公开(公告)号：US20180053295A1

公开(公告)日：2018-02-22

申请号：US15417558

申请日：2017-01-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung-Yoon Ryu ,  Joon-Seo Song ,  Yu-Sin Yang ,  Chung-Sam Jun ,  Yun-Jung Jee

IPC: G06T7/00 ,  G06T7/11 ,  G06T7/174 ,  G02B21/00 ,  G01N23/225 ,  G01N21/956 ,  G01N21/95 ,  H01J37/22

Abstract: In a defect inspection method, first and second inspection conditions having a first sensitivity of detection signal and having a second sensitivity of a detection signal for a defect of interest (DOI), respectively, are determined. The first and second sensitivities are different. First and second images of the same detection region on a substrate surface under the first and second inspection conditions respectively, are obtained. The first and second images are matched to detect a defect in the detection region.

公开(公告)号：US09831626B2

公开(公告)日：2017-11-28

申请号：US14872228

申请日：2015-10-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung-Yoon Ryu ,  Woo-Seok Ko ,  Yu-Sin Yang ,  Sang-Kil Lee ,  Chung-Sam Jun ,  Seong-Jin Yun

IPC: H01S3/00 ,  G01N21/88 ,  G01N21/956

CPC classification number: H01S3/0071 ,  G01N21/8806 ,  G01N21/956

Abstract: A broadband light source includes a first electrodeless lamp to generate first broadband light from plasma, a first elliptical reflector having first and second focuses, the first elliptical reflector enclosing a rear portion of the first electrodeless lamp positioned at the first focus of the first elliptical reflector such that the first broadband light is reflected from the first elliptical reflector toward a light collector as a collective light, a symmetrically curved reflector having a third focus, the symmetrically curved reflector positioned such that the third focus is coincident with one of the first and second focuses, and a laser irradiator to provide a laser beam to the first electrodeless lamp.

公开(公告)号：US20160025618A1

公开(公告)日：2016-01-28

申请号：US14806775

申请日：2015-07-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung-Yoon Ryu ,  Woo-Seok KO ,  Yu-Sin YANG ,  Sang-Kil LEE ,  Chung-Sam JUN

IPC: G01N21/21 ,  G01N21/95

CPC classification number: G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/213

Abstract: Spectral ellipsometry measurement systems are provided including a polarizer that rotates at a first angle and adjusts a polarizing direction of incident light of a measurement sample; a compensator that rotates at a second angle, different from the first angle, and adjusts a phase difference of the incident light; an analyzer that rotates at a third angle and adjusts a polarizing direction of light reflected on the measurement sample; a detector that detects a spectral image from the reflected light; a controller that controls one of the polarizer, the compensator, and the analyzer according to polarizer-compensator-analyzer (PCA) angle sets including the first to third angles; and a processor that receives, from the detector, a first spectral image corresponding to a first PCA angle set and a first wavelength and a second spectral image corresponding to a second PCA angle set and a second wavelength, different from the first wavelength, and generates a polarizer-compensator-analyzer rotating (PCAR) spectral matrix using the first and second spectral images.

Abstract translation: 提供了光谱椭圆测量系统，其包括以第一角度旋转并调节测量样品的入射光的偏振方向的偏振器; 补偿器，其以与第一角度不同的第二角度旋转，并调节入射光的相位差; 分析器，其以第三角度旋转并调节在测量样品上反射的光的偏振方向; 从反射光检测光谱图像的检测器; 根据包括第一至第三角度的偏振器 - 补偿器分析器（PCA）角度集合控制偏振器，补偿器和分析器之一的控制器; 以及处理器，其从所述检测器接收对应于与所述第一波长不同的第一PCA角度集合和对应于第二PCA角度集合和第二波长的第一波长和第二光谱图像的第一光谱图像，并且生成 使用第一和第二光谱图像的偏振器 - 补偿器分析器旋转（PCAR）光谱矩阵。

