Method of fabricating cell of flash memory device

    公开(公告)号:US06573139B2

    公开(公告)日:2003-06-03

    申请号:US09903977

    申请日:2001-07-12

    IPC分类号: H01L21336

    CPC分类号: H01L27/11521 H01L27/115

    摘要: A method of forming a floating gate electrode of a cell of a flash memory device having an interval less than a critical dimension (CD) in a conventional photolithographic process, in which the reliability of a dielectric layer does not deteriorate and damage to a floating gate electrode during etching is prevented, is provided. According to the present invention, a protective layer formed of a material having a high etching selectivity with respect to a device isolation layer and a doped polysilicon layer is formed on the upper surface of the doped polysilicon layer forming the floating gate electrode. The protective layer is partially etched and includes a recess. Next, a material layer for forming a spacer, which is formed of a material having a high etching selectivity with respect to the device isolation layer and the doped polysilicon layer, is formed on the upper surface of the protective layer and is etched back, thus forming the spacer. Damage to the doped polysilicon layer during etching is prevented by the protective layer containing the recess. The floating gate electrode, which is arranged at an interval less than a limit value in a photolithographic process, can be formed by the spacer. The spacer and the protective layer are removed, and a step difference does not occur at edges of the floating gate electrode. Thus deterioration of the reliability of a dielectric layer formed on top of the floating gate electrode can be prevented.

    METHOD OF FORMING FINE PATTERN AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    2.
    发明申请
    METHOD OF FORMING FINE PATTERN AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 审中-公开
    形成精细图案的方法和制造半导体器件的方法

    公开(公告)号:US20120329224A1

    公开(公告)日:2012-12-27

    申请号:US13495510

    申请日:2012-06-13

    IPC分类号: H01L21/308 H01L21/336

    摘要: A method of forming a fine pattern and a method of manufacturing a semiconductor device. The method of forming a fine pattern includes: forming a hard mask layer on a to-be-etched layer; forming on the hard mask layer a first mask pattern including a plurality of elongated openings that are arranged at predetermined intervals in a first direction and a second direction different from the first direction and are offset from each other in adjacent columns in the second direction; forming on the hard mask layer a second mask pattern including at least two linear openings that each pass through the elongated openings in the adjacent columns and extend in the first direction; forming a hard mask pattern by etching the hard mask layer by using the second mask pattern as an etch mask; and etching the to-be-etched layer by using the hard mask pattern.

    摘要翻译: 形成精细图案的方法和制造半导体器件的方法。 形成精细图案的方法包括:在被蚀刻层上形成硬掩模层; 在所述硬掩模层上形成第一掩模图案,所述第一掩模图案包括多个细长开口,所述第一掩模图案沿着第一方向以不同于第一方向的第二方向以预定间隔布置,并且在相邻列中沿第二方向彼此偏移; 在所述硬掩模层上形成包括至少两个线性开口的第二掩模图案,每个所述至少两个线性开口穿过所述相邻列中的所述细长开口并在所述第一方向上延伸; 通过使用第二掩模图案作为蚀刻掩模来蚀刻硬掩模层来形成硬掩模图案; 并通过使用硬掩膜图案蚀刻被蚀刻层。

    Doherty amplifier and transmitter using mixer
    3.
    发明授权
    Doherty amplifier and transmitter using mixer 有权
    Doherty放大器和发射机使用混音器

    公开(公告)号:US08340606B2

    公开(公告)日:2012-12-25

    申请号:US11431501

    申请日:2006-05-11

    IPC分类号: H04B1/40

    摘要: A transmitter and a signal amplifier are provided. The signal amplifier includes a digital-to-analog converter converting an input digital signal into an analog signal, a local oscillator signal generator outputting in-phase and quadrature-phase oscillator signals, a first mixer mixing the analog signal with the in-phase local oscillator signal to output an in-phase high frequency signal, a second mixer mixing the analog signal with the quadrature-phase local oscillator signal to output a quadrature-phase high frequency signal, a main amplifier amplifying the in-phase high frequency signal output from the first mixer, and an auxiliary amplifier amplifying the quadrature-phase high frequency signal output from the second mixer.

