Thermal mass flowmeter and mass flow controller, flowmetering system and
method
    3.
    发明授权
    Thermal mass flowmeter and mass flow controller, flowmetering system and method 失效
    热质量流量计和质量流量控制器,流量计系统及方法

    公开(公告)号:US5911238A

    公开(公告)日:1999-06-15

    申请号:US725859

    申请日:1996-10-04

    摘要: A flowmeter (100) or mass flow controller (101) used in a manufacturing process with toxic and reactive process fluids. A fluid flow sensor (114) senses fluid flow. A set point is established based upon predetermined temperature and pressure conditions at which the fluid will be utilized in the process. A valve drive (124) operates a fluid flow valve (126) to the resulting fluid flow rate, this being based upon the sensed flow rate and the set point. A control unit (122) controls the valve drive. The control unit accesses a calibration data set to determine the amount of fluid to be delivered by the fluid flow valve based upon the sensed flow rate and the set point. This calibration data set is created for the controller over its operational range using a calibration fluid having similar thermodynamic transport properties to a process fluid. The instrument is calibrated using the calibration fluid and the data set is produced by converting the calibration data using process fluid data stored in a data base (200). Accessing the data set stored in the instrument together with routing signals over a communication network (300) permits the instrument to precisely control process fluids without having to introduce external correction factors or other adjustments to the process.

    摘要翻译: 在具有有毒和反应性过程流体的制造过程中使用的流量计(100)或质量流量控制器(101)。 流体流量传感器(114)感测流体流动。 基于在该过程中将使用流体的预定温度和压力条件建立设定点。 阀驱动器(124)将流体流动阀(126)运行到所得到的流体流速,这是基于感测的流量和设定点。 控制单元(122)控制阀驱动。 控制单元访问校准数据集,以基于感测的流量和设定点来确定由流体流量阀输送的流体的量。 使用具有与过程流体相似的热力学传递特性的校准流体,在其工作范围内为控制器创建该校准数据组。 使用校准液校准仪器,并通过使用存储在数据库中的过程流体数据(200)转换校准数据来生成数据集。 通过通信网络(300)访问存储在仪器中的数据集与路由信号一起允许仪器精确地控制过程流体,而不必对过程引入外部校正因子或其他调整。

    System, method and computer program for determining fluid flow rate using a pressure sensor and a thermal mass flow sensor
    6.
    发明授权
    System, method and computer program for determining fluid flow rate using a pressure sensor and a thermal mass flow sensor 有权
    使用压力传感器和热质量流量传感器来确定流体流量的系统,方法和计算机程序

    公开(公告)号:US08504318B2

    公开(公告)日:2013-08-06

    申请号:US12440367

    申请日:2008-03-05

    IPC分类号: G01F1/50

    摘要: The present invention relates to a system, method, and computer program product for determining the flow rate of a fluid. The system, method, and computer program product generate a thermal sensor based mass flow rate for the fluid, where the thermal sensor based mass flow rate is determined at least in part from the thermal sensor signal (36). The system, method, and computer program product generate a pressure sensor based mass flow rate for the fluid, wherein the pressure sensor based mass flow rate is determined at least in part from the pressure sensor signal (51a). The system, method, and computer program product generate at least one calibration factor (ψ) using the thermal sensor based mass flow rate and the pressure sensor based mass flow rate. The system, method, and computer program product may generate a calibrated pressure sensor based mass flow rate by using the at least one calibration factor (ψ) to modify the pressure sensor based mass flow rate. The system, method, and computer program product may generate a calibrated thermal sensor based mass flow rate by using the at least one calibration factor (ψ) to modify the thermal sensor based mass flow rate.

    摘要翻译: 本发明涉及一种用于确定流体流速的系统,方法和计算机程序产品。 系统,方法和计算机程序产品产生基于热传感器的质量流量,其中基于热传感器的质量流率至少部分地根据热传感器信号(36)确定。 该系统,方法和计算机程序产品为流体产生基于压力传感器的质量流量,其中基于压力传感器的质量流量至少部分地根据压力传感器信号(51a)确定。 系统,方法和计算机程序产品使用基于热传感器的质量流量和基于压力传感器的质量流量产生至少一个校准因子(psi)。 系统,方法和计算机程序产品可以通过使用至少一个校准因子(psi)来修改基于压力传感器的质量流率来生成基于校准的基于压力传感器的质量流量。 系统,方法和计算机程序产品可以通过使用至少一个校准因子(psi)来修改基于热传感器的质量流量来生成校准的基于热传感器的质量流量。

    Tube assembly and method
    7.
    发明授权
    Tube assembly and method 有权
    管组件和方法

    公开(公告)号:US07111519B2

    公开(公告)日:2006-09-26

    申请号:US10707078

    申请日:2003-11-19

    申请人: Joseph C. Dille

    发明人: Joseph C. Dille

    IPC分类号: G01F1/84

    摘要: A flow sensor tube assembly includes a base member having first and second generally opposing sides. An opening extends through the base member, and an end of a flow sensor tube is received in the opening. A filler material is situated in the opening surrounding the flow sensor tube adjacent the first side of the base member to attach the tube to the base member. The flow sensor tube is welded to the base member adjacent the second side of the base member.

