公开(公告)号：US20120008137A1

公开(公告)日：2012-01-12

申请号：US12833093

申请日：2010-07-09

申请人： Scott A. Young ,  Daniel L. Cavan ,  Yale Zhang ,  Aviv Balan

发明人： Scott A. Young ,  Daniel L. Cavan ,  Yale Zhang ,  Aviv Balan

IPC分类号： G01N21/84

CPC分类号： G01N21/956 ,  G01N21/9501

摘要： A system for inspecting a constant layer depth relative to a particular device layer. The system has an image sensor with a fixed focal plane. A focus sensor senses the surface topography of the substrate and outputs a focus data stream. A stage moves the substrate in an XY plane, and a motor moves the substrate in a Z dimension. A controller operates the system in one of a setup mode and an inspection mode. In the setup mode the controller controls XY movement of the substrate so as to scan a first portion of the substrate. The controller receives the focus data stream, concurrently receives XY data, and stores correlated XYZ data for the substrate. In the inspection mode the controller controls XY movement of the substrate so as to scan a second portion of the substrate. The controller receives the focus data stream, concurrently receives XY data, and subtracts the stored Z data from the focus data stream to produce a virtual data stream. The controller feeds the virtual data stream plus an offset to the motor for moving the substrate up and down during the inspection, thereby holding the focal plane at a desired Z distance, regardless of the surface topography of the substrate.

摘要翻译： 用于检查相对于特定器件层的恒定层深度的系统。 该系统具有一个具有固定焦平面的图像传感器。 聚焦传感器感测基板的表面形貌并输出焦点数据流。 台架在XY平面上移动基板，马达使基板移动Z轴。 控制器以设置模式和检查模式之一操作系统。 在设置模式下，控制器控制衬底的XY运动，以扫描衬底的第一部分。 控制器接收聚焦数据流，同时接收XY数据，并存储基板的相关XYZ数据。 在检查模式中，控制器控制衬底的XY运动，以扫描衬底的第二部分。 控制器接收聚焦数据流，同时接收XY数据，并从聚焦数据流中减去存储的Z数据，以产生虚拟数据流。 控制器将虚拟数据流和偏移量馈送到电动机，以在检查期间上下移动衬底，从而将焦平面保持在期望的Z距离，而不管衬底的表面形貌如何。

公开(公告)号：US08643835B2

公开(公告)日：2014-02-04

申请号：US12833093

申请日：2010-07-09

申请人： Scott A. Young ,  Daniel L. Cavan ,  Yale Zhang ,  Aviv Balan

发明人： Scott A. Young ,  Daniel L. Cavan ,  Yale Zhang ,  Aviv Balan

IPC分类号： G01N21/00 ,  G01B11/14 ,  G06K9/00

CPC分类号： G01N21/956 ,  G01N21/9501

摘要： A system for inspecting a depth relative to a layer using a sensor with a fixed focal plane. A focus sensor senses the surface of the substrate and outputs focus data. In setup mode the controller scans a first portion of the substrate, receives the focus data and XY data, and stores correlated XYZ data for the substrate. In inspection mode the controller scans a second portion of the substrate, receives the focus data and XY data, and subtracts the stored Z data from the focus data to produce virtual data. The controller feeds the virtual data plus an offset to the motor for moving the substrate up and down during the inspection, thereby holding the focal plane at a desired Z distance.

摘要翻译： 一种用于使用具有固定焦平面的传感器检查相对于层的深度的系统。 聚焦传感器感测基板的表面并输出焦点数据。 在设置模式下，控制器扫描基板的第一部分，接收聚焦数据和XY数据，并存储基板的相关XYZ数据。 在检查模式下，控制器扫描基板的第二部分，接收焦点数据和XY数据，并从焦点数据中减去存储的Z数据，以产生虚拟数据。 控制器将虚拟数据加上偏移量供给电机，以在检查期间上下移动基板，从而将焦平面保持在所需的Z距离。

公开(公告)号：US20090067114A1

公开(公告)日：2009-03-12

申请号：US11865203

申请日：2007-10-01

申请人： Aviv Balan

发明人： Aviv Balan

IPC分类号： H01L21/683

CPC分类号： H01L21/6838 ,  Y10T279/11

摘要： A chuck for releasably retaining a substrate, where the chuck has a body with a substrate receiving surface disposed in an X-Y coordinate plane and adapted to receive the substrate. The body has gas pressure delivery channels and gas vacuum drawing channels, where the gas pressure delivery channels and gas vacuum drawing channels are mutually exclusive within the body. The substrate receiving surface has gas pressure delivery portions in communication with the gas pressure delivery channels, for delivering a gas pressure against the substrate while the substrate is retained by the chuck, and thereby keeping the substrate from contacting the substrate receiving surface. The substrate receiving surface also has gas vacuum drawing portions in communication with the gas vacuum drawing channels, for drawing a gas vacuum against the substrate while the substrate is retained by the chuck, and thereby retaining the substrate proximate the substrate receiving surface. Retaining means retain the substrate in X-Y directions from sliding off of the substrate receiving surface.

