公开(公告)号：US20210200148A1

公开(公告)日：2021-07-01

申请号：US17060526

申请日：2020-10-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seungbeom Park ,  Sungmin Park ,  Jaehyeon Son ,  Heejun Ahn ,  Myungjun Lee

IPC: G03H1/00 ,  G02B21/00 ,  G03H1/04 ,  G03H1/16 ,  H01L21/66

Abstract: Provided is a holographic microscope including an input optical system configured to emit polarized input beam, a first beam splitter configured to emit an object beam by reflecting a portion of the polarized input beam, and emit a reference beam by transmitting a remaining portion of the polarized input beam, a reference optical system configured to separate the reference beam into a first reference beam and a second reference beam, a camera configured to receive the first reference beam and the second reference beam and the object beam that is reflected by an inspection object, the camera including a micro polarizer array, wherein a first polarization axis of the first reference beam is perpendicular to a second polarization axis of the second reference beam.

公开(公告)号：US20240353795A1

公开(公告)日：2024-10-24

申请号：US18736084

申请日：2024-06-06

Applicant: Samsung Electronics Co., Ltd.

Inventor： Seungbeom PARK ,  Sungmin Park ,  Jaehyeon Son ,  Heejun Ahn ,  Myungjun Lee

IPC: G03H1/00 ,  G01N21/95 ,  G02B21/00 ,  G03H1/04 ,  G03H1/16 ,  H01L21/66

CPC classification number: G03H1/0005 ,  G01N21/9501 ,  G01N21/9503 ,  G02B21/0016 ,  G03H1/0443 ,  G03H1/16 ,  H01L22/12 ,  G03H2001/005 ,  G03H2001/045 ,  G03H2001/0452

Abstract: Provided is a holographic microscope including an input optical system configured to emit polarized input beam, a first beam splitter configured to emit an object beam by reflecting a portion of the polarized input beam, and emit a reference beam by transmitting a remaining portion of the polarized input beam, a reference optical system configured to separate the reference beam into a first reference beam and a second reference beam, a camera configured to receive the first reference beam and the second reference beam and the object beam that is reflected by an inspection object, the camera including a micro polarizer array, wherein a first polarization axis of the first reference beam is perpendicular to a second polarization axis of the second reference beam.

公开(公告)号：US12038718B2

公开(公告)日：2024-07-16

申请号：US17060526

申请日：2020-10-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Seungbeom Park ,  Sungmin Park ,  Jaehyeon Son ,  Heejun Ahn ,  Myungjun Lee

IPC: G03H1/00 ,  G01N21/95 ,  G02B21/00 ,  G03H1/04 ,  G03H1/16 ,  H01L21/66

CPC classification number: G03H1/0005 ,  G01N21/9501 ,  G01N21/9503 ,  G02B21/0016 ,  G03H1/0443 ,  G03H1/16 ,  H01L22/12 ,  G03H2001/005 ,  G03H2001/045 ,  G03H2001/0452

Abstract: Provided is a holographic microscope including an input optical system configured to emit polarized input beam, a first beam splitter configured to emit an object beam by reflecting a portion of the polarized input beam, and emit a reference beam by transmitting a remaining portion of the polarized input beam, a reference optical system configured to separate the reference beam into a first reference beam and a second reference beam, a camera configured to receive the first reference beam and the second reference beam and the object beam that is reflected by an inspection object, the camera including a micro polarizer array, wherein a first polarization axis of the first reference beam is perpendicular to a second polarization axis of the second reference beam.