槽的上侧壁上形成间隔物，使沟槽的顶面凹陷 牺牲图案以形成暴露间隔物和牺牲图案之间的有源区域的侧壁的窗口，通过窗口掺杂沟槽的侧壁以在有源区域中形成掺杂区域，以及在待连接的沟槽中形成布线 到掺杂区域。