摘要翻译： 一种用于可释放地保持基板的卡盘，其中卡盘具有设置在X-Y坐标平面中并适于接收基板的基板接收表面的主体。 身体具有气体压力输送通道和气体真空吸气通道，其中气体压力输送通道和气体真空拉伸通道在体内相互排斥。 基板接收表面具有与气体压力输送通道连通的气体压力输送部分，用于在基板被卡盘保持的同时将气体压力传递到基板，从而保持基板不与基板接收表面接触。 衬底接收表面还具有与气体真空抽吸通道连通的气体真空抽吸部分，用于在衬底被卡盘保持的同时将气体真空吸附在衬底上，从而将衬底保持靠近衬底接收表面。 保持装置在基板接收表面滑动时将基板保持在X-Y方向上。

公开(公告)号：US08285418B2

公开(公告)日：2012-10-09

申请号：US12834220

申请日：2010-07-12

申请人： Aviv Balan

发明人： Aviv Balan

IPC分类号： G05B19/418

CPC分类号： B25J9/0096 ,  H01L21/67288 ,  H01L21/67742 ,  H01L21/67748 ,  H01L21/68 ,  H01L22/12

摘要： A profilometer having a guide beam for providing translational movement of substrates in a Y axis relative to a stylus. A first stage receives a first substrate, where the first stage is slidably mounted to the guide beam. The first stage is associated with a first motor for providing independent translational movement for the first stage in an X axis relative to the stylus. A second stage receives a second substrate, where the second stage is slidably mounted to the guide beam. The second stage is associated with a second motor for providing independent translational movement for the second stage in the X axis relative to the stylus, where the first stage and the second stage move together in the Y axis as the guide beam moves in the Y axis, and move independently of one another in the X axis. A robot loads the substrates onto and unloads the substrates off of the first stage and the second stage. A controller directs the robot to load the second substrate onto the second stage, while simultaneously directing the first stage and the guide beam to scan the first substrate on the first stage in the X and Y axes under the stylus, thereby generating profile readings of the first substrate on the first stage.

摘要翻译： 具有引导梁的轮廓仪，用于提供相对于触笔的Y轴的衬底的平移运动。 第一级接收第一衬底，其中第一级可滑动地安装到引导梁。 第一阶段与第一电动机相关联，用于为相对于触笔的X轴中的第一阶段提供独立的平移运动。 第二阶段接收第二基板，其中第二台可滑动地安装到导向梁。 第二级与第二电动机相关联，用于相对于触笔为X轴提供用于第二级的独立平移运动，其中第一级和第二级在Y轴上一起移动，因为导向梁在Y轴上移动 并且在X轴上彼此独立地移动。 机器人将基板装载到第一阶段和第二阶段之上并将其卸载。 控制器引导机器人将第二衬底加载到第二阶段上，同时引导第一阶段和引导梁扫描第一阶段上的第一基底上X和Y轴在触针下方，从而产生图形读数 第一阶段的第一衬底。

公开(公告)号：US07992877B2

公开(公告)日：2011-08-09

申请号：US11865203

申请日：2007-10-01

申请人： Aviv Balan

发明人： Aviv Balan

IPC分类号： B23B31/30

CPC分类号： H01L21/6838 ,  Y10T279/11

摘要： A chuck for releasably retaining a substrate, where the chuck has a body with a substrate receiving surface disposed in an X-Y coordinate plane and adapted to receive the substrate. The body has gas pressure delivery channels and gas vacuum drawing channels, where the gas pressure delivery channels and gas vacuum drawing channels are mutually exclusive within the body. The substrate receiving surface has gas pressure delivery portions in communication with the gas pressure delivery channels, for delivering a gas pressure against the substrate while the substrate is retained by the chuck, and thereby keeping the substrate from contacting the substrate receiving surface. The substrate receiving surface also has gas vacuum drawing portions in communication with the gas vacuum drawing channels, for drawing a gas vacuum against the substrate while the substrate is retained by the chuck, and thereby retaining the substrate proximate the substrate receiving surface. Retaining means retain the substrate in X-Y directions from sliding off of the substrate receiving surface.

摘要翻译： 一种用于可释放地保持基板的卡盘，其中卡盘具有设置在X-Y坐标平面中并适于接收基板的基板接收表面的主体。 身体具有气体压力输送通道和气体真空吸气通道，其中气体压力输送通道和气体真空拉伸通道在体内相互排斥。 基板接收表面具有与气体压力输送通道连通的气体压力输送部分，用于在基板被卡盘保持的同时将气体压力传递到基板，从而保持基板不与基板接收表面接触。 衬底接收表面还具有与气体真空抽吸通道连通的气体真空抽吸部分，用于在衬底被卡盘保持的同时将气体真空吸附在衬底上，从而将衬底保持靠近衬底接收表面。 保持装置在基板接收表面滑动时将基板保持在X-Y方向上。

公开(公告)号：US20130073082A1

公开(公告)日：2013-03-21

申请号：US13618545

申请日：2012-09-14

申请人： Aviv Balan

发明人： Aviv Balan

IPC分类号： B25J9/00

CPC分类号： B25J9/0096 ,  H01L21/67288 ,  H01L21/67742 ,  H01L21/67748 ,  H01L21/68 ,  H01L22/12

摘要： A system having a beam for providing movement of a first stage and a second stage in a Y axis. The first stage receives a first substrate. A first motor provides movement for the first stage in an X axis. The second stage receives a second substrate. A second motor provides movement for the second stage in the X axis. The first stage and the second stage move together in the Y axis and independently in the X axis. A robot loads substrates onto the first stage and the second stage. A controller directs the robot to load a second substrate onto the second stage while simultaneously directing the first stage and the guide beam to scan a first substrate.

