Sputtering target assembly and method for depositing a thickness gradient layer with narrow transition zone
    1.
    发明授权
    Sputtering target assembly and method for depositing a thickness gradient layer with narrow transition zone 失效
    用于沉积具有窄过渡区的厚度梯度层的溅射靶组件和方法

    公开(公告)号:US06569294B1

    公开(公告)日:2003-05-27

    申请号:US09884482

    申请日:2001-06-20

    IPC分类号: C23C1434

    摘要: Selective deposition of a layer of a material, such as a thick protective overcoat, onto a selected substrate area, such as the inner or CSS landing zone, is achieved using a sputtering target assembly comprising a target/cathode having a planar sputtering surface including an erosion track area, a collimating shield positioned proximate the sputtering surface and surrounding at least a portion of the erosion track area, the collimating shield including an inwardly facing wall, and a blocking shield centrally positioned over the surface of the target/cathode and including an outwardly facing wall, wherein the inwardly facing wall of the collimating shield and the outwardly facing wall, wherein the inwardly facing wall of the collimating shield and the outwardly facing wall of the central blocking shield form an open-ended collimating channel for directing sputtered particles onto the selected substrate area.

    摘要翻译: 使用包括具有平面溅射表面的靶/阴极的溅射靶组件来选择性地沉积诸如厚保护外涂层的材料层到所选择的衬底区域(例如内部或CSS着陆区域),溅射靶组件包括平面溅射表面 冲蚀轨道区域,位于溅射表面附近并围绕侵蚀轨迹区域的至少一部分的准直屏蔽,准直屏蔽包括面向内的壁和位于靶/阴极表面上方的阻挡屏蔽, 准直屏蔽面向内的壁和面向外的壁,其中准直屏蔽件的面向内的壁和中央阻挡屏蔽的面向外的壁形成用于引导溅射的颗粒进入的开放式准直通道 所选择的衬底区域。

    Sputtering target assembly and method for depositing a thickness gradient layer with narrow transition zone
    2.
    发明授权
    Sputtering target assembly and method for depositing a thickness gradient layer with narrow transition zone 有权
    用于沉积具有窄过渡区的厚度梯度层的溅射靶组件和方法

    公开(公告)号:US06468405B1

    公开(公告)日:2002-10-22

    申请号:US09615317

    申请日:2000-07-13

    IPC分类号: C23C1434

    摘要: A sputtering target assembly for depositing onto a selected substrate area comprises a target/cathode having a planar sputtering surface including an erosion track area, a collimating shield positioned proximate to the sputtering surface, surrounding at least a portion of the erosion track area, and including an inwardly facing wall, and a blocking shield centrally positioned over the surface of the target/cathode and including an outwardly facing wall, wherein the inwardly facing wall of the collimating shield and the outwardly facing wall of the central blocking shield form an open-ended channel for directing sputtered particles onto the selected substrate area. A method for utilizing the target assembly for selectively depositing a thicker protective overcoat layer on the inner CSS or landing zone relative to the outer data zone of disk-shaped recording media is provided.

    摘要翻译: 用于沉积到所选择的衬底区域上的溅射靶组件包括具有包括侵蚀轨迹区域的平面溅射表面的靶/阴极,位于溅射表面附近的准直屏蔽件,围绕侵蚀轨迹区域的至少一部分,并且包括 一个向内的壁和一个位于靶/阴极表面上方并包括向外的壁的阻挡屏蔽,其中准直屏蔽的向内的壁和中心阻挡屏蔽的面向外的壁形成开放端 用于将溅射的颗粒引导到所选择的基底区域上的通道。 提供了一种利用目标组件相对于盘形记录介质的外部数据区选择性地在内部CSS或着陆区上沉积更厚的保护性外涂层的方法。

    Laser textured magnetic surface micro-ridges/grooves to enhance magnetic recording performance
    3.
    发明授权
    Laser textured magnetic surface micro-ridges/grooves to enhance magnetic recording performance 失效
    激光纹理磁性表面微脊/沟槽,增强磁记录性能

    公开(公告)号:US06320728B1

    公开(公告)日:2001-11-20

    申请号:US09311358

    申请日:1999-05-13

    IPC分类号: G11B582

    CPC分类号: G11B5/82 B23K26/0823

    摘要: A magnetic data storage medium is provided that has a substrate surface with regularly spaced, continuous ridges and grooves thereby to enhance the magnetic layer crystallization orientation. Data storage tracks extend longitudinally along the ridges, the grooves between adjacent ridges providing separation between data tracks on either side of each ridge. To form the substrate surface a focused laser beam is continuously applied to the substrate in a path of generally circumferential direction on the disk surface between inner and outer radii of a data storage zone while the substrate is rotated at a relatively constant first speed and the focused beam is moved radially at a relatively constant second speed.

