公开(公告)号：US06569294B1

公开(公告)日：2003-05-27

申请号：US09884482

申请日：2001-06-20

申请人： Alexander Boris Khazanov ,  Shanghsien Rou ,  Jie-Ming Yu ,  Paul Stephen McLeod ,  Mark Anthony Shows ,  Kuo-Hsing Hwang ,  Chung-Yuang Shih

发明人： Alexander Boris Khazanov ,  Shanghsien Rou ,  Jie-Ming Yu ,  Paul Stephen McLeod ,  Mark Anthony Shows ,  Kuo-Hsing Hwang ,  Chung-Yuang Shih

IPC分类号： C23C1434

CPC分类号： C23C14/3407 ,  H01J37/3414 ,  Y02T50/67

摘要： Selective deposition of a layer of a material, such as a thick protective overcoat, onto a selected substrate area, such as the inner or CSS landing zone, is achieved using a sputtering target assembly comprising a target/cathode having a planar sputtering surface including an erosion track area, a collimating shield positioned proximate the sputtering surface and surrounding at least a portion of the erosion track area, the collimating shield including an inwardly facing wall, and a blocking shield centrally positioned over the surface of the target/cathode and including an outwardly facing wall, wherein the inwardly facing wall of the collimating shield and the outwardly facing wall, wherein the inwardly facing wall of the collimating shield and the outwardly facing wall of the central blocking shield form an open-ended collimating channel for directing sputtered particles onto the selected substrate area.

摘要翻译： 使用包括具有平面溅射表面的靶/阴极的溅射靶组件来选择性地沉积诸如厚保护外涂层的材料层到所选择的衬底区域（例如内部或CSS着陆区域），溅射靶组件包括平面溅射表面 冲蚀轨道区域，位于溅射表面附近并围绕侵蚀轨迹区域的至少一部分的准直屏蔽，准直屏蔽包括面向内的壁和位于靶/阴极表面上方的阻挡屏蔽， 准直屏蔽面向内的壁和面向外的壁，其中准直屏蔽件的面向内的壁和中央阻挡屏蔽的面向外的壁形成用于引导溅射的颗粒进入的开放式准直通道 所选择的衬底区域。

公开(公告)号：US06468405B1

公开(公告)日：2002-10-22

申请号：US09615317

申请日：2000-07-13

申请人： Shanghsien Rou ,  Alexander Boris Khazanov ,  Jie-Ming Yu ,  Paul Stephen McLeod ,  Mark Anthony Shows ,  Kuo-Hsing Hwang ,  Chung-Yuang Shih

发明人： Shanghsien Rou ,  Alexander Boris Khazanov ,  Jie-Ming Yu ,  Paul Stephen McLeod ,  Mark Anthony Shows ,  Kuo-Hsing Hwang ,  Chung-Yuang Shih

IPC分类号： C23C1434

CPC分类号： H01J37/3414 ,  C23C14/3407 ,  Y02T50/67

摘要： A sputtering target assembly for depositing onto a selected substrate area comprises a target/cathode having a planar sputtering surface including an erosion track area, a collimating shield positioned proximate to the sputtering surface, surrounding at least a portion of the erosion track area, and including an inwardly facing wall, and a blocking shield centrally positioned over the surface of the target/cathode and including an outwardly facing wall, wherein the inwardly facing wall of the collimating shield and the outwardly facing wall of the central blocking shield form an open-ended channel for directing sputtered particles onto the selected substrate area. A method for utilizing the target assembly for selectively depositing a thicker protective overcoat layer on the inner CSS or landing zone relative to the outer data zone of disk-shaped recording media is provided.

摘要翻译： 用于沉积到所选择的衬底区域上的溅射靶组件包括具有包括侵蚀轨迹区域的平面溅射表面的靶/阴极，位于溅射表面附近的准直屏蔽件，围绕侵蚀轨迹区域的至少一部分，并且包括 一个向内的壁和一个位于靶/阴极表面上方并包括向外的壁的阻挡屏蔽，其中准直屏蔽的向内的壁和中心阻挡屏蔽的面向外的壁形成开放端 用于将溅射的颗粒引导到所选择的基底区域上的通道。 提供了一种利用目标组件相对于盘形记录介质的外部数据区选择性地在内部CSS或着陆区上沉积更厚的保护性外涂层的方法。

公开(公告)号：US5785825A

公开(公告)日：1998-07-28

申请号：US538124

申请日：1995-10-02

申请人： Kuo-Hsing Hwang ,  Xiaohua Chen ,  Alexander Boris Khazanov ,  Abdellah Hafid ,  Stella Tan ,  Quy Cuu Nguyen

发明人： Kuo-Hsing Hwang ,  Xiaohua Chen ,  Alexander Boris Khazanov ,  Abdellah Hafid ,  Stella Tan ,  Quy Cuu Nguyen

