公开(公告)号：US09630440B2

公开(公告)日：2017-04-25

申请号：US14078763

申请日：2013-11-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Ki-yeon Yang ,  Yun-Woo Nam

IPC: B41F27/00 ,  B41N6/00 ,  H01L21/683

CPC classification number: B41N6/00 ,  H01L21/6838

Abstract: A stamp structure includes a stamp frame having a plate part. The plate part includes a plurality of holes. The plurality of holes are configured to facilitate the adsorption of an object to the plate part during a transfer of the object from a donor substrate to a target substrate.

公开(公告)号：US09321213B2

公开(公告)日：2016-04-26

申请号：US13707690

申请日：2012-12-07

Applicant: Samsung Electronics Co., Ltd.

Inventor： Ki-yeon Yang ,  Woong Ko ,  Jae-kwan Kim ,  Du-hyun Lee ,  Byung-kyu Lee

IPC: G03F7/00 ,  B29C59/02

CPC classification number: B29C59/026 ,  G03F7/0002

Abstract: A template system, and a nano-imprint method using the same, include a template having a nano-pattern and configured to transfer the nano-pattern to a resin material on a substrate, and a pressure controlling apparatus configured to change a pressure of the template with respect to the substrate according to an intensity of bubbles captured between the substrate and the template.

Abstract translation: 模板系统和使用其的纳米压印方法包括具有纳米图案并被配置为将纳米图案转印到基板上的树脂材料的模板，以及压力控制装置，其被配置为改变 根据在基板和模板之间捕获的气泡的强度相对于基板的模板。