摘要:
The present invention provides a vacuum processing apparatus that allows easy exchange of processing chambers. A vacuum processing apparatus of the present invention has a processing chamber and a carrying-in-and-out chamber. The carrying-in-and-out chamber is fixed and located at a position above the processing chamber. The processing chamber can be lowered by a vertically moving mechanism. Therefore, the processing chamber is separated from the carrying-in-and-out chamber by lowering the processing chamber. A conveying means is connected to the processing chamber so that it is possible to easily convey the processing chamber after being removed from the carrying-in-and-out chamber. The operation for exchanging the processing chambers can be simpler than in the conventional systems.
摘要:
The present invention provides a vacuum processing apparatus that allows easy exchange of processing chambers. A vacuum processing apparatus of the present invention has a processing chamber and a carrying-in-and-out chamber. The carrying-in-and-out chamber is fixed and located at a position above the processing chamber. The processing chamber can be lowered by a vertically moving mechanism. Therefore, the processing chamber is separated from the carrying-in-and-out chamber by lowering the processing chamber. A conveying means is connected to the processing chamber so that it is possible to easily convey the processing chamber after being removed from the carrying-in-and-out chamber. The operation for exchanging the processing chambers can be simpler than in the conventional systems.
摘要:
[Task] Native oxide film on a semiconductor silicon wafer(s) is dry etched at a temperature of 50° C. or less. Hydrogen treatment is then carried out a temperature of 100° C. or more to bond the dangling bonds with hydrogen. A jig 9 that has been used is again used for loading new semiconductor silicon wafer(s) 10. The wafer(s) on the jig 9 is subjected to removal of a native oxide film and then hydrogen bonding. The resultant heat remains in jig and makes it difficult to maintain the wafers to temperature appropriate to removal of a native oxide film.[Means for Solution] After treatment of hydrogen bonding, inert gas having temperature of from 0 to −30° C. is injected into reaction vessel 5 and/or treatment preparing vessel 21, in which a native oxide film has been removed.
摘要:
Native oxide film on a semiconductor silicon wafer(s) is dry etched at a temperature of 50° C. or less. Hydrogen treatment is then carried out a temperature of 100° C. or more to bond the dangling bonds with hydrogen. A jig 9 that has been used is again used for loading new semiconductor silicon wafer(s) 10. The wafer(s) on the jig 9 is subjected to removal of a native oxide film and then hydrogen bonding. The resultant heat remains in jig and makes it difficult to maintain the wafers to temperature appropriate to removal of a native oxide film.After treatment of hydrogen bonding, inert gas having temperature of from 0 to −30° C. is injected into reaction vessel 5 and/or treatment preparing vessel 21, in which a native oxide film has been removed.
摘要:
A fixing device for fixing a toner image onto a recording paper includes a heating member for heating the recording paper, a pressing member for pressing the heating member by pressure-applying contact, a casing accommodating the heating member and the pressing member, and being provided with an exit port for discharging the recording paper, and a closing unit added to the exit port for keeping a temperature of the casing. The closing unit has a rotation member, and an opposed member forming a nip region together with the rotation member.
摘要:
An imaging apparatus and an image processing method able to simplify an optical system, able to reduce costs, able to obtain an image blurred only in a background by a single imaging operation, and able to obtain a restored images with little influence of noise, wherein a signal processing portion formed by an image processing device 140 etc. has a generation function of generating a diffusion-free image signal from a diffused image signal of an object from an imaging element 120 and performing other predetermined signal processing on the diffused image signal and combining an image before the processing of this signal processing portion and an image after the processing to form a new image, and, in this generation function, generates a plurality of images in a background region by blurred image processing combines them with a focused image of an object region including a main object after the processing to generate a new image and records the image before the signal processing, the restoration image after the processing, and the combined new image in a memory buffer etc.
摘要:
A management diagnosis report preparation system comprises a first memory for storing, check items for reviewing the achievement of each theme, an check result indication given to respective check items for indicating the check results by an acting department, actions for achieving the themes, and evaluation values indicating the degree of the effectiveness for the action, a second memory for storing past reports including the past themes and actions used for achieving the past themes and a computer for preparing a report. The computer is programmed to increase or decrease the evaluation values of the actions based on a comparison with the past reports, to select an action having a high evaluation value among all the actions related to the check items carrying the check result indication, and to prepare a current report including the selected action and a theme corresponding to a check item carrying the check result indication.
摘要:
A test circuit comprised of a microprogram controlled control unit for generating a test pattern (addresses and data) for each memory in accordance with a predetermined algorithm and reading written data, an arithmetic unit, and data determining means for determining the read data and outputting the result of determination is provided over a semiconductor chip equipped with a memory
摘要:
A fixing device for fixing a toner image onto a recording paper sheet includes a heating member for heating the recording paper sheet, a pressing member for applying a pressure by forming contact with the heating member, a casing accommodating the heating member and the pressing member, and provided with an exit port for discharging the recording paper sheet, and a closing portion arranged at the exit port for keeping a temperature of the casing. The closing portion has a rotation member, and an opposed member forming a nip region together with the rotation member. A separating unit for changing at least a part of the closing portion from a closed state to an open state.
摘要:
Information selected by a user and number of selection times thereof are registered in pair in a selection-candidate list storage section (141). A selection-candidate presenting means (11) displays on a display section (22) the information registered in the selection-candidate-list storage section (141) in the descending order of the number of selection times. A list management means (12) performs an update processing that increments the number of selection times of the selected information, if the information is selected by the user. The list management means (12) decrements all the number of selection times registered in the selection-candidate-list storage section (141) upon occurring of a decrement timing of the number of selection times.