IPC分类号： G11B5/72 ,  G11B5/84 ,  C23C14/34

CPC分类号： C23C14/0605 ,  G11B5/72 ,  G11B5/8408 ,  Y10S428/90 ,  Y10T428/30

摘要： A magnetic disc for use in a magnetic disc drive is provided. The magnetic disc includes a recording surface wherein the recording surface includes a dual phase carbon overcoat. The dual phase carbon overcoat includes an amorphous carbon film sputtered on a magnetic layer. A doped amorphous carbon film is sputtered on the amorphous carbon film. The dual phase carbon overcoat has demonstrated improved hardness, reduced stiction and superior corrosion resistance over the prior art. A method of manufacturing the magnetic disc is also provided. The method includes providing a sputtering apparatus having a process chamber, providing a partially manufactured magnetic disc having a magnetic layer thereon, placing the partially manufactured magnetic disc within the process chamber, sputtering an amorphous carbon film on the magnetic layer, and sputtering a doped amorphous carbon film on the amorphous carbon film. The process reduces throughput inefficiencies due to down time cleaning and avoids carbon induced damage to the discs.

摘要翻译： 提供用于磁盘驱动器的磁盘。 磁盘包括记录表面，其中记录表面包括双相碳外涂层。 双相碳外涂层包括溅射在磁性层上的无定形碳膜。 掺杂的非晶碳膜溅射在无定形碳膜上。 相比现有技术，双相碳外涂层具有改进的硬度，降低的粘结性和优异的耐腐蚀性。 还提供了制造磁盘的方法。 该方法包括提供具有处理室的溅射装置，提供其上具有磁性层的部分制造的磁盘，将部分制造的磁盘放置在处理室内，在磁性层上溅射无定形碳膜，并溅射掺杂的非晶体 碳膜在无定形碳膜上。 该过程由于停机时间清洁而降低了生产效率低下，并避免了碳导致的盘损坏。

公开(公告)号：US5945191A

公开(公告)日：1999-08-31

申请号：US879842

申请日：1997-06-20

申请人： Kuo-Hsing Hwang ,  Xiaohua Chen ,  Alexander Boris Khazanov ,  Abdellah Hafid ,  Stella Tan ,  Quy Cuu Nguyen

发明人： Kuo-Hsing Hwang ,  Xiaohua Chen ,  Alexander Boris Khazanov ,  Abdellah Hafid ,  Stella Tan ,  Quy Cuu Nguyen

IPC分类号： G11B5/72 ,  G11B5/84

CPC分类号： C23C14/0605 ,  G11B5/72 ,  G11B5/8408 ,  Y10S428/90 ,  Y10T428/30

摘要： A magnetic disc for use in a magnetic disc drive is provided. The magnetic disc includes a recording surface wherein the recording surface includes a dual phase carbon overcoat. The dual phase carbon overcoat includes an amorphous carbon film sputtered on a magnetic layer. A doped amorphous carbon film is sputtered on the amorphous carbon film. The dual phase carbon overcoat has demonstrated improved hardness, reduced stiction and superior corrosion resistance over the prior art. A method of manufacturing the magnetic disc is also provided. The method includes providing a sputtering apparatus having a process chamber, providing a partially manufactured magnetic disc having a magnetic layer thereon, placing the partially manufactured magnetic disc within the process chamber, sputtering an amorphous carbon film on the magnetic layer, and sputtering a doped amorphous carbon film on the amorphous carbon film. The process reduces throughput inefficiencies due to down time cleaning and avoids carbon induced damage to the discs.

摘要翻译： 提供用于磁盘驱动器的磁盘。 磁盘包括记录表面，其中记录表面包括双相碳外涂层。 双相碳外涂层包括溅射在磁性层上的无定形碳膜。 掺杂的非晶碳膜溅射在无定形碳膜上。 相比现有技术，双相碳外涂层具有改进的硬度，降低的粘结性和优异的耐腐蚀性。 还提供了制造磁盘的方法。 该方法包括提供具有处理室的溅射装置，提供其上具有磁性层的部分制造的磁盘，将部分制造的磁盘放置在处理室内，在磁性层上溅射无定形碳膜，并溅射掺杂的非晶体 碳膜在无定形碳膜上。 该过程由于停机时间清洁而降低了生产效率低下，并避免了碳导致的盘损坏。

公开(公告)号：US20070122660A1

公开(公告)日：2007-05-31

申请号：US11287240

申请日：2005-11-28

申请人： Weilu Xu ,  Li-Lien Lee ,  Charles Chen ,  Shanghsien Rou ,  Kuo-Hsing Hwang

发明人： Weilu Xu ,  Li-Lien Lee ,  Charles Chen ,  Shanghsien Rou ,  Kuo-Hsing Hwang

IPC分类号： G11B5/66

CPC分类号： G11B5/7325 ,  G11B5/66

摘要： A thin film magnetic recording medium with enhanced signal-to-noise ratio (SNR) comprises a non-magnetic substrate having a surface; and a layer stack atop the substrate surface, comprising at least one magnetic recording layer and a plurality of layers beneath the at least one magnetic recording layer, including: a first underlayer proximal the substrate surface; a second, grain size refinement underlayer in overlying contact with the first underlayer; a third, in-plane growth orientation underlayer in overlying contact with the second underlayer; and a magnetic stabilization layer in overlying contact with the third underlayer, wherein the third underlayer comprises manganese (Mn).

