公开(公告)号：US20160084901A1

公开(公告)日：2016-03-24

申请号：US14677173

申请日：2015-04-02

Applicant: Samsung Electronics Co., Ltd.

Inventor： Mi-Ra PARK ,  Dae-Jin SUNG ,  Yu-Sin YANG ,  Na-Kyoung LEE ,  Sang-Kil LEE ,  Chung-Sam JUN ,  Yong-Deok JEONG

IPC: G01R31/265

CPC classification number: G01R31/307 ,  G01R31/2831 ,  H01L22/12 ,  H01L22/14

Abstract: A method of inspecting a resistive defect of a semiconductor device is provided. The method includes loading a semiconductor wafer on a wafer stocker, transferring the semiconductor wafer into a laser anneal module, annealing a portion of the semiconductor wafer using a laser beam in an atmospheric pressure, transferring the annealed semiconductor wafer into an E-beam scanning module in a vacuum, scanning the annealed portions of the semiconductor wafer with an E-beam, and collecting secondary electrons emitted from the annealed portions of the semiconductor wafer.

Abstract translation: 提供了一种检查半导体器件的电阻缺陷的方法。 该方法包括将晶片储存器上的半导体晶片加载，将半导体晶片转移到激光退火模块中，使用大气压力的激光束退火半导体晶片的一部分，将退火的半导体晶片转移到电子束扫描模块 在真空中，用电子束扫描半导体晶片的退火部分，并收集从半导体晶片的退火部分发射的二次电子。

公开(公告)号：US20160018328A1

公开(公告)日：2016-01-21

申请号：US14805439

申请日：2015-07-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Tae-Joong Kim ,  Yong-Deok JEONG ,  Kwang-Soo KIM ,  Byeong-Hwan JEON ,  Yu-Sin YANG ,  Sang-Kil LEE ,  Chung-Sam JUN

IPC: G01N21/47 ,  G02B3/00 ,  G01N21/95 ,  G02B26/08

CPC classification number: G01N21/9501 ,  G02B3/0006 ,  G02B21/0016 ,  G02B26/0808

Abstract: An optical transformation module includes a light generator generating a parallel light beam to be incident onto a surface of an inspection object and changing a wavelength of the parallel light beam, and a rotating grating positioned on a path of the parallel light beam and rotatable by a predetermined rotation angle such that the parallel light beam is transformed according to the wavelength of the parallel light beam and the rotation angle of the rotating grating to have a desired incidence angle and a desired incidence position onto the surface of the inspection object.

Abstract translation: 光学变换模块包括产生入射到检查对象的表面上的平行光束并改变平行光束的波长的光发生器，以及位于平行光束的路径上的旋转光栅， 预定的旋转角度，使得平行光束根据平行光束的波长和旋转光栅的旋转角度被变换以具有期望的入射角和期望的入射位置到检查对象的表面上。