    摘要翻译: 提供磁数据存储介质,其具有具有规则间隔的连续脊和凹槽的基板表面,从而增强磁层结晶取向。 数据存储轨道沿着脊部纵向延伸,相邻脊之间的沟槽提供每个脊的任一侧的数据轨道之间的间隔。 为了形成衬底表面,聚焦的激光束在数据存储区的内半径和外半径之间的盘表面的大致圆周方向的路径上连续地施加到衬底,同时衬底以相对恒定的第一速度旋转,并且聚焦 光束以相对恒定的第二速度径向移动。

    Method for laser-scribing brittle substrates and apparatus therefor
    4.
    发明授权
    Method for laser-scribing brittle substrates and apparatus therefor 失效
    激光划片脆性基板的方法及其设备

    公开(公告)号:US06787732B1

    公开(公告)日:2004-09-07

    申请号:US10228066

    申请日:2002-08-27

    IPC分类号: B23K2636

    摘要: A method of separating a sheet of a brittle material into portions by means of laser-scribing, comprising steps of: (a) providing a sheet of a brittle material having first and second opposing major surfaces separated by a thicknesst; (b) providing a source of laser energy adjacent said first surface, adapted for supplying a focussed beam of laser energy converging to a focal spot in a plane parallel to the first surface; (c) irradiating the sheet of brittle material with the focussed beam of laser energy, the plane of the focal spot of the beam initially being positioned within the sheet just below the first surface; and (d) continuing irradiating while simultaneously providing relative movement between the focal spot of the laser beam and the sheet to move the focal spot at a pre-selected rate and path extending over the first surface, and moving the depth of the plane of the focal spot at a pre-selected rate through a major portion of thickness t of the sheet to form a micro-crack zone extending along the pre-selected path from just below the first surface to a shallow depth just below the second surface.

    摘要翻译: 一种通过激光划线将脆性材料片分离成部分的方法,包括以下步骤:(a)提供具有由厚度分隔的第一和第二相对主表面的脆性材料片;(b)提供 与所述第一表面相邻的激光能量源,适于提供聚焦于与所述第一表面平行的平面中的焦斑的激光能量的聚焦束;(c)用所述聚焦激光能束照射所述脆性材料片, 梁的焦点的平面最初位于第一表面正下方的片材内; 和(d)继续照射,同时在激光束的焦斑和片材之间提供相对运动,以便以预先选择的速率和在第一表面上延伸的路径移动焦点,并且移动 焦点以片材的厚度t的大部分以预先选定的速率形成微裂纹区域,该微裂纹区域沿着从第一表面的正下方延伸到刚好在第二表面正下方的浅深度的预选路径延伸。

    Combined laser-scribing and laser-breaking for shaping of brittle substrates
    5.
    发明授权
    Combined laser-scribing and laser-breaking for shaping of brittle substrates 有权
    组合激光划线和激光破碎用于成形脆性基板

    公开(公告)号:US06744009B1

    公开(公告)日:2004-06-01

    申请号:US10227751

    申请日:2002-08-27

    IPC分类号: B23K2614

    摘要: A method of segmenting a sheet of a brittle material, comprising sequential steps of: subjecting the sheet to a first laser-based process to form a laser-scribing line extending from a surface of the sheet to a first depth below the surface; subjecting the sheet to a second laser-based process to form a laser-breaking line extending from the laser-scribing line at the first depth below the surface to a second, greater depth below the surface; and segmenting the sheet along the thus-formed combined laser scribing + laser-breaking line.

    摘要翻译: 一种分割脆性材料片的方法,包括以下顺序的步骤:对片材进行基于第一激光的工艺,以形成从片材的表面延伸到表面下方的第一深度的激光划线; 以形成从激光刻划线在表面下方的第一深度延伸到表面下方较深的第二深度处的激光断裂线; 并沿着如此形成的组合激光划线+激光断裂线分割片材。

    Method of making a magnetic recording medium with laser-formed differential zone lubrication
    6.
    发明授权
    Method of making a magnetic recording medium with laser-formed differential zone lubrication 有权
    制造具有激光形成差动区润滑的磁记录介质的方法

    公开(公告)号:US06221442B1

    公开(公告)日:2001-04-24

    申请号:US09311366

    申请日:1999-05-13

    IPC分类号: B05D300

    摘要: Stiction failure of a magnetic recording medium is reduced by forming a lubricant topcoat having a first thickness over the landing zone greater than a second thickness over the data zone, with a sharp transition step having an angle of at least about 70° with respect to a line perpendicular to the surface. Embodiments include depositing a lubricant topcoat at a substantially uniform thickness and reducing the thickness of the lubricant topcoat over the data zone by about 20% to about 80% employing a laser light beam to volatilize the lubricant.

