摘要:
A process mass flow instrument for measuring the mass flow rate of a process fluid including a fluid inlet, a fluid outlet, a flow passage connecting the fluid inlet and the fluid outlet, a fluid flow sensor which provides a raw output signal corresponding to an unknown mass flow rate and a processor which contains an empirically derived conversion routine for converting the raw output signal to an adjusted signal indicating the mass flow rate of the process fluid. A method for determining an unknown mass flow using an empirically derived conversion function, the function being derived by correlating the output signals of a mass flow instrument sensing the flow of a calibration fluid with the output signals of the mass flow instrument sensing the flow of the process fluid.
摘要:
A process mass flow instrument for measuring the mass flow rate of a process fluid including a fluid inlet, a fluid outlet, a flow passage connecting the fluid inlet and the fluid outlet, a fluid flow sensor which provides a raw output signal corresponding to an unknown mass flow rate and a processor which contains an empirically derived conversion routine for converting the raw output signal to an adjusted signal indicating the mass flow rate of the process fluid. A method for determining an unknown mass flow using an empirically derived conversion function, the function being derived by correlating the output signals of a mass flow instrument sensing the flow of a calibration fluid with the output signals of the mass flow instrument sensing the flow of the process fluid.
摘要:
A flowmeter (100) or mass flow controller (101) used in a manufacturing process with toxic and reactive process fluids. A fluid flow sensor (114) senses fluid flow. A set point is established based upon predetermined temperature and pressure conditions at which the fluid will be utilized in the process. A valve drive (124) operates a fluid flow valve (126) to the resulting fluid flow rate, this being based upon the sensed flow rate and the set point. A control unit (122) controls the valve drive. The control unit accesses a calibration data set to determine the amount of fluid to be delivered by the fluid flow valve based upon the sensed flow rate and the set point. This calibration data set is created for the controller over its operational range using a calibration fluid having similar thermodynamic transport properties to a process fluid. The instrument is calibrated using the calibration fluid and the data set is produced by converting the calibration data using process fluid data stored in a data base (200). Accessing the data set stored in the instrument together with routing signals over a communication network (300) permits the instrument to precisely control process fluids without having to introduce external correction factors or other adjustments to the process.
摘要:
A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller provides a control output signal to the flow control device, which may comprise a pinch valve, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.
摘要:
The present invention relates to a system, method, and computer program product for determining the flow rate of a fluid. The system, method, and computer program product generate a thermal sensor based mass flow rate for the fluid, where the thermal sensor based mass flow rate is determined at least in part from the thermal sensor signal (36). The system, method, and computer program product generate a pressure sensor based mass flow rate for the fluid, wherein the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signal (51a). The system, method, and computer program product generate at least one calibration factor (ψ) using the thermal sensor based mass flow rate and the pressure sensor based mass flow rate. The system, method, and computer program product may generate a calibrated pressure sensor based mass flow rate by using the at least one calibration factor (ψ) to modify the pressure sensor based mass flow rate. The system, method, and computer program product may generate a calibrated thermal sensor based mass flow rate by using the at least one calibration factor (ψ) to modify the thermal sensor based mass flow rate.
摘要:
A flow sensor tube assembly includes a base member having first and second generally opposing sides. An opening extends through the base member, and an end of a flow sensor tube is received in the opening. A filler material is situated in the opening surrounding the flow sensor tube adjacent the first side of the base member to attach the tube to the base member. The flow sensor tube is welded to the base member adjacent the second side of the base member.
摘要:
A Coriolis mass flow sensor includes a flow tube, a light source positioned adjacent a first side of the flow tube and a light detector positioned adjacent a second side of the flow tube. A drive device is operatively situated relative to the flow tube for vibrating the flow tube, such that the flow tube moves through a path defined between the light source and the light detector. In other aspects of the invention, a Coriolis mass flow sensor includes a flow tube and a frame having the flow tube mounted thereon. A drive device is operatively situated relative to the frame for vibrating the frame and at least one pick off sensor is situated relative to the flow tube so as to measure the twist in the flow tube due to Coriolis force. Other aspects of the invention concern a straight-tube Coriolis mass flow sensor. A flexible flow tube defines a generally linear flow path. A drive device is positioned to actuate the flow tube, and first and second pick off sensors are positioned at the first and second ends of the flow tube, respectively. The first and second pick off sensors output a signal in response to movement of the flow tube, wherein a Coriolis force established by a flow of material through the flow tube causes a phase shift between the signals output by the first and second pick off sensors.
摘要:
A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller provides a control output signal to the flow control device, which may comprise a pinch valve, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.
摘要:
A flow meter pickoff assembly for nulling a flow meter zero offset is provided. The flow meter pickoff assembly includes a mounting device affixed to a first flow meter portion of a flow meter and a first pickoff sensor half adjustably affixed to the mounting device and configured to interact with a second pickoff sensor half affixed to a second flow meter portion. At least one relative angle of the first pickoff sensor half in relation to the second pickoff sensor half can be adjusted by adjusting the first pickoff sensor half to the mounting device according to at least one adjustment axis. The flow meter pickoff assembly further includes an adjustment means for enabling the first pickoff sensor half to adjust with respect to the mounting device along the at least one adjustment axis in order to adjust the at least one relative angle.