PATTERN STRUCTURE AND METHOD OF FORMING THE SAME
    1.
    发明申请
    PATTERN STRUCTURE AND METHOD OF FORMING THE SAME 审中-公开
    图案结构及其形成方法

    公开(公告)号:US20130200487A1

    公开(公告)日:2013-08-08

    申请号:US13834847

    申请日:2013-03-15

    Abstract: A pattern structure for a semiconductor device includes a plurality of first patterns, each of the first patterns extending in a first direction in the shape of a line, neighboring first patterns being spaced apart from each other by a gap distance, the plurality of first patterns including a plurality of trenches in parallel with the line shapes, respective trenches being between neighboring first patterns, the plurality of trenches including long trenches and short trenches alternately arranged in a second direction substantially perpendicular to the first direction, and at least a second pattern, the second pattern being coplanar with the first pattern, end portions of the first patterns being connected to the second pattern.

    Abstract translation: 用于半导体器件的图案结构包括多个第一图案,每个第一图案沿着第一方向延伸为线状,相邻的第一图案彼此间隔开间隔距离,多个第一图案 包括与所述线形平行的多个沟槽,相应的沟槽位于相邻的第一图案之间,所述多个沟槽包括沿基本上垂直于所述第一方向的第二方向交替布置的长沟槽和短沟槽,以及至少第二图案, 所述第二图案与所述第一图案共面,所述第一图案的端部连接到所述第二图案。

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