MASK CASE, MASK HANDLING AUTOMATION APPARATUS AND OPERATING METHOD THEREOF

    公开(公告)号:US20240264522A1

    公开(公告)日:2024-08-08

    申请号:US18410463

    申请日:2024-01-11

    IPC分类号: G03F1/66 G03F7/00

    摘要: A mask case includes a lower case including a first side surface and a second side surface opposite each other, a first rail on the first side surface, and a second rail on the second side surface, an upper case separable from the lower case, and includes third and fourth side surfaces corresponding to the first and second side surfaces, a third rail on the third side, and a fourth rail on the fourth side, a first sliding lock member slidable along the first and third rails, and a second sliding lock member slidable along the second and fourth rails, first and second holes for coupling first and second pins of first and second locking open and close devices are in the first and second sliding lock members, and the first and second sliding lock members are slid by the first and second locking open and close devices.

    LOADER DEVICE AND SUBSTRATE TRANSPORT SYSTEM

    公开(公告)号:US20230256617A1

    公开(公告)日:2023-08-17

    申请号:US18058839

    申请日:2022-11-25

    IPC分类号: B25J11/00 B25J9/16

    CPC分类号: B25J11/0095 B25J9/1697

    摘要: A loader device includes a frame, a first opening formed in a first side surface of the frame, a second opening formed on a second side surface of the frame, a cavity that connects the first opening and the second opening, a transport unit in the cavity, a first sensor that senses a presence or absence of a first substrate carrier, a second sensor that senses access of a person, and a controller that receives a first sensor signal from the first sensor and receives a second sensor signal from the second sensor. In response to the first sensor signal, the controller controls the transport unit to not transfer a second substrate carrier to the first opening, controls the transport unit to pick up the first substrate carrier from the first opening, and interrupts operation of the transport unit in response to the second sensor signal.