SEMICONDUCTOR DEVICE INCLUDING CAPACITOR AND METHOD OF FABRICATING THE SAME
    1.
    发明申请
    SEMICONDUCTOR DEVICE INCLUDING CAPACITOR AND METHOD OF FABRICATING THE SAME 有权
    包括电容器的半导体器件及其制造方法

    公开(公告)号:US20160104763A1

    公开(公告)日:2016-04-14

    申请号:US14863820

    申请日:2015-09-24

    CPC classification number: H01L28/75 H01L28/90

    Abstract: A semiconductor device includes a lower electrode on a lower structure, a dielectric layer conformally covering a surface of the lower electrode, an upper electrode conformally covering a surface of the dielectric layer, and a barrier layer on the upper electrode. The barrier layer and the upper electrode define a space on a sidewall of the lower electrode.

    Abstract translation: 半导体器件包括下部结构的下部电极,保形地覆盖下部电极的表面的电介质层,保持覆盖电介质层的表面的上部电极和上部电极上的阻挡层。 阻挡层和上电极在下电极的侧壁上形成空间。

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