公开(公告)号：US20240234177A1

公开(公告)日：2024-07-11

申请号：US18495224

申请日：2023-10-26

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hun Yong PARK ,  Yeon Tae KIM ,  Jang Hwi LEE ,  Sang Woo BAE ,  Kyung Su KIM ,  Tae Soon PARK ,  Jung Chul LEE ,  Sung Ho JANG ,  Won Don JOO

IPC: H01L21/67 ,  C23C16/44 ,  C23C16/452 ,  H01L21/02

CPC classification number: H01L21/67115 ,  C23C16/4412 ,  C23C16/452 ,  H01L21/0228

Abstract: A wafer processing apparatus may include a chamber providing an internal space; and a first rib on an outer side of a first sidewall of the chamber. An outer side of the first rib may include a first portion and a second portion. A light transmittance of the first portion may be different from a light transmittance of the second portion.

公开(公告)号：US20240019311A1

公开(公告)日：2024-01-18

申请号：US18198482

申请日：2023-05-17

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Yeon Tae KIM ,  Hun Yong PARK ,  Yihwan KIM ,  Ji Hoon KIM ,  Kee Soo PARK

IPC: G01K1/02 ,  G01K11/12 ,  G01J5/00 ,  G01J5/0801 ,  G01J5/53

CPC classification number: G01K1/026 ,  G01K11/12 ,  G01J5/0003 ,  G01J5/0801 ,  G01J5/53

Abstract: A substrate temperature measuring device includes a sensor which senses a first amount of light of a first light having a first wavelength, a second amount of light of a second light having a second wavelength, and a third amount of light of a third light having a third wavelength provided from a substrate, a first calculator to calculate a first temperature for the first wavelength, a second temperature for the second wavelength, and a third temperature of the wavelength through the first amount of light, the second amount of light and the third amount of light which are sensed, and a second calculator to calculate emissivity of the substrate and reflected energy of the substrate through the first temperature, the second temperature, and the third temperature, wherein a temperature of the substrate is calculated through the calculated emissivity of the substrate and the reflected energy of the substrate.

公开(公告)号：US20140320781A1

公开(公告)日：2014-10-30

申请号：US14245123

申请日：2014-04-04

Applicant: Samsung Electronics Co., Ltd.

Inventor： Hun Yong PARK ,  Won Soo JI

IPC: F21K99/00 ,  G02F1/1335

CPC classification number: G02F1/133603 ,  F21K9/233 ,  F21V5/04 ,  F21Y2115/10 ,  G02B19/0014 ,  G02B19/0028 ,  G02B19/0061 ,  G02F2001/133607

Abstract: A light source unit including a light emitting device emitting light and an optical device including a first surface having an incident surface, through which light from the light emitting device is incident, and a second surface through the incident light is outwardly emitted, wherein the first surface has a recess recessed toward the second surface and forming the incident surface, and the second surface protrudes in a dome shape from an edge of the first surface, the second surface having a concave portion depressed toward a planar portion in a center of the first surface, and the incident surface includes the planar portion at a top portion of the recess and a curved portion, the planar portion and the curved portion forming an opening, the curved portion extending between the planar portion and a portion of the first surface outside the incident surface may be provided.

Abstract translation: 一种光源单元，包括发光装置的发光装置和包括具有入射表面的第一表面的光学装置，通过该入射表面入射来自发光装置的光和通过入射光的第二表面向外发射，其中第一 表面具有朝向第二表面凹陷并形成入射表面的凹陷，并且第二表面从第一表面的边缘突出成圆顶形，第二表面具有凹陷部分，朝向第一表面的中心的平面部分凹陷 并且所述入射面包括在所述凹部的顶部处的平坦部分和弯曲部分，所述平面部分和所述弯曲部分形成开口，所述弯曲部分在所述平面部分和所述第一表面的与所述第一表面的部分之间延伸的部分 可以提供入射表面。