EXPOSURE APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    2.
    发明申请
    EXPOSURE APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 有权
    曝光装置及制造半导体器件的方法

    公开(公告)号:US20170053773A1

    公开(公告)日:2017-02-23

    申请号:US15157407

    申请日:2016-05-18

    Abstract: An exposure apparatus comprising, a stage configured to receive a substrate, a mark array disposed on the stage and comprising a first mark and a second mark separated from each other by a first distance, a first beam irradiator configured to irradiate a first beam to the first mark, a second beam irradiator being separated from the first beam by a pitch greater than the first distance and configured to irradiate a second beam to the second mark, a detector disposed over the mark array and configured to receive a third beam reflected by the first mark and a fourth beam reflected by the second mark, and a controller configured to control the position of the stage using an output of the detector.

    Abstract translation: 一种曝光装置,包括:被配置为接收基板的台,设置在所述台上的标记阵列,并且包括彼此分开第一距离的第一标记和第二标记;第一光束照射器,被配置为将第一光束照射到 第一标记,第二光束照射器,其与所述第一光束分开大于所述第一距离的间距,并被配置为将第二光束照射到所述第二标记;设置在所述标记阵列上方并被配置为接收由所述第一标记阵列反射的第三光束的检测器; 第一标记和由第二标记反射的第四光束,以及控制器,被配置为使用检测器的输出来控制舞台的位置。

    ELECTRONIC DEVICE INCLUDING IMAGE SENSOR HAVING MULTI-CROP FUNCTION

    公开(公告)号:US20220166936A1

    公开(公告)日:2022-05-26

    申请号:US17493185

    申请日:2021-10-04

    Abstract: An electronic device includes first and second image sensors, an image signal processor, and a main processor. The first and second image sensors photograph an object in first and second FOVs to generate first and second signals, respectively. The image signal processor generates first image data based on the first signal, generates second image data based on the second signal, and generates cropped image data based on cropping ROI from the second image data. The main processor generates a first video stream based on the first image data, generates a second video stream based on the cropped image data, and outputs the first video stream to a display device. The main processor stops outputting the first video stream to the display device and initiates outputting the second video stream to the display device in response to receiving a user input command.

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