公开(公告)号：US20210043730A1

公开(公告)日：2021-02-11

申请号：US16789498

申请日：2020-02-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： SANGGIL LEE ,  NAMKYU CHO ,  SEOKHOON KIM ,  KANG HUN MOON ,  HYUN-KWAN YU ,  SIHYUNG LEE

IPC: H01L29/08 ,  H01L29/06 ,  H01L29/66 ,  H01L29/78

Abstract: Disclosed is a semiconductor device including a first active pattern that extends in a first direction on an active region of a substrate, a first source/drain pattern in a recess on an upper portion of the first active pattern, a gate electrode that runs across a first channel pattern on the upper portion of the first active pattern and extends in a second direction intersecting the first direction, and an active contact electrically connected to the first source/drain pattern.

公开(公告)号：US20210336007A1

公开(公告)日：2021-10-28

申请号：US17371858

申请日：2021-07-09

Applicant: Samsung Electronics Co., Ltd.

Inventor： SANGGIL LEE ,  NAMKYU CHO ,  SEOKHOON KIM ,  KANG HUN MOON ,  HYUN-KWAN YU ,  SIHYUNG LEE

IPC: H01L29/08 ,  H01L29/06 ,  H01L29/78 ,  H01L29/66 ,  H01L21/762

Abstract: Disclosed is a semiconductor device including a first active pattern that extends in a first direction on an active region of a substrate, a first source/drain pattern in a recess on an upper portion of the first active pattern, a gate electrode that runs across a first channel pattern on the upper portion of the first active pattern and extends in a second direction intersecting the first direction, and an active contact electrically connected to the first source/drain pattern.

公开(公告)号：US20230163213A1

公开(公告)日：2023-05-25

申请号：US17843970

申请日：2022-06-18

Applicant: Samsung Electronics Co., Ltd.

Inventor： SANGGIL LEE ,  SEOKHOON KIM ,  SUNGMIN KIM ,  JUNGTAEK KIM ,  PANKWI PARK ,  DONGSUK SHIN ,  NAMKYU CHO ,  RYONG HA ,  YANG XU

IPC: H01L29/78 ,  H01L29/423 ,  H01L29/49 ,  H01L29/417 ,  H01L21/02

CPC classification number: H01L29/785 ,  H01L29/7848 ,  H01L29/42312 ,  H01L29/49 ,  H01L29/41791 ,  H01L21/02233 ,  H01L21/02532

Abstract: Disclosed is a semiconductor device comprising a substrate including first and second PMOSFET regions, first and second active patterns on the first and second PMOSFET regions, first and second channel patterns on the first and second active patterns and each including semiconductor patterns, and first and second source/drain patterns connected to the first and second channel patterns. The first active pattern includes a first lower semiconductor layer, a first middle semiconductor layer, and a first upper semiconductor layer. Each of the first and second lower semiconductor layers includes silicon. The first middle semiconductor layer includes silicon-germanium. The first middle semiconductor layer has a width that decreases in a downward direction to a maximum value and then increases in the downward direction.