    摘要翻译: 提供发射机和信号放大器。 信号放大器包括将输入数字信号转换为模拟信号的数模转换器,输出同相和正交相位振荡器信号的本地振荡器信号发生器,将模拟信号与同相本地 振荡器信号以输出同相高频信号,第二混频器将模拟信号与正交相位本地振荡器信号混合以输出正交相位高频信号,主放大器放大从 第一混频器和放大从第二混频器输出的正交相位高频信号的辅助放大器。

    RF communication system having a chaotic signal generator and method for generating chaotic signal
    4.
    发明授权
    RF communication system having a chaotic signal generator and method for generating chaotic signal 有权
    RF通信系统具有混沌信号发生器和产生混沌信号的方法

    公开(公告)号:US08005220B2

    公开(公告)日:2011-08-23

    申请号:US11709790

    申请日:2007-02-23

    IPC分类号: H04L9/00 H04K3/00

    CPC分类号: H04L27/001

    摘要: A radio frequency (RF) communication system having a chaotic signal generator and a method of generating a chaotic signal. The RF communication system includes a chaotic signal generator which generates a chaotic signal having a plurality of frequency components at a predetermined frequency band, a modulator which generates a chaotic carrier by combining the chaotic signal with a data signal which indicates information, and a transmission circuit which includes an antenna to transmit the chaotic carrier made at the modulator. The frequency signal generator comprises an oscillator which converts a DC bias power into a high frequency power, and a resonating unit which generates a wideband signal having a plurality of frequency components by passing a predetermined frequency band of the high frequency power signal.

    摘要翻译: 具有混沌信号发生器的射频(RF)通信系统和产生混沌信号的方法。 RF通信系统包括:混合信号发生器,其产生具有预定频带的多个频率分量的混沌信号;调制器,其通过将混沌信号与表示信息的数据信号组合而产生混沌载波;发送电路 其包括用于传输在调制器处制造的混沌载波的天线。 频率信号发生器包括将DC偏置功率转换成高频功率的振荡器,以及通过使高频功率信号的预定频带通过,生成具有多个频率分量的宽带信号的谐振单元。

    Method of transmitting information with the help of chaotic signals
    5.
    发明授权
    Method of transmitting information with the help of chaotic signals 有权
    借助混沌信号传输信息的方法

    公开(公告)号:US07839939B2

    公开(公告)日:2010-11-23

    申请号:US10996048

    申请日:2004-11-24

    IPC分类号: H04L27/00 H04B1/707

    CPC分类号: H04L27/001 H04B1/69

    摘要: Spread spectrum transmission of information is performed using chaotic signals. Direct chaotic communication systems in which information is input to chaotic signal generated directly in information transmission frequency band, are achieved by forming broadband information carrier necessary for transmission and using a chaotic dynamic system whose structure is synthesized in advance in accordance with predetermined characteristics of broadband information carrier to cause chaotic dynamic system to provide operation of forming the broadband information carrier in form of a chaotic information carrier having prescribed spectral characteristics. Modulating the chaotic information carrier is carried out by forming chaotic radio or optic chaotic pulses from chaotic information carrier, with predetermined time intervals between pulses in accordance with the transmitted information signal, and the reception and demodulation at the receiving side is carried out using a dynamic system matched, in behavior, with chaotic dynamic system of transmitting side.

    摘要翻译: 使用混沌信号进行信息的扩频传输。 将信息输入到信息发送频带中直接生成的混沌信号的直接混沌通信系统通过形成传输所需的宽带信息载体并使用根据宽带信息的预定特性预先合成其结构的混沌动态系统来实现 导致混沌动态系统以具有规定频谱特性的混沌信息载体的形式提供形成宽带信息载体的操作。 混沌信息载体的调制是通过根据发送的信息信号,在脉冲之间以预定的时间间隔从混沌信息载体形成混沌无线电或光混沌脉冲,并且使用动态的方式来进行接收侧的接收和解调 系统匹配,在行为上,与发送方的混沌动态系统。

    Wireless communication system for reducing ranging time
    6.
    发明授权
    Wireless communication system for reducing ranging time 有权
    无线通信系统,减少测距时间

    公开(公告)号:US07787516B2

    公开(公告)日:2010-08-31

    申请号:US11501829

    申请日:2006-08-10

    IPC分类号: H04B1/00

    摘要: A wireless communication system and a method for reducing a ranging time. The communication system includes a main synchronization block group which processes the transceived signal and determines whether the transceived signal is a signal desired by a transmitting device when a receiving device re-transmits the transceived signal to the transmitting device; a ranging block which measures a distance between the transmitting device and the receiving device using a ranging signal when the transceived signal is the desired signal of the transmitting device based on the determination of the main synchronization block group and when the transceived signal is the ranging signal; and a symbol synchronization block which detects a start point and an end point of a symbol forming the signal when the transceived signal from the receiving device is a data communication signal. Accordingly, the fast ranging is feasible and channel occupation time can be shortened.