摘要翻译： 一种具有用于在Y轴上提供第一级和第二级的移动的光束的系统。 第一级接收第一衬底。 第一个电机为X轴上的第一阶段提供运动。 第二阶段接收第二基板。 第二个电机为X轴上的第二阶段提供运动。 第一阶段和第二阶段在Y轴上一起移动，并在X轴上独立运动。 机器人将基板装载到第一阶段和第二阶段。 控制器引导机器人将第二衬底加载到第二阶段上，同时引导第一阶段和引导梁来扫描第一衬底。

公开(公告)号：US08924014B2

公开(公告)日：2014-12-30

申请号：US13618545

申请日：2012-09-14

申请人： Aviv Balan

发明人： Aviv Balan

IPC分类号： B25J13/08 ,  G01N21/88 ,  G05B19/418 ,  H01L21/67 ,  H01L21/677 ,  H01L21/68 ,  B25J9/00 ,  H01L21/66

CPC分类号： B25J9/0096 ,  H01L21/67288 ,  H01L21/67742 ,  H01L21/67748 ,  H01L21/68 ,  H01L22/12

摘要： A system having a beam for providing movement of a first stage and a second stage in a Y axis. The first stage receives a first substrate. A first motor provides movement for the first stage in an X axis. The second stage receives a second substrate. A second motor provides movement for the second stage in the X axis. The first stage and the second stage move together in the Y axis and independently in the X axis. A robot loads substrates onto the first stage and the second stage. A controller directs the robot to load a second substrate onto the second stage while simultaneously directing the first stage and the guide beam to scan a first substrate.

摘要翻译： 一种具有用于在Y轴上提供第一级和第二级的移动的光束的系统。 第一级接收第一衬底。 第一个电机为X轴上的第一阶段提供运动。 第二阶段接收第二基板。 第二个电机为X轴上的第二阶段提供运动。 第一阶段和第二阶段在Y轴上一起移动，并在X轴上独立运动。 机器人将基板装载到第一阶段和第二阶段。 控制器引导机器人将第二衬底加载到第二阶段上，同时引导第一阶段和引导梁来扫描第一衬底。

公开(公告)号：US20110022227A1

公开(公告)日：2011-01-27

申请号：US12834220

申请日：2010-07-12

申请人： Aviv Balan

发明人： Aviv Balan

IPC分类号： B25J13/08 ,  G01N21/88 ,  G05B19/418

CPC分类号： B25J9/0096 ,  H01L21/67288 ,  H01L21/67742 ,  H01L21/67748 ,  H01L21/68 ,  H01L22/12

摘要： A profilometer having a guide beam for providing translational movement of substrates in a Y axis relative to a stylus. A first stage receives a first substrate, where the first stage is slidably mounted to the guide beam. The first stage is associated with a first motor for providing independent translational movement for the first stage in an X axis relative to the stylus. A second stage receives a second substrate, where the second stage is slidably mounted to the guide beam. The second stage is associated with a second motor for providing independent translational movement for the second stage in the X axis relative to the stylus, where the first stage and the second stage move together in the Y axis as the guide beam moves in the Y axis, and move independently of one another in the X axis. A robot loads the substrates onto and unloads the substrates off of the first stage and the second stage. A controller directs the robot to load the second substrate onto the second stage, while simultaneously directing the first stage and the guide beam to scan the first substrate on the first stage in the X and Y axes under the stylus, thereby generating profile readings of the first substrate on the first stage.

摘要翻译： 具有引导梁的轮廓仪，用于提供相对于触笔的Y轴的衬底的平移运动。 第一级接收第一衬底，其中第一级可滑动地安装到引导梁。 第一阶段与第一电动机相关联，用于为相对于触笔的X轴中的第一阶段提供独立的平移运动。 第二阶段接收第二基板，其中第二台可滑动地安装到导向梁。 第二级与第二电动机相关联，用于相对于触笔为X轴提供用于第二级的独立平移运动，其中第一级和第二级在Y轴上一起移动，因为导向梁在Y轴上移动 并且在X轴上彼此独立地移动。 机器人将基板装载到第一阶段和第二阶段之上并将其卸载。 控制器引导机器人将第二衬底加载到第二阶段上，同时引导第一阶段和引导梁扫描第一阶段上的第一基底上X和Y轴在触针下方，从而产生图形读数 第一阶段的第一衬底。