公开(公告)号：US10593032B2

公开(公告)日：2020-03-17

申请号：US15417558

申请日：2017-01-27

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung-Yoon Ryu ,  Joon-Seo Song ,  Yu-Sin Yang ,  Chung-Sam Jun ,  Yun-Jung Jee

IPC: G01N21/95 ,  G01N21/88 ,  G06K9/00 ,  G01B11/00 ,  G06T7/00 ,  G01N21/956 ,  H01L21/66 ,  G02B21/00 ,  G06T7/11 ,  G06T7/174 ,  G01N23/2251 ,  H01J37/22

Abstract: In a defect inspection method, first and second inspection conditions having a first sensitivity of detection signal and having a second sensitivity of a detection signal for a defect of interest (DOI), respectively, are determined. The first and second sensitivities are different. First and second images of the same detection region on a substrate surface under the first and second inspection conditions respectively, are obtained. The first and second images are matched to detect a defect in the detection region.

公开(公告)号：US09733178B2

公开(公告)日：2017-08-15

申请号：US14806775

申请日：2015-07-23

Applicant: Samsung Electronics Co., Ltd.

Inventor： Sung-Yoon Ryu ,  Woo-Seok Ko ,  Yu-Sin Yang ,  Sang-Kil Lee ,  Chung-Sam Jun

IPC: G01N21/21 ,  G01N21/95 ,  G01N21/956

CPC classification number: G01N21/211 ,  G01N21/9501 ,  G01N21/956 ,  G01N2021/213

Abstract: Spectral ellipsometry measurement systems are provided including a polarizer that rotates at a first angle and adjusts a polarizing direction of incident light of a measurement sample; a compensator that rotates at a second angle, different from the first angle, and adjusts a phase difference of the incident light; an analyzer that rotates at a third angle and adjusts a polarizing direction of light reflected on the measurement sample; a detector that detects a spectral image from the reflected light; a controller that controls one of the polarizer, the compensator, and the analyzer according to polarizer-compensator-analyzer (PCA) angle sets including the first to third angles; and a processor that receives, from the detector, a first spectral image corresponding to a first PCA angle set and a first wavelength and a second spectral image corresponding to a second PCA angle set and a second wavelength, different from the first wavelength, and generates a polarizer-compensator-analyzer rotating (PCAR) spectral matrix using the first and second spectral images.

公开(公告)号：US09417055B2

公开(公告)日：2016-08-16

申请号：US14799107

申请日：2015-07-14

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Sung-Yoon Ryu ,  Sang-Kil Lee ,  Chung-Sam Jun ,  Woo-Seok Ko ,  Ho-Jeong Kwak ,  Souk Kim ,  Kwan-Woo Ryu ,  Yu-Sin Yang

IPC: G01B11/28 ,  G01B11/06

CPC classification number: G01B11/0633

Abstract: An apparatus and a system for measuring the thickness of a thin film are provided. The apparatus includes a signal detector, a Fast Fourier Transform (FFT) generator, an Inverse Fast Fourier Transform (IFFT) generator, and a thickness analyzer. The signal detector detects an electric field signal with respect to a reflected light that is reflected from a thin film. The FFT generator performs FFT with respect to the electric field signal to separate a DC component from an AC component of the electric field signal. The IFFT generator receives the separated AC component of the electric field signal, performs IFFT with respect to the AC component, and extracts a phase value of the AC component. The thickness analyzer measures the thickness of the thin film using the extracted phase value.

Abstract translation: 提供了用于测量薄膜厚度的装置和系统。 该装置包括信号检测器，快速傅里叶变换（FFT）发生器，快速傅里叶逆变换（IFFT）发生器和厚度分析器。 信号检测器检测相对于从薄膜反射的反射光的电场信号。 FFT发生器相对于电场信号执行FFT，以将DC分量与电场信号的AC分量分离。 IFFT发生器接收电场信号的分离的AC分量，相对于AC分量执行IFFT，并提取AC分量的相位值。 厚度分析器使用提取的相位值来测量薄膜的厚度。