FERROELECTRIC FIELD EFFECT TRANSISTOR, MEMORY DEVICE, AND NEURAL NETWORK APPARATUS INCLUDING GATE-INTERPOSED LAYER

    公开(公告)号:US20250056844A1

    公开(公告)日:2025-02-13

    申请号:US18761631

    申请日:2024-07-02

    Abstract: Provided is a ferroelectric field effect transistor including a source region, a drain region, a channel provided between the source region and the drain region, a ferroelectric layer provided on the channel and including a ferroelectric material including an oxide of a first element, a gate-interposed layer provided on the ferroelectric layer and including a paraelectric material including an oxide of a second element different from the first element, and a gate electrode provided on the gate-interposed layer, wherein the gate-interposed layer includes a first interposed layer adjacent to the ferroelectric layer, and a second interposed layer adjacent to the gate electrode, the first interposed layer includes a mixture of the first element and the second element, and a ratio of the first element in the first interposed layer may be greater than a ratio of the first element in the ferroelectric layer.

    FERROELECTRIC FIELD EFFECT TRANSISTOR, MEMORY DEVICE, AND NEURAL NETWORK DEVICE

    公开(公告)号:US20250126802A1

    公开(公告)日:2025-04-17

    申请号:US18761688

    申请日:2024-07-02

    Abstract: A ferroelectric field effect transistor includes a channel, a gate electrode provided to face the channel, a ferroelectric layer provided between the channel and the gate electrode, an interfacial layer provided between the channel and the ferroelectric layer, and a diffusion barrier layer provided between the ferroelectric layer and the gate electrode, wherein the diffusion barrier layer includes SiON, the diffusion barrier layer has an oxygen concentration gradient that gradually decreases from a first surface of the diffusion barrier layer facing the gate electrode toward a second surface of the diffusion barrier layer facing the ferroelectric layer, and the diffusion barrier layer may have a nitrogen concentration gradient that gradually increases from the first surface toward the second surface.

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