公开(公告)号：US11676263B2

公开(公告)日：2023-06-13

申请号：US17529403

申请日：2021-11-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dong-Hyub Lee ,  Kyungsik Kang ,  Jeong-Gil Kim ,  Jinyong Kim ,  Hochul Kim ,  Yozo Matsuda ,  Youngduk Suh ,  Seungkoo Lee ,  Sungho Jang ,  Yoojin Jeong

IPC: G06T7/00 ,  G02B5/10 ,  G02B5/20 ,  G02B5/08 ,  G01M11/00 ,  G03F7/20 ,  H04N23/56 ,  G02B27/10 ,  G03F7/00

CPC classification number: G06T7/0004 ,  G01M11/005 ,  G02B5/0816 ,  G02B5/0891 ,  G02B5/10 ,  G02B5/208 ,  G02B27/1013 ,  G03F7/70916 ,  H04N23/56 ,  G06T2207/10152

Abstract: An extreme ultraviolet (EUV) collector inspection apparatus and method capable of precisely inspecting a contamination state of an EUV collector and EUV reflectance in accordance with the contamination state are provided. The EUV collector inspection apparatus includes a light source arranged in front of an EUV collector to be inspected and configured to output light in a visible light (VIS) band from UV rays, an optical device configured to output narrowband light from the light, and a camera configured to perform imaging from an UV band to a VIS band. An image by wavelength of the EUV collector is obtained by using the optical device and the camera and a contamination state of the EUV collector is inspected.

公开(公告)号：US20220309643A1

公开(公告)日：2022-09-29

申请号：US17529403

申请日：2021-11-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： Dong-Hyub Lee ,  Kyungsik Kang ,  Jeong-Gil Kim ,  Jinyong Kim ,  Hochul Kim ,  Yozo Matsuda ,  Youngduk Suh ,  Seungkoo Lee ,  Sungho Jang ,  Yoojin Jeong

IPC: G06T7/00 ,  G02B5/10 ,  G02B5/20 ,  G02B27/10 ,  G02B5/08 ,  G01M11/00 ,  H04N5/225 ,  G03F7/20

Abstract: An extreme ultraviolet (EUV) collector inspection apparatus and method capable of precisely inspecting a contamination state of an EUV collector and EUV reflectance in accordance with the contamination state are provided. The EUV collector inspection apparatus includes a light source arranged in front of an EUV collector to be inspected and configured to output light in a visible light (VIS) band from UV rays, an optical device configured to output narrowband light from the light, and a camera configured to perform imaging from an UV band to a VIS band. An image by wavelength of the EUV collector is obtained by using the optical device and the camera and a contamination state of the EUV collector is inspected.