DISPATCHING METHOD AND SYSTEM
    6.
    发明申请
    DISPATCHING METHOD AND SYSTEM 审中-公开
    分配方法和系统

    公开(公告)号:US20160064261A1

    公开(公告)日:2016-03-03

    申请号:US14840587

    申请日:2015-08-31

    IPC分类号: H01L21/67 G05B19/418

    摘要: A method of dispatching wafer lots through a plurality of process chambers, wherein the process chambers are disposed in at least one machine. The method includes: receiving wafer lot information and process chamber data, wherein the wafer lot information identifies the wafer lots to be processed at the machine, and the process chamber data includes process information associated with the process chambers; determining a load factor of each process chamber based on the wafer lot information and process chamber data; receiving historical data of run lots previously processed through the process chambers, and determining a processing time of the wafer lots based on the historical data; generating a dispatching criteria for the wafer lots based on the load factors of the process chambers and the determined processing time of the wafer lots; and dispatching the wafer lots through the process chambers based on the dispatching criteria.

    摘要翻译: 一种通过多个处理室调度晶片批次的方法,其中处理室设置在至少一个机器中。 该方法包括:接收晶片批信息和处理室数据,其中晶片批信息识别在机器处要处理的晶片批次,并且处理室数据包括与处理室相关联的处理信息; 基于晶片批次信息和处理室数据确定每个处理室的负载系数; 接收先前通过处理室处理的运行批次的历史数据,以及基于历史数据确定晶片批次的处理时间; 基于处理室的负载系数和所确定的晶片批次的处理时间来生成晶片批次的调度标准; 并根据调度标准将晶片批次分配到处理室。