LOADER DEVICE AND SUBSTRATE TRANSPORT SYSTEM

    公开(公告)号:US20230256617A1

    公开(公告)日:2023-08-17

    申请号:US18058839

    申请日:2022-11-25

    IPC分类号: B25J11/00 B25J9/16

    CPC分类号: B25J11/0095 B25J9/1697

    摘要: A loader device includes a frame, a first opening formed in a first side surface of the frame, a second opening formed on a second side surface of the frame, a cavity that connects the first opening and the second opening, a transport unit in the cavity, a first sensor that senses a presence or absence of a first substrate carrier, a second sensor that senses access of a person, and a controller that receives a first sensor signal from the first sensor and receives a second sensor signal from the second sensor. In response to the first sensor signal, the controller controls the transport unit to not transfer a second substrate carrier to the first opening, controls the transport unit to pick up the first substrate carrier from the first opening, and interrupts operation of the transport unit in response to the second sensor signal.