公开(公告)号：USD747720S1

公开(公告)日：2016-01-19

申请号：US29470819

申请日：2013-10-25

Applicant: Samsung Electronics Co., Ltd.

Designer： Da-Hyun Lee ,  Christine Rhea Oh ,  Tae-Joong Kim

公开(公告)号：USD744467S1

公开(公告)日：2015-12-01

申请号：US29470820

申请日：2013-10-25

Applicant: Samsung Electronics Co., Ltd.

Designer： Da-Hyun Lee ,  Christine Rhea Oh ,  Tae-Joong Kim

公开(公告)号：US09746430B2

公开(公告)日：2017-08-29

申请号：US14823343

申请日：2015-08-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Tae-Joong Kim ,  Young-Kyu Park ,  Ki-Jung Son ,  Byeong-Hwan Jeon ,  Chang-Hoon Choi

IPC: G01N21/00 ,  G01N21/956 ,  G01N21/958

CPC classification number: G01N21/956 ,  G01N21/958 ,  G01N2021/95676

Abstract: An optical inspecting apparatus includes a first light source, a beam splitter, a first lens, a first light detector, and pinhole plates. The first light source emits a first light beam. The beam splitter transmits or reflects the first light beam. The first lens provides the first light beam to transmit through a transparent substrate of a photomask and forms a first focusing spot on a first surface of the transparent substrate or a top surface of a photomask pattern formed on the transparent substrate. The first light detector detects a first reflection light beam generated by reflecting the first light beam from the first surface of the transparent substrate or the top surface of the photomask pattern. The pinhole plates are disposed in front of the first light detector to filter noise in the reflection light beam.

公开(公告)号：USD743961S1

公开(公告)日：2015-11-24

申请号：US29480222

申请日：2014-01-24

Applicant: Samsung Electronics Co., Ltd.

Designer： Christine Rhea Oh ,  Tae-Joong Kim

公开(公告)号：US20180144995A1

公开(公告)日：2018-05-24

申请号：US15702870

申请日：2017-09-13

Applicant: Samsung Electronics Co., Ltd.

Inventor： Young-Duk Kim ,  Byeong-Hwan Jeon ,  Kyung-Sik Kang ,  Kang-Woong Ko ,  Soo-Ryong Kim ,  Tae-Joong Kim ,  Jun-Bum Park ,  Gil-Woo Song ,  Sung-Ho Jang ,  Hyoung-Jo Jeon ,  Jae-Chol Joo

IPC: H01L21/66 ,  H01L21/78 ,  G01B11/06 ,  G01B11/02 ,  G01N21/88 ,  G01N21/95

CPC classification number: H01L22/12 ,  G01B11/022 ,  G01B11/06 ,  G01B11/0633 ,  G01B2210/56 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/8845 ,  G01N2021/8848 ,  H01L21/78

Abstract: An optical inspection apparatus includes a broadband light source, a monochromator, an image obtaining apparatus, and an analysis device. The monochromator is configured to convert light from the broadband light source into a plurality of monochromatic beams of different wavelengths and sequentially output the monochromatic beams, where each beam has a preset wavelength width and corresponds to one of a plurality of different wavelength regions. The image obtaining apparatus is configured to allow each monochromatic beam output from the monochromator to be incident to a top surface of an inspection target without using a beam splitter, allow light reflected by the inspection target to travel in a form of light of an infinite light source, and generate 2D images of the inspection target. The analysis device is configured to analyze the 2D images of the inspection target in the plurality of wavelength regions.

公开(公告)号：USD747713S1

公开(公告)日：2016-01-19

申请号：US29494412

申请日：2014-06-20

Applicant: Samsung Electronics Co., Ltd.

Designer： Jung-Hyun Choi ,  Tae-Joong Kim ,  Christine Oh

公开(公告)号：USD741830S1

公开(公告)日：2015-10-27

申请号：US29470815

申请日：2013-10-25

Applicant: Samsung Electronics Co., Ltd.

Designer： Da-Hyun Lee ,  Christine Rhea Oh ,  Tae-Joong Kim

公开(公告)号：USD716303S1

公开(公告)日：2014-10-28

申请号：US29480237

申请日：2014-01-24

Applicant: Samsung Electronics Co., Ltd.

Designer： Christine Rhea Oh ,  Tae-Joong Kim

公开(公告)号：US09897552B2

公开(公告)日：2018-02-20

申请号：US14805439

申请日：2015-07-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Tae-Joong Kim ,  Yong-Deok Jeong ,  Kwang-Soo Kim ,  Byeong-Hwan Jeon ,  Yu-Sin Yang ,  Sang-Kil Lee ,  Chung-Sam Jun

IPC: G01N21/47 ,  G01N21/95 ,  G02B26/08 ,  G02B3/00 ,  G02B21/00

CPC classification number: G01N21/9501 ,  G02B3/0006 ,  G02B21/0016 ,  G02B26/0808

Abstract: An optical transformation module includes a light generator generating a parallel light beam to be incident onto a surface of an inspection object and changing a wavelength of the parallel light beam, and a rotating grating positioned on a path of the parallel light beam and rotatable by a predetermined rotation angle such that the parallel light beam is transformed according to the wavelength of the parallel light beam and the rotation angle of the rotating grating to have a desired incidence angle and a desired incidence position onto the surface of the inspection object.

公开(公告)号：US20160018328A1

公开(公告)日：2016-01-21

申请号：US14805439

申请日：2015-07-21

Applicant: Samsung Electronics Co., Ltd.

Inventor： Tae-Joong Kim ,  Yong-Deok JEONG ,  Kwang-Soo KIM ,  Byeong-Hwan JEON ,  Yu-Sin YANG ,  Sang-Kil LEE ,  Chung-Sam JUN

IPC: G01N21/47 ,  G02B3/00 ,  G01N21/95 ,  G02B26/08

CPC classification number: G01N21/9501 ,  G02B3/0006 ,  G02B21/0016 ,  G02B26/0808

Abstract: An optical transformation module includes a light generator generating a parallel light beam to be incident onto a surface of an inspection object and changing a wavelength of the parallel light beam, and a rotating grating positioned on a path of the parallel light beam and rotatable by a predetermined rotation angle such that the parallel light beam is transformed according to the wavelength of the parallel light beam and the rotation angle of the rotating grating to have a desired incidence angle and a desired incidence position onto the surface of the inspection object.

Abstract translation: 光学变换模块包括产生入射到检查对象的表面上的平行光束并改变平行光束的波长的光发生器，以及位于平行光束的路径上的旋转光栅， 预定的旋转角度，使得平行光束根据平行光束的波长和旋转光栅的旋转角度被变换以具有期望的入射角和期望的入射位置到检查对象的表面上。