    摘要翻译: 流量传感器管组件包括具有第一和第二大致相对的侧面的基部构件。 开口延伸穿过基座构件,并且流量传感器管的端部容纳在开口中。 填充材料位于与基部构件的第一侧相邻的流体传感器管周围的开口中,以将管附接到基座构件。 流量传感器管被焊接到与基部构件的第二侧相邻的基部构件。

    Coriolis mass flow controller
    8.
    发明授权
    Coriolis mass flow controller 有权
    科里奥利质量流量控制器

    公开(公告)号:US06748813B1

    公开(公告)日:2004-06-15

    申请号:US09641698

    申请日:2000-08-18

    IPC分类号: G01F184

    摘要: A Coriolis mass flow sensor includes a flow tube, a light source positioned adjacent a first side of the flow tube and a light detector positioned adjacent a second side of the flow tube. A drive device is operatively situated relative to the flow tube for vibrating the flow tube, such that the flow tube moves through a path defined between the light source and the light detector. In other aspects of the invention, a Coriolis mass flow sensor includes a flow tube and a frame having the flow tube mounted thereon. A drive device is operatively situated relative to the frame for vibrating the frame and at least one pick off sensor is situated relative to the flow tube so as to measure the twist in the flow tube due to Coriolis force. Other aspects of the invention concern a straight-tube Coriolis mass flow sensor. A flexible flow tube defines a generally linear flow path. A drive device is positioned to actuate the flow tube, and first and second pick off sensors are positioned at the first and second ends of the flow tube, respectively. The first and second pick off sensors output a signal in response to movement of the flow tube, wherein a Coriolis force established by a flow of material through the flow tube causes a phase shift between the signals output by the first and second pick off sensors.

    摘要翻译: 科里奥利质量流量传感器包括流管,位于流管第一侧附近的光源和邻近流管的第二侧定位的光检测器。 驱动装置相对于流管可操作地定位,用于使流管振动,使得流管移动通过限定在光源和光检测器之间的路径。 在本发明的其他方面,科里奥利质量流量传感器包括流管和安装有流管的框架。 驱动装置相对于框架可操作地定位,用于振动框架,并且至少一个拾取传感器相对于流管设置,以便测量由于科里奥利力而导致的流管中的​​扭转。 本发明的其它方面涉及直管科里奥利质量流量传感器。 柔性流管限定了大致线性的流动路径。 驱动装置被定位成致动流管,并且第一和第二拾取传感器分别位于流管的第一和第二端。 第一和第二拾取传感器响应于流动管的运动输出信号,其中通过流管的材料流建立的科里奥利力引起由第一和第二拾取传感器输出的信号之间的相移。

    High purity fluid delivery system
    9.
    再颁专利
    High purity fluid delivery system 有权
    高纯度流体输送系统

    公开(公告)号:USRE43288E1

    公开(公告)日:2012-04-03

    申请号:US11867993

    申请日:2007-10-05

    IPC分类号: G05D7/06

    摘要: A fluid delivery system includes a flow control device and a Coriolis mass flowmeter in fluid communication with the flow control device. The Coriolis flowmeter has a flow-tube made of a high-purity plastic material, such as PFA, making the delivery system suitable for high purity applications. A controller provides a control output signal to the flow control device, which may comprise a pinch valve, so as to vary the flow control device output in response to a setpoint signal and measurement signals received from the flowmeter.

    摘要翻译: 流体输送系统包括流量控制装置和与流量控制装置流体连通的科里奥利质量流量计。 科里奥利流量计具有由高纯度塑料材料(如PFA)制成的流管,使得输送系统适用于高纯度应用。 控制器向流量控制装置提供控制输出信号,流量控制装置可以包括夹管阀,以响应于设定点信号和从流量计接收的测量信号来改变流量控制装置输出。

    Flow meter pickoff assembly and flow meter pickoff adjustment method for nulling flow meter zero offset
    10.
    发明授权
    Flow meter pickoff assembly and flow meter pickoff adjustment method for nulling flow meter zero offset 有权
    流量计零位偏移流量计检测装置和流量计检测调整方法

    公开(公告)号:US06997033B2

    公开(公告)日:2006-02-14

    申请号:US10771273

    申请日:2004-02-03

    IPC分类号: G01F25/00

    摘要: A flow meter pickoff assembly for nulling a flow meter zero offset is provided. The flow meter pickoff assembly includes a mounting device affixed to a first flow meter portion of a flow meter and a first pickoff sensor half adjustably affixed to the mounting device and configured to interact with a second pickoff sensor half affixed to a second flow meter portion. At least one relative angle of the first pickoff sensor half in relation to the second pickoff sensor half can be adjusted by adjusting the first pickoff sensor half to the mounting device according to at least one adjustment axis. The flow meter pickoff assembly further includes an adjustment means for enabling the first pickoff sensor half to adjust with respect to the mounting device along the at least one adjustment axis in order to adjust the at least one relative angle.

    摘要翻译: 提供了用于使流量计零点偏移为零的流量计检测组件。 流量计拾取组件包括附接到流量计的第一流量计部分的安装装置和可调节地固定到安装装置的第一传感器传感器,并且被配置为与固定到第二流量计部分的第二传感器半体相互作用。 可以通过根据至少一个调整轴线将安装装置的第一传感器传感器的一半调整到第二传感器半部相对于第二传感器传感器一半的至少一个相对角度。 流量计拾取组件还包括调节装置,用于使第一传感器半部能够相对于安装装置沿着至少一个调节轴线进行调节,以便调整至少一个相对角度。