摘要:
A method of forming a floating gate electrode of a cell of a flash memory device having an interval less than a critical dimension (CD) in a conventional photolithographic process, in which the reliability of a dielectric layer does not deteriorate and damage to a floating gate electrode during etching is prevented, is provided. According to the present invention, a protective layer formed of a material having a high etching selectivity with respect to a device isolation layer and a doped polysilicon layer is formed on the upper surface of the doped polysilicon layer forming the floating gate electrode. The protective layer is partially etched and includes a recess. Next, a material layer for forming a spacer, which is formed of a material having a high etching selectivity with respect to the device isolation layer and the doped polysilicon layer, is formed on the upper surface of the protective layer and is etched back, thus forming the spacer. Damage to the doped polysilicon layer during etching is prevented by the protective layer containing the recess. The floating gate electrode, which is arranged at an interval less than a limit value in a photolithographic process, can be formed by the spacer. The spacer and the protective layer are removed, and a step difference does not occur at edges of the floating gate electrode. Thus deterioration of the reliability of a dielectric layer formed on top of the floating gate electrode can be prevented.
摘要:
A method of forming a fine pattern and a method of manufacturing a semiconductor device. The method of forming a fine pattern includes: forming a hard mask layer on a to-be-etched layer; forming on the hard mask layer a first mask pattern including a plurality of elongated openings that are arranged at predetermined intervals in a first direction and a second direction different from the first direction and are offset from each other in adjacent columns in the second direction; forming on the hard mask layer a second mask pattern including at least two linear openings that each pass through the elongated openings in the adjacent columns and extend in the first direction; forming a hard mask pattern by etching the hard mask layer by using the second mask pattern as an etch mask; and etching the to-be-etched layer by using the hard mask pattern.
摘要:
A transmitter and a signal amplifier are provided. The signal amplifier includes a digital-to-analog converter converting an input digital signal into an analog signal, a local oscillator signal generator outputting in-phase and quadrature-phase oscillator signals, a first mixer mixing the analog signal with the in-phase local oscillator signal to output an in-phase high frequency signal, a second mixer mixing the analog signal with the quadrature-phase local oscillator signal to output a quadrature-phase high frequency signal, a main amplifier amplifying the in-phase high frequency signal output from the first mixer, and an auxiliary amplifier amplifying the quadrature-phase high frequency signal output from the second mixer.
摘要:
A radio frequency (RF) communication system having a chaotic signal generator and a method of generating a chaotic signal. The RF communication system includes a chaotic signal generator which generates a chaotic signal having a plurality of frequency components at a predetermined frequency band, a modulator which generates a chaotic carrier by combining the chaotic signal with a data signal which indicates information, and a transmission circuit which includes an antenna to transmit the chaotic carrier made at the modulator. The frequency signal generator comprises an oscillator which converts a DC bias power into a high frequency power, and a resonating unit which generates a wideband signal having a plurality of frequency components by passing a predetermined frequency band of the high frequency power signal.
摘要:
Spread spectrum transmission of information is performed using chaotic signals. Direct chaotic communication systems in which information is input to chaotic signal generated directly in information transmission frequency band, are achieved by forming broadband information carrier necessary for transmission and using a chaotic dynamic system whose structure is synthesized in advance in accordance with predetermined characteristics of broadband information carrier to cause chaotic dynamic system to provide operation of forming the broadband information carrier in form of a chaotic information carrier having prescribed spectral characteristics. Modulating the chaotic information carrier is carried out by forming chaotic radio or optic chaotic pulses from chaotic information carrier, with predetermined time intervals between pulses in accordance with the transmitted information signal, and the reception and demodulation at the receiving side is carried out using a dynamic system matched, in behavior, with chaotic dynamic system of transmitting side.
摘要:
A wireless communication system and a method for reducing a ranging time. The communication system includes a main synchronization block group which processes the transceived signal and determines whether the transceived signal is a signal desired by a transmitting device when a receiving device re-transmits the transceived signal to the transmitting device; a ranging block which measures a distance between the transmitting device and the receiving device using a ranging signal when the transceived signal is the desired signal of the transmitting device based on the determination of the main synchronization block group and when the transceived signal is the ranging signal; and a symbol synchronization block which detects a start point and an end point of a symbol forming the signal when the transceived signal from the receiving device is a data communication signal. Accordingly, the fast ranging is feasible and channel occupation time can be shortened.
摘要:
An apparatus and method for generation of a noise signal are provided. The apparatus includes a noise synthesizing module and a noise signal transfer module. The noise synthesizing module includes a voltage controlled oscillator, a phase frequency detector, a phase locked loop filter, and a reference generator which form a phase locked loop. An output signal of the reference generator is provided to a first phase-frequency input of the phase-frequency detector, and an output signal of the voltage controlled oscillator is provided to a second input of the phase-frequency detector. An output signal of the phase-frequency detector is provided to an input of the phase locked loop filter, and an output of the phase locked loop filter is provided to a frequency control input of the voltage controlled oscillator. The noise signal transfer module includes a sinusoidal generator and a frequency mixer having a first input which is provided with an output signal of the phase frequency detector and a second input which is provided with an output signal of the sinusoidal.
摘要:
A communication system which transmits and receives a communication signal having an intra-guard-interval (IGI) inserted is provided. The communication system includes a signal generator which is configured to generate a signal to carry data; and a signal output part which is configured to split a symbol period, which is a transmission unit of the communication signal into a plurality of sections, and to selectively insert the signal which is generated into the plurality of sections, and to output the communication signal.
摘要:
Provided are a terminal performing a wake-up with consumption of low power and a wake-up method performed by the terminal. The terminal includes: a passive filter outputting a correlation signal between a received signal and a reference signal; and a wake-up controller controlling whether to wake up a communication module, using the correlation signal output from the passive filter. Thus, a wake-up signal can be processed using the passive element that does not consume power during its operation. Also, a wake-up of a communication module can be controlled using the result of processing the wake-up signal. As a result, power consumption can be greatly reduced during the wake-up.
摘要:
Disclosed is a mobile terminal with plural antennas. The mobile terminal with plural antennas, comprising a circuit board formed with a variety of elements, at least one first antenna formed on one surface of the circuit board to transmit and receive a radio signal for mobile communications, and at least one second antenna formed on the other surface of the circuit board to transmit and receive a radio signal for additional services. Accordingly, as the size of the mobile terminal does not necessarily increase to have plural antennas, the mobile terminal can be miniaturized.