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公开(公告)号:US20210143154A1
公开(公告)日:2021-05-13
申请号:US17126195
申请日:2020-12-18
Applicant: Samsung Electronics Co., Ltd.
Inventor: KISEOK LEE , BONG-SOO KIM , JIYOUNG KIM , HUI-JUNG KIM , SEOKHAN PARK , HUNKOOK LEE , YOOSANG HWANG
IPC: H01L27/108 , H01L23/528 , H01L29/08 , H01L29/165 , H01L29/10
Abstract: Semiconductor memory devices may include first and second stacks on a substrate and first and second interconnection lines on the first and second stacks. Each of the first and second stacks may include semiconductor patterns vertically stacked on the substrate, conductive lines connected to the semiconductor patterns, respectively, and a gate electrode that is adjacent to the semiconductor patterns and extends in a vertical direction. The first stack may include a first conductive line and a first gate electrode, and the second stack may include a second conductive line and a second gate electrode. Lower surfaces of the first and second conductive lines may be coplanar. The first interconnection line may be electrically connected to at least one of the first and second conductive lines. The second interconnection line may be electrically connected to at least one of the first and second gate electrodes.
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公开(公告)号:US20250048617A1
公开(公告)日:2025-02-06
申请号:US18736153
申请日:2024-06-06
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: BYEUNGMOO KANG , SEOKHAN PARK , KISEOK LEE
IPC: H10B12/00
Abstract: A capacitor structure may include a plurality of lower electrodes arranged in a first direction and a second direction perpendicular to the first direction, a supporter including a plurality of openings and adjoining the plurality of lower electrodes, a dielectric layer covering the supporter and the plurality of lower electrodes, and an upper electrode covering the dielectric layer, where each of the plurality of openings contacts four lower electrodes, and where the plurality of openings contact opposite sides of the plurality of lower electrodes along the first direction and the second direction.
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公开(公告)号:US20230039823A1
公开(公告)日:2023-02-09
申请号:US17872143
申请日:2022-07-25
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: SEONGJIN JEONG , SEOKHAN PARK , YEJEE SUNWOO , BOWON YOO , YOUNGWOONG SON
IPC: H01L27/108
Abstract: A semiconductor device includes; cell transistors on a substrate, lower electrodes respectively connected to the cell transistors, arranged according to a first pitch in a first horizontal direction, and extending in a vertical direction, and an etching stop layer surrounding lower sidewalls of the lower electrodes and arranged at a level higher than a level of the cell transistors, wherein the etching stop layer includes a first portion vertically overlapping the lower electrodes and a second portion laterally surrounding the first portion, and the second portion includes recesses arranged according to a second pitch in the first horizontal direction.
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公开(公告)号:US20250063724A1
公开(公告)日:2025-02-20
申请号:US18614839
申请日:2024-03-25
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: GYUHWAN OH , JINWOO HAN , SEOKHAN PARK , SUNG-MIN PARK , BOWON YOO
IPC: H10B12/00 , H01L23/522
Abstract: A semiconductor device includes a substrate. Bit lines are disposed on the substrate and extend in a first direction. A shield pattern is disposed on the bit lines. A first word line is disposed on the bit lines. The first word line extends in a second direction crossing the first direction. A second word line extends on the bit lines in the second direction and is spaced apart from the first word line in the first direction. A first active pattern and a second active pattern are disposed on the bit lines and are positioned between the first word line and the second word line. The shield pattern includes an opening pattern disposed between adjacent bit lines of the bit lines.
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公开(公告)号:US20230389289A1
公开(公告)日:2023-11-30
申请号:US18171171
申请日:2023-02-17
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor: SEOKHAN PARK , KISEOK LEE , SEOKHO SHIN , HYUNGEUN CHOI , BOWON YOO
IPC: H10B12/00
CPC classification number: H10B12/315 , H10B12/482 , H10B12/488 , H10B12/05
Abstract: A semiconductor device includes bit line structures on a substrate. Each bit line structure extends in a second direction, and the bit line structures are spaced apart from each other in a first direction. The semiconductor device further includes semiconductor patterns spaced apart from each other in the second direction on each of the bit line structures, insulating interlayer patterns between neighboring ones of the semiconductor patterns in the first direction, and word lines spaced apart from each other in the second direction on the bit line structures. Each word line extends in the first direction adjacent to the semiconductor patterns. The semiconductor device further includes capacitors disposed on and electrically connected to the semiconductor patterns, respectively. A seam extending in the second direction is formed in each of the insulating interlayer patterns.
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公开(公告)号:US20190252386A1
公开(公告)日:2019-08-15
申请号:US16268748
申请日:2019-02-06
Applicant: Samsung Electronics Co., Ltd.
Inventor: KISEOK LEE , BONG-SOO KIM , JIYOUNG KIM , HUI-JUNG KIM , SEOKHAN PARK , HUNKOOK LEE , YOOSANG HWANG
IPC: H01L27/108 , H01L23/528 , H01L29/08 , H01L29/10 , H01L29/165
CPC classification number: H01L27/10805 , H01L23/5226 , H01L23/528 , H01L27/10897 , H01L28/60 , H01L29/0847 , H01L29/1037 , H01L29/165
Abstract: Semiconductor memory devices may include first and second stacks on a substrate and first and second interconnection lines on the first and second stacks. Each of the first and second stacks may include semiconductor patterns vertically stacked on the substrate, conductive lines connected to the semiconductor patterns, respectively, and a gate electrode that is adjacent to the semiconductor patterns and extends in a vertical direction. The first stack may include a first conductive line and a first gate electrode, and the second stack may include a second conductive line and a second gate electrode. Lower surfaces of the first and second conductive lines may be coplanar. The first interconnection line may be electrically connected to at least one of the first and second conductive lines. The second interconnection line may be electrically connected to at least one of the first and second gate electrodes.
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