    摘要翻译: 一种无线通信系统和减少测距时间的方法。 所述通信系统包括:主同步块组,其处理所述收发信号,并且当接收设备将所述收发信号重新发送到所述发送设备时,确定所述收发信号是否为发送设备所期望的信号; 测距块,其基于主同步块组的确定以及当发送的信号是测距信号时,当发送信号是发送设备的期望信号时,使用测距信号来测量发送设备和接收设备之间的距离 ; 以及符号同步块,其当来自接收装置的收发信号是数据通信信号时,检测形成信号的符号的起始点和终点。 因此,快速测距是可行的,可以缩短通道占用时间。

    Apparatus and method for generation of noise signal
    7.
    发明授权
    Apparatus and method for generation of noise signal 有权
    用于产生噪声信号的装置和方法

    公开(公告)号:US07786815B2

    公开(公告)日:2010-08-31

    申请号:US11344067

    申请日:2006-02-01

    IPC分类号: H03B29/00

    CPC分类号: H03B29/00 H03B21/01

    摘要: An apparatus and method for generation of a noise signal are provided. The apparatus includes a noise synthesizing module and a noise signal transfer module. The noise synthesizing module includes a voltage controlled oscillator, a phase frequency detector, a phase locked loop filter, and a reference generator which form a phase locked loop. An output signal of the reference generator is provided to a first phase-frequency input of the phase-frequency detector, and an output signal of the voltage controlled oscillator is provided to a second input of the phase-frequency detector. An output signal of the phase-frequency detector is provided to an input of the phase locked loop filter, and an output of the phase locked loop filter is provided to a frequency control input of the voltage controlled oscillator. The noise signal transfer module includes a sinusoidal generator and a frequency mixer having a first input which is provided with an output signal of the phase frequency detector and a second input which is provided with an output signal of the sinusoidal.

    摘要翻译: 提供了一种用于产生噪声信号的装置和方法。 该装置包括噪声合成模块和噪声信号传送模块。 噪声合成模块包括形成锁相环的压控振荡器,相位频率检测器,锁相环滤波器和参考发生器。 参考发生器的输出信号被提供给相位频率检测器的第一相位频率输入,并且压控振荡器的输出信号被提供给相位频率检测器的第二输入端。 将相位频率检测器的输出信号提供给锁相环滤波器的输入,并将锁相环滤波器的输出提供给压控振荡器的频率控制输入端。 噪声信号传送模块包括正弦发生器和具有第一输入的混频器,第一输入端设置有相位频率检测器的输出信号,第二输入端设有正弦波输出信号。

    Terminal for performing wake-up with consumption of low power and wake-up method thereof
    9.
    发明授权
    Terminal for performing wake-up with consumption of low power and wake-up method thereof 失效
    使用低功耗唤醒方式进行唤醒的终端

    公开(公告)号:US07593455B2

    公开(公告)日:2009-09-22

    申请号:US11339494

    申请日:2006-01-26

    IPC分类号: H04B1/00

    摘要: Provided are a terminal performing a wake-up with consumption of low power and a wake-up method performed by the terminal. The terminal includes: a passive filter outputting a correlation signal between a received signal and a reference signal; and a wake-up controller controlling whether to wake up a communication module, using the correlation signal output from the passive filter. Thus, a wake-up signal can be processed using the passive element that does not consume power during its operation. Also, a wake-up of a communication module can be controlled using the result of processing the wake-up signal. As a result, power consumption can be greatly reduced during the wake-up.

    摘要翻译: 提供了一种终端,其执行消耗低功率的唤醒和终端执行的唤醒方法。 终端包括:无源滤波器,其输出接收信号和参考信号之间的相关信号; 以及使用从无源滤波器输出的相关信号来控制是否唤醒通信模块的唤醒控制器。 因此,可以使用在其操作期间不消耗电力的无源元件来处理唤醒信号。 此外,可以使用处理唤​​醒信号的结果来控制通信模块的唤醒。 因此,唤醒期间功耗可以大大降低。

    Mobile terminal with plural antennas
    10.
    发明授权
    Mobile terminal with plural antennas 有权
    具有多个天线的移动终端

    公开(公告)号:US07486245B2

    公开(公告)日:2009-02-03

    申请号:US11522966

    申请日:2006-09-19

    IPC分类号: H01Q1/24

    摘要: Disclosed is a mobile terminal with plural antennas. The mobile terminal with plural antennas, comprising a circuit board formed with a variety of elements, at least one first antenna formed on one surface of the circuit board to transmit and receive a radio signal for mobile communications, and at least one second antenna formed on the other surface of the circuit board to transmit and receive a radio signal for additional services. Accordingly, as the size of the mobile terminal does not necessarily increase to have plural antennas, the mobile terminal can be miniaturized.

    摘要翻译: 公开了具有多个天线的移动终端。 具有多个天线的移动终端,包括形成有各种元件的电路板,形成在电路板的一个表面上的至少一个第一天线,用于发送和接收用于移动通信的无线电信号,以及至少一个第二天线,形成在 电路板的另一个表面用于发送和接收无线电信号以用于附加业务。 因此,随着移动终端的尺寸不一定增加到具有多个天线,移动终端可以被小型化。