    摘要翻译: 通过在数据区上形成大于第二厚度的着陆区上的第一厚度的润滑剂外涂层,通过形成具有至少约70°的角度的尖锐过渡步骤来减少磁记录介质的静摩擦故障 线垂直于表面。 实施例包括以基本均匀的厚度沉积润滑剂面漆,并使用激光束将润滑剂外涂层的数量区域减少大约20%至大约80%,使润滑剂挥发。

    Laser-scribing brittle substrates
    7.
    发明授权
    Laser-scribing brittle substrates 失效
    激光划线脆基板

    公开(公告)号:US06501047B1

    公开(公告)日:2002-12-31

    申请号:US09713311

    申请日:2000-11-16

    IPC分类号: B23K2600

    摘要: Laser-scribing brittle substrates along a curvilinear path is effected by impinging and moving at least two laser light beam spots along the substrate surface, the first spot preheating the substrate and the second smaller spot heating the substrate to the laser-scribing temperature below the softening temperature of the substrate. Embodiments include forming dual spots employing a crystal material or employing dual fiber optic cables each optically linked to a lens. In another embodiment, three spot lasers spots are formed employing a three-spot diffractive lens, the third spot formed behind the second laser-scribing spot and heating the surface to a temperature lower than the laser-scribing temperature. Embodiments further include laser-scribing substantially circular glass, ceramic or glass-ceramic substrates for magnetic recording media.

    摘要翻译: 沿着曲线路径的激光划线脆性基板通过沿着基板表面撞击并移动至少两个激光束光斑来实现,第一点预热基板,而第二较小点将基板加热至低于软化处的激光刻划温度 基板的温度。 实施例包括使用晶体材料形成双点或采用光学连接到透镜的双光纤电缆。 在另一个实施例中,使用三点衍射透镜形成三个点激光器点,第三点形成在第二激光划线点后面,并将该表面加热到低于激光刻划温度的温度。 实施例还包括用于磁记录介质的激光划线基本圆形的玻璃,陶瓷或玻璃陶瓷基板。

    Magnetic recording medium with laser-formed differential zone lubrication
    9.
    发明授权
    Magnetic recording medium with laser-formed differential zone lubrication 失效
    带有激光成型差速器润滑的磁记录介质

    公开(公告)号:US06416839B1

    公开(公告)日:2002-07-09

    申请号:US09797986

    申请日:2001-03-05

    IPC分类号: G11B582

    摘要: Stiction failure of a magnetic recording medium is reduced by forming a lubricant topcoat having a first thickness over the landing zone greater than a second thickness over the data zone, with a sharp transition step having an angle of at least about 70° with respect to a line perpendicular to the surface. Embodiments include depositing a lubricant topcoat at a substantially uniform thickness and reducing the thickness of the lubricant topcoat over the data zone by about 20% to about 80% employing a laser light beam to volatilize the lubricant.

    摘要翻译: 通过在数据区上形成大于第二厚度的着陆区上的第一厚度的润滑剂外涂层,通过形成具有至少约70°的角度的尖锐过渡步骤来减少磁记录介质的静摩擦故障 线垂直于表面。 实施例包括以基本均匀的厚度沉积润滑剂面漆,并使用激光束将润滑剂外涂层的数量区域减少约20%至约80%,使润滑剂挥发。

    Magnetic recording medium with laser-formed servo-marks
    10.
    发明授权
    Magnetic recording medium with laser-formed servo-marks 失效
    具有激光成形伺服标记的磁记录介质

    公开(公告)号:US06549360B1

    公开(公告)日:2003-04-15

    申请号:US09311363

    申请日:1999-05-13

    IPC分类号: G11B1902

    CPC分类号: G11B5/59633

    摘要: A magnetic recording medium is formed with a distribution of laser micromachined servo-marks in the form of pits or indentations with an attendant reduction in servo-tracking area and increased data-recording speed. Embodiments include laser texturing to form a radially extending linear or arcuate series of circular or elliptical pits across the data zone. The micromachined servo-marks are detected by mechanical or electrical means and denote the beginning and end of magnetically recorded servo-information in a data track, thereby enabling accurate and timely positioning of the read/write head by the servo-controller of the hard drive.

    摘要翻译: 磁记录介质形成为具有凹坑或凹痕形式的激光微加工伺服标记的分布,伴随着伺服跟踪区域的降低和数据记录速度的提高。 实施例包括激光纹理以在数据区域上形成径向延伸的线性或弓形系列圆形或椭圆形凹坑。 微机械伺服标记由机械或电气装置检测,并表示数据磁道中磁记录伺服信息的开始和结束,从而可以通过硬盘驱动器的伺服控制器准确和及时地定位读/写头 。