摘要翻译： 具有增强的信噪比（SNR）的薄膜磁记录介质包括具有表面的非磁性基底; 以及在所述衬底表面上方的层叠层，包括至少一个磁记录层和所述至少一个磁记录层下面的多个层，包括：靠近所述衬底表面的第一底层; 第二，与第一底层重叠接触的粒度细化底层; 与第二底层重叠接触的第三个面内生长取向底层; 以及与所述第三底层重叠接触的磁稳定层，其中所述第三底层包含锰（Mn）。

公开(公告)号：US06572958B1

公开(公告)日：2003-06-03

申请号：US09621530

申请日：2000-07-21

申请人： Kueir-Weei Chour ,  Liji Huang ,  Jie-Ming Yu ,  Kuo-Hsing Hwang ,  Chung Shih ,  Lin Huang ,  Charles Leu ,  Qixu Chen ,  Rajiv Yadav Ranjan

发明人： Kueir-Weei Chour ,  Liji Huang ,  Jie-Ming Yu ,  Kuo-Hsing Hwang ,  Chung Shih ,  Lin Huang ,  Charles Leu ,  Qixu Chen ,  Rajiv Yadav Ranjan

IPC分类号： G11B572

CPC分类号： G11B5/8408 ,  G11B5/72 ,  Y10T428/2495 ,  Y10T428/265

摘要： A magnetic recording medium is provided with a dual layer protective overcoat system comprising a SiC corrosion barrier layer and a carbon-containing protective overcoat thereon. The SiC layer effectively prevents or significantly reduces Co and Ni diffusion to the medium surface. Embodiments include magnetic recording media comprising a SiC corrosion barrier layer over a magnetic layer, an overlying protective layer of amorphous hydrogenated carbon, amorphous nitrogenated carbon or amorphous hydrogen-nitrogenated carbon, and a lubricant topcoat thereon. Embodiments of the present invention further include magnetic recording media comprising Ni—P plated aluminum, Ni-plated glass or non-conductive substrates including glass, glass-ceramic and ceramic materials. Embodiments of the present invention further include a dual protective overcoat system having a combined thickness less than about 100 Å, such as less than about 75 Å, e.g., less than about 50 Å, with the SiC corrosion barrier layer having a thickness ranging from 1 Å to 40 Å.

摘要翻译： 磁记录介质设置有双层保护外涂层系统，其包括SiC腐蚀阻挡层和其上的含碳保护外涂层。 SiC层有效地防止或显着减少Co和Ni扩散到介质表面。 实施例包括在磁性层上包含SiC腐蚀阻挡层的磁记录介质，无定形氢化碳的上覆保护层，无定形氮化碳或无定形氢化氮，以及其上的润滑剂面涂层。 本发明的实施例还包括包含Ni-P镀铝，镀Ni玻璃或包括玻璃，玻璃 - 陶瓷和陶瓷材料的非导电衬底的磁记录介质。 本发明的实施方案还包括双重保护外涂层系统，其具有小于约，例如小于约，例如小于约50埃的组合厚度，其中SiC腐蚀阻挡层的厚度范围为1 Å至40Å。

公开(公告)号：US06565718B1

公开(公告)日：2003-05-20

申请号：US09946934

申请日：2001-09-06

申请人： Kueir-Weei Chour ,  Liji Huang ,  Jie-Ming Yu ,  Kuo-Hsing Hwang ,  Chung Shih

发明人： Kueir-Weei Chour ,  Liji Huang ,  Jie-Ming Yu ,  Kuo-Hsing Hwang ,  Chung Shih

IPC分类号： G11B5851

CPC分类号： G11B5/72 ,  Y10S428/90 ,  Y10T428/24942 ,  Y10T428/2495 ,  Y10T428/265 ,  Y10T428/30

摘要： A magnetic recording medium is formed with dual carbon-containing protective layers having a combined thickness of less than about 100 Å with high corrosion resistance and superior magnetic performance. Embodiments of the present invention include sputter depositing a first protective layer of hydrogenated carbon at a density of at least 1.9 while applying a DC bias of about 250V to about 400V to the substrate, and sputter depositing a second protective layer comprising nitrogen-doped hydrogenated carbon on the first protective layer.

摘要翻译： 形成具有小于约100的组合厚度的双含碳保护层的磁记录介质，具有高耐腐蚀性和优异的磁性能。 本发明的实施例包括以至少1.9的密度溅射沉积氢化碳的第一保护层，同时向衬底施加约250V至约400V的DC偏压，并溅射沉积包含掺氮氢化碳的第二保护层 在第一保护层上。

公开(公告)号：US06303214B1

公开(公告)日：2001-10-16

申请号：US09477064

申请日：2000-01-04

申请人： Kueir-Weei Chour ,  Liji Huang ,  Jie-Ming Yu ,  Kuo-Hsing Hwang ,  Chung Shih

发明人： Kueir-Weei Chour ,  Liji Huang ,  Jie-Ming Yu ,  Kuo-Hsing Hwang ,  Chung Shih

IPC分类号： G11B