SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME
    2.
    发明申请
    SEMICONDUCTOR DEVICE AND METHOD OF FORMING THE SAME 审中-公开
    半导体器件及其形成方法

    公开(公告)号:US20150041916A1

    公开(公告)日:2015-02-12

    申请号:US13962285

    申请日:2013-08-08

    Abstract: A co-implant concentration of a source region of a pull-down transistor is higher than those of other co-implant concentrations. Thus, dopants in a halo region of the source region may be prevented from excessively being diffused into a channel region during a post annealing process. As a result, dispersion of saturation threshold voltages of unit memory cells may be reduced.

    Abstract translation: 下拉晶体管的源极区域的共注入浓度高于其他共注入浓度。 因此,可以防止源区域的晕圈区域中的掺杂剂在后退火处理过程中过度扩散到沟道区域。 结果,可以减小单位存储单元的饱和​​阈值电压的偏差。

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