Vacuum processing apparatus
    1.
    发明申请
    Vacuum processing apparatus 有权
    真空加工设备

    公开(公告)号:US20070151669A1

    公开(公告)日:2007-07-05

    申请号:US11646593

    申请日:2006-12-28

    IPC分类号: C23F1/00 C23C16/00

    摘要: The present invention provides a vacuum processing apparatus that allows easy exchange of processing chambers. A vacuum processing apparatus of the present invention has a processing chamber and a carrying-in-and-out chamber. The carrying-in-and-out chamber is fixed and located at a position above the processing chamber. The processing chamber can be lowered by a vertically moving mechanism. Therefore, the processing chamber is separated from the carrying-in-and-out chamber by lowering the processing chamber. A conveying means is connected to the processing chamber so that it is possible to easily convey the processing chamber after being removed from the carrying-in-and-out chamber. The operation for exchanging the processing chambers can be simpler than in the conventional systems.

    摘要翻译: 本发明提供一种允许容易地更换处理室的真空处理装置。 本发明的真空处理装置具有处理室和搬入室。 进出室被固定并位于处理室上方的位置。 处理室可以通过垂直移动的机构降低。 因此,通过降低处理室,处理室与进出室分离。 传送装置连接到处理室,使得可以在从搬入室移出之后容易地输送处理室。 用于更换处理室的操作可以比常规系统更简单。

    Vacuum processing apparatus
    2.
    发明授权
    Vacuum processing apparatus 有权
    真空加工设备

    公开(公告)号:US07682481B2

    公开(公告)日:2010-03-23

    申请号:US11646593

    申请日:2006-12-28

    IPC分类号: C23F1/00 C23C16/00

    摘要: The present invention provides a vacuum processing apparatus that allows easy exchange of processing chambers. A vacuum processing apparatus of the present invention has a processing chamber and a carrying-in-and-out chamber. The carrying-in-and-out chamber is fixed and located at a position above the processing chamber. The processing chamber can be lowered by a vertically moving mechanism. Therefore, the processing chamber is separated from the carrying-in-and-out chamber by lowering the processing chamber. A conveying means is connected to the processing chamber so that it is possible to easily convey the processing chamber after being removed from the carrying-in-and-out chamber. The operation for exchanging the processing chambers can be simpler than in the conventional systems.

    摘要翻译: 本发明提供一种允许容易地更换处理室的真空处理装置。 本发明的真空处理装置具有处理室和搬入室。 进出室被固定并位于处理室上方的位置。 处理室可以通过垂直移动的机构降低。 因此,通过降低处理室,处理室与进出室分离。 传送装置连接到处理室,使得可以在从搬入室移出之后容易地输送处理室。 用于更换处理室的操作可以比常规系统更简单。

    Method for Surface Treating Semiconductor
    3.
    发明申请
    Method for Surface Treating Semiconductor 有权
    表面处理半导体的方法

    公开(公告)号:US20090117747A1

    公开(公告)日:2009-05-07

    申请号:US11990440

    申请日:2006-08-15

    IPC分类号: H01L21/3065

    摘要: [Task] Native oxide film on a semiconductor silicon wafer(s) is dry etched at a temperature of 50° C. or less. Hydrogen treatment is then carried out a temperature of 100° C. or more to bond the dangling bonds with hydrogen. A jig 9 that has been used is again used for loading new semiconductor silicon wafer(s) 10. The wafer(s) on the jig 9 is subjected to removal of a native oxide film and then hydrogen bonding. The resultant heat remains in jig and makes it difficult to maintain the wafers to temperature appropriate to removal of a native oxide film.[Means for Solution] After treatment of hydrogen bonding, inert gas having temperature of from 0 to −30° C. is injected into reaction vessel 5 and/or treatment preparing vessel 21, in which a native oxide film has been removed.

