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公开(公告)号：US09635749B2
公开(公告)日：2017-04-25
申请号：US14995398
申请日：2016-01-14
Applicant: SAMSUNG ELECTRONICS CO., LTD.
Inventor： Sung-Joo Kim , Jin-Seok Heo , Do-Hyun Seo , Da-Hae Lee , Jae-Pil Lee , Sung-Jo Hwang
CPC classification number: H05G2/006 , G21K2201/065 , H01S3/2232 , H05G2/005 , H05G2/008
Abstract: An apparatus for generating extreme ultraviolet light includes a droplet generator which provides a droplet to react with light from a light source to generate extreme ultraviolet light, a droplet collector which collects the droplet, and a droplet detector which includes a plurality of pressure sensors, the pressure sensors detect a position of the droplet provided to the droplet collecting unit.
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公开(公告)号：USD781820S1
公开(公告)日：2017-03-21
申请号：US29513451
申请日：2014-12-31
Applicant: Samsung Electronics Co., Ltd.
Designer： Dae-Kyung Ahn , Dae-Joung Kim , Sang-Sung Woo , Jong-Bae Kim , Jong-In Jo , Sung-Joo Kim , Hong-Pyo Kim , Chi-Young Ahn , Gyeong-Tae Lee
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公开(公告)号：USD778260S1
公开(公告)日：2017-02-07
申请号：US29513444
申请日：2014-12-31
Applicant: Samsung Electronics Co., Ltd.
Designer： Dae-Kyung Ahn , Dae-Joung Kim , Sang-Sung Woo , Jong-Bae Kim , Jong-In Jo , Sung-Joo Kim , Hong-Pyo Kim , Chi-Young Ahn , Gyeong-Tae Lee
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公开(公告)号：USD782445S1
公开(公告)日：2017-03-28
申请号：US29513454
申请日：2014-12-31
Applicant: Samsung Electronics Co., Ltd.
Designer： Dae-Kyung Ahn , Dae-Joung Kim , Sang-Sung Woo , Jong-Bae Kim , Jong-In Jo , Sung-Joo Kim , Hong-Pyo Kim , Chi-Young Ahn , Gyeong-Tae Lee
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