公开(公告)号：US20150008321A1

公开(公告)日：2015-01-08

申请号：US14305173

申请日：2014-06-16

Applicant: Semiconductor Energy Laboratory Co., Ltd.

Inventor： Daisuke OHGARANE ,  Koji DAIRIKI ,  Masahiro TAKAHASHI ,  Shunichi ITO ,  Erika TAKAHASHI

IPC: G01N23/205 ,  H01J37/06 ,  G01N23/20

CPC classification number: G01N23/2055 ,  G01N23/20058 ,  G01N2223/61 ,  H01J37/06 ,  H01J2237/2065 ,  H01J2237/2805

Abstract: Provided is a transmission electron diffraction measurement apparatus including an electron gun; a first optical system under the electron gun; a sample chamber under the first optical system; a second optical system under the sample chamber; an observation chamber under the second optical system; a region that emits light by receiving energy from an electron in the observation chamber; and a camera facing the region.

Abstract translation: 提供一种包括电子枪的透射电子衍射测量装置; 电子枪下的第一光学系统; 第一光学系统下的样品室; 样品室下方的第二光学系统; 第二光学系统下的观察室; 通过从观察室中的电子接收能量而发光的区域; 以及面向该地区的相机。