    摘要翻译: [任务]半导体硅晶片上的天然氧化物膜在50℃以下的温度下进行干法蚀刻。 然后进行氢气处理,其温度为100℃以上,以使悬挂键与氢键合。 已经使用的夹具9再次用于装载新的半导体硅晶片10.将夹具9上的晶片除去自然氧化膜,然后氢键合。 所得到的热量保留在夹具中,并且使得难以将晶片保持适于去除天然氧化物膜的温度。 [解决方案]在氢键合处理之后,将温度为0〜-30℃的惰性气体注入已除去自然氧化膜的反应容器5和/或处理制备容器21中。

    Method for surface treating semiconductor
    4.
    发明授权
    Method for surface treating semiconductor 有权
    半导体表面处理方法

    公开(公告)号:US08097541B2

    公开(公告)日:2012-01-17

    申请号:US11990440

    申请日:2006-08-15

    IPC分类号: H01L21/302

    摘要: Native oxide film on a semiconductor silicon wafer(s) is dry etched at a temperature of 50° C. or less. Hydrogen treatment is then carried out a temperature of 100° C. or more to bond the dangling bonds with hydrogen. A jig 9 that has been used is again used for loading new semiconductor silicon wafer(s) 10. The wafer(s) on the jig 9 is subjected to removal of a native oxide film and then hydrogen bonding. The resultant heat remains in jig and makes it difficult to maintain the wafers to temperature appropriate to removal of a native oxide film.After treatment of hydrogen bonding, inert gas having temperature of from 0 to −30° C. is injected into reaction vessel 5 and/or treatment preparing vessel 21, in which a native oxide film has been removed.

    摘要翻译: 半导体硅晶片上的天然氧化物膜在50℃以下的温度下被干法蚀刻。 然后进行氢气处理,其温度为100℃以上,以使悬挂键与氢键合。 已经使用的夹具9再次用于装载新的半导体硅晶片10.将夹具9上的晶片除去自然氧化膜,然后氢键合。 所得到的热量保留在夹具中,并且使得难以将晶片保持适于去除天然氧化物膜的温度。 在氢键处理之后,将温度为0〜-30℃的惰性气体注入反应容器5和/或其中去除了自然氧化膜的处理制备容器21。

    Image Apparatus and Image Processing Method
    6.
    发明申请
    Image Apparatus and Image Processing Method 审中-公开
    图像设备和图像处理方法

    公开(公告)号:US20100045825A1

    公开(公告)日:2010-02-25

    申请号:US12090838

    申请日:2006-09-15

    IPC分类号: H04N5/217

    摘要: An imaging apparatus and an image processing method able to simplify an optical system, able to reduce costs, able to obtain an image blurred only in a background by a single imaging operation, and able to obtain a restored images with little influence of noise, wherein a signal processing portion formed by an image processing device 140 etc. has a generation function of generating a diffusion-free image signal from a diffused image signal of an object from an imaging element 120 and performing other predetermined signal processing on the diffused image signal and combining an image before the processing of this signal processing portion and an image after the processing to form a new image, and, in this generation function, generates a plurality of images in a background region by blurred image processing combines them with a focused image of an object region including a main object after the processing to generate a new image and records the image before the signal processing, the restoration image after the processing, and the combined new image in a memory buffer etc.

    摘要翻译: 一种成像设备和图像处理方法,其能够简化能够降低成本的光学系统,能够通过单个成像操作获得仅在背景中模糊的图像,并且能够获得几乎没有噪声影响的恢复图像,其中 由图像处理装置140等形成的信号处理部具有从来自摄像元件120的物体的扩散图像信号产生无扩散图像信号的生成功能,并对扩散图像信号进行其他规定的信号处理, 将该信号处理部分的处理之前的图像与处理之后的图像组合以形成新图像,并且在该生成函数中,通过模糊图像处理在背景区域中生成多个图像,将它们与聚焦图像 在产生新图像的处理之后包括主要对象的对象区域,并且在信号处理之前记录图像 处理后的存储图像,以及在存储器缓冲器等中组合的新图像

    Management Diagnosis Report Preparation System
    7.
    发明申请
    Management Diagnosis Report Preparation System 审中-公开
    管理诊断报告准备系统

    公开(公告)号:US20070282643A1

    公开(公告)日:2007-12-06

    申请号:US10594058

    申请日:2005-03-18

    IPC分类号: G06Q90/00

    CPC分类号: G06Q10/06 G06Q10/0639

    摘要: A management diagnosis report preparation system comprises a first memory for storing, check items for reviewing the achievement of each theme, an check result indication given to respective check items for indicating the check results by an acting department, actions for achieving the themes, and evaluation values indicating the degree of the effectiveness for the action, a second memory for storing past reports including the past themes and actions used for achieving the past themes and a computer for preparing a report. The computer is programmed to increase or decrease the evaluation values of the actions based on a comparison with the past reports, to select an action having a high evaluation value among all the actions related to the check items carrying the check result indication, and to prepare a current report including the selected action and a theme corresponding to a check item carrying the check result indication.

    摘要翻译: 管理诊断报告准备系统包括:第一存储器,用于存储,检查用于检查每个主题的成就的项目,给予用于指示执行部门的检查结果的各个检查项目的检查结果指示,用于实现主题的动作和评估 表明该行动有效程度的值,用于存储过去报告的第二个记忆,包括过去主题和用于实现过去主题的动作以及编写报告的电脑。 计算机被编程为基于与过去报告的比较来增加或减少动作的评估值,以在与检查结果指示的检查项目相关的所有动作中选择具有高评估值的动作,并且准备 包括所选动作的当前报告和与携带检查结果指示的检查项目相对应的主题。

    Semiconductor integrated circuit and method for testing memory
    8.
    发明授权
    Semiconductor integrated circuit and method for testing memory 有权
    半导体集成电路及其测试方法

    公开(公告)号:US06233182B1

    公开(公告)日:2001-05-15

    申请号:US09403104

    申请日:1999-12-15

    IPC分类号: G11C700

    摘要: A test circuit comprised of a microprogram controlled control unit for generating a test pattern (addresses and data) for each memory in accordance with a predetermined algorithm and reading written data, an arithmetic unit, and data determining means for determining the read data and outputting the result of determination is provided over a semiconductor chip equipped with a memory

    摘要翻译: 一种测试电路,包括微程序控制控制单元,用于根据预定算法产生每个存储器的测试图案(地址和数据)并读取写入数据,运算单元和数据确定装置,用于确定读取的数据并输出 在配备有存储器的半导体芯片上提供确定结果

    Fixing device and image forming apparatus
    9.
    发明授权
    Fixing device and image forming apparatus 有权
    固定装置和成像装置

    公开(公告)号:US08666285B2

    公开(公告)日:2014-03-04

    申请号:US13046844

    申请日:2011-03-14

    IPC分类号: G03G15/16 G03G15/20

    CPC分类号: G03G15/2064

    摘要: A fixing device for fixing a toner image onto a recording paper sheet includes a heating member for heating the recording paper sheet, a pressing member for applying a pressure by forming contact with the heating member, a casing accommodating the heating member and the pressing member, and provided with an exit port for discharging the recording paper sheet, and a closing portion arranged at the exit port for keeping a temperature of the casing. The closing portion has a rotation member, and an opposed member forming a nip region together with the rotation member. A separating unit for changing at least a part of the closing portion from a closed state to an open state.

    摘要翻译: 用于将调色剂图像定影到记录纸上的定影装置包括用于加热记录纸的加热构件,用于通过与加热构件形成接触而施加压力的加压构件,容纳加热构件和按压构件的壳体, 并设置有用于排出记录纸的出口,以及设置在出口处的封闭部分,用于保持壳体的温度。 关闭部分具有旋转构件,以及与旋转构件一起形成夹持区域的相对构件。 分离单元,用于将封闭部分的至少一部分从关闭状态改变为打开状态。

    INFORMATION-SELECTION ASSIST SYSTEM, INFORMATION-SELECTION ASSIST METHOD AND PROGRAM
    10.
    发明申请
    INFORMATION-SELECTION ASSIST SYSTEM, INFORMATION-SELECTION ASSIST METHOD AND PROGRAM 审中-公开
    信息选择辅助系统,信息选择辅助方法和程序

    公开(公告)号:US20100037137A1

    公开(公告)日:2010-02-11

    申请号:US12513218

    申请日:2007-11-19

    申请人: Masayuki Satou

    发明人: Masayuki Satou

    IPC分类号: G06F3/01

    CPC分类号: G06F3/0482

    摘要: Information selected by a user and number of selection times thereof are registered in pair in a selection-candidate list storage section (141). A selection-candidate presenting means (11) displays on a display section (22) the information registered in the selection-candidate-list storage section (141) in the descending order of the number of selection times. A list management means (12) performs an update processing that increments the number of selection times of the selected information, if the information is selected by the user. The list management means (12) decrements all the number of selection times registered in the selection-candidate-list storage section (141) upon occurring of a decrement timing of the number of selection times.

    摘要翻译: 由用户选择的信息和选择次数被配对登记在选择候选列表存储部分(141)中。 选择候选呈现装置(11)以选择次数的降序在显示部分(22)上显示登记在选择候选列表存储部分(141)中的信息。 如果用户选择了信息,列表管理装置(12)执行增加所选信息的选择次数的更新处理。 列表管理装置(12)在发生选择次数的递减定时时,减少登记在选择候选列表存储部分(141)中的所有选择次数。