摘要:
A method of operating a semiconductor memory device includes an operation of applying a first voltage to selected bit lines, a second voltage to unselected bit lines and a common source line, and turning on drain and source selection transistors, an operation of applying a program voltage to a selected word line and a switch voltage to a switch word line, and applying a first pass voltage to first unselected word lines disposed between the switch word line and a common source line and between the selected word line and a bit line, and elevating the switch voltage to generate hot electrons and inject the hot electrons to a selected memory cell of the selected word line to program the selected cell.
摘要:
The recess channel transistor includes: a semiconductor substrate including a device insulation layer defining an activation region in which recesses are formed; insulation buffer patterns, each of which is formed at an opening of the recess on a surface of the substrate; gates, each of which includes a recess gate formed in the recess and a top gate formed on the substrate; spacers, each of which is formed at both sides of the gate; and a source region and a drain region formed at both sides of each gate on the surface of the substrate, where the source and drain regions have an even doping profile due to the existence of insulation buffer patterns. Accordingly, characteristics of the transistor can be prevented from deteriorating due to misalignment of the top gate with the recess gate.
摘要:
The present invention relates to a method for fabricating a semiconductor laser diode in optical communication system, and the present invention uses both an oxide and a nitride pattern as an etch mask instead of the single oxide pattern in order to decrease the under cut of the edge of the oxide pattern.
摘要:
There is disclosed a method of manufacturing a transistor in a semiconductor device. The present invention isolates a semiconductor substrate by an oxide layer with only a source, a drain and a channel region necessary for driving a transistor being left. Thus, it can obviate the current components due to parasitic factors to improve the punch-through characteristic.
摘要:
A semiconductor memory device using a silicon-on-insulator device, including a semiconductor memory device capable of reducing the topology between a cell region and a peripheral region and preventing floating body effect.
摘要:
A method for fabricating a semiconductor memory device using a silicon-on-insulator device, including forming a semiconductor memory device capable of reducing the topology between a cell region and a peripheral region and preventing floating body effect.
摘要:
The present invention relates to a method for fabricating a semiconductor laser diode in optical communication system, having the steps for forming current blocking layers on the resulting structure of the mesa structure and then forming an opening through the current blocking layer on the mesa structure.
摘要:
A semiconductor device and a method for manufacturing the same are disclosed. The disclosed semiconductor device includes a semiconductor substrate having a device isolation structure for delimiting an active region, the active region being recessed and grooves being defined in channel forming areas of the active region; gates formed in and over the grooves; gate spacers formed on both sidewalls of the gates over portions of the recessed active region which are positioned on both sides of the gates; an LDD region formed in the active region under the gate spacers; junction areas formed in the active region on both sides of the gates including the gate spacers; and landing plugs formed on the junction areas.
摘要:
A semiconductor device and a method for manufacturing the same are disclosed. The disclosed semiconductor device includes a semiconductor substrate having a device isolation structure for delimiting an active region, the active region being recessed and grooves being defined in channel forming areas of the active region; gates formed in and over the grooves; gate spacers formed on both sidewalls of the gates over portions of the recessed active region which are positioned on both sides of the gates; an LDD region formed in the active region under the gate spacers; junction areas formed in the active region on both sides of the gates including the gate spacers; and landing plugs formed on the junction areas.
摘要:
The recess channel transistor includes: a semiconductor substrate including a device insulation layer defining an activation region in which recesses are formed; insulation buffer patterns, each of which is formed at an opening of the recess on a surface of the substrate; gates, each of which includes a recess gate formed in the recess and a top gate formed on the substrate; spacers, each of which is formed at both sides of the gate; and a source region and a drain region formed at both sides of each gate on the surface of the substrate, where the source and drain regions have an even doping profile due to the existence of insulation buffer patterns. Accordingly, characteristics of the transistor can be prevented from deteriorating due to misalignment of the top gate with the recess gate.