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公开(公告)号:US20240327168A1
公开(公告)日:2024-10-03
申请号:US18511580
申请日:2023-11-16
发明人: Seunggyu KANG , Hyunjae KANG , Sangmin KIM , Youngwook Kim , Yong-Jun AHN , Min Kyun LEE , Sangkyung LEE , Hyunwoo LEE , Jeonghun LIM , Junhyuk CHANG
CPC分类号: B66B11/0407 , B60L9/24 , B64U10/14 , B64U30/297 , B64U50/35 , B66B7/04 , B66B9/003 , B66B11/0226 , B66B11/043 , B64U2101/61 , B64U2101/70
摘要: An inter-floor transport system includes an aerial vehicle configured to move vertically and horizontally along a passage and a power assembly including a power supply adjacent to the passage and a guide cable extending along the passage and connected to the power supply, where the aerial vehicle is configured to receive power through the guide cable without contacting the guide cable.
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公开(公告)号:US20240076127A1
公开(公告)日:2024-03-07
申请号:US18201024
申请日:2023-05-23
发明人: Sang Kyung LEE , Seung Gyu KANG , Hyun Jae KANG , Young Wook KIM , Sang A BANG , Yong-Jun AHN , Min Kyun LEE , Hyun Woo LEE , Jeong Hun LIM , Jun Hyuk CHANG
CPC分类号: B65G1/0457 , B65G1/0464 , B65G43/08 , B65G2203/0233 , B65G2203/044
摘要: Provided is a ceiling storage system capable of correcting a working position and constantly checking stability of a structure by detecting an amount of change in a facility. According to the ceiling storage system, a transport vehicle moves to an upper portion of a first storage area of a plurality of storage areas in a state of gripping an article, and the transport vehicle measures a first distance value between the transport vehicle and the first storage area using a distance sensor and measures a relative position value between the transport vehicle and the first storage area using a vision sensor, before unloading the article from the first storage area.
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公开(公告)号:US20240312486A1
公开(公告)日:2024-09-19
申请号:US18453090
申请日:2023-08-21
发明人: Seunggyu KANG , Hyunjae KANG , Sangmin KIM , Youngwook KIM , Yong-Jun AHN , Min Kyun LEE , Sangkyung LEE , Hyunwoo LEE , Jeonghun LIM
IPC分类号: G11B23/023
CPC分类号: G11B23/0233 , G11B2220/90
摘要: According to an embodiment, a cassette storage case includes a body defining an internal storage space for a cassette. The body includes a lower body part, and a shield body part extending upward from an upper surface outer region of the lower body part. The shield body part has an opening in an upper portion thereof. A load protruding portion extends outward from an outer bottom surface of the lower body part, and has a shape that corresponds to a shape of the opening.
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公开(公告)号:US20230256617A1
公开(公告)日:2023-08-17
申请号:US18058839
申请日:2022-11-25
发明人: HYUN JAE KANG , Young Wook KIM , Seung Gyu KANG , Chul-Jun PARK , Yong-Jun AHN , Sang Kyung LEE , Hyun Woo LEE , Jeong Hun LIM
CPC分类号: B25J11/0095 , B25J9/1697
摘要: A loader device includes a frame, a first opening formed in a first side surface of the frame, a second opening formed on a second side surface of the frame, a cavity that connects the first opening and the second opening, a transport unit in the cavity, a first sensor that senses a presence or absence of a first substrate carrier, a second sensor that senses access of a person, and a controller that receives a first sensor signal from the first sensor and receives a second sensor signal from the second sensor. In response to the first sensor signal, the controller controls the transport unit to not transfer a second substrate carrier to the first opening, controls the transport unit to pick up the first substrate carrier from the first opening, and interrupts operation of the transport unit in response to the second sensor signal.
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公开(公告)号:US20220307877A1
公开(公告)日:2022-09-29
申请号:US17504212
申请日:2021-10-18
发明人: Sanga BANG , Geunhyung KIM , Sangmin KIM , Gi-Nam PARK , Chul-Jun PARK , Yong-Jun AHN , JongJin AHN , Min Kyun LEE , Sangkyung LEE , Kyubum CHO
摘要: A measurement carrier includes a housing having an internal space, and a flow-rate measuring device located within the internal space. A bottom surface of the housing includes a first inflow hole, a second inflow hole, and an outflow hole, which provide fluid communication between the internal space and an outer space. The flow-rate measuring device may include a first flow-rate measuring sensor in fluid communication with the first inflow hole, and a second flow-rate measuring sensor in fluid communication with the second inflow hole.
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公开(公告)号:US20230326777A1
公开(公告)日:2023-10-12
申请号:US17972187
申请日:2022-10-24
发明人: Youngwook KIM , Hyunjae KANG , Sangmin KIM , Chul-Jun PARK , Yong-Jun AHN , Sangkyung LEE , Hyunwoo LEE , Junhyuk CHANG
IPC分类号: H01L21/677 , B65G47/91
CPC分类号: H01L21/67733 , H01L21/67724 , H01L21/67727 , H01L21/67712 , B65G47/91
摘要: Disclosed are semiconductor carrier storage systems, semiconductor fabrication systems including the same, and/or semiconductor fabrication methods using the same. The semiconductor carrier storage system comprises storage ports each of which accommodates a semiconductor carrier, a shuttle rail that extends in a horizontal direction on a side of the storage ports, an internal carrier shuttle that moves along the shuttle rail and transfers a semiconductor carrier to each of the storage ports, and an upper transport that receives the semiconductor carrier from an overhead hoist transport (OHT). The internal carrier shuttle includes a shuttle body coupled to the shuttle rail, a transfer wheel that connects the shuttle body to the shuttle rail, a gripper that holds the semiconductor carrier, and a hoist that vertically extends between the shuttle body and the gripper and drives the gripper to vertically move.
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7.
公开(公告)号:US20200176293A1
公开(公告)日:2020-06-04
申请号:US16529082
申请日:2019-08-01
发明人: Sangkyung LEE , Yong-Jun AHN , Taijo JEON , Kyubum CHO , Jongsam KIM , Gi-Nam PARK , Chul-Jun PARK , Junyong LEE
IPC分类号: H01L21/673 , B05B1/30 , H01L21/67
摘要: A semiconductor wafer storage system includes a container that provides a space in which a semiconductor wafer is to be stored, a fluid supply that provides a fluid to the container, a connection part that receives the fluid from the fluid supply and transfers the fluid to the container, and a nozzle part that connects the connection part to the container. The container may include a coupling plate to which the nozzle part is coupled, and the nozzle part may include a first nozzle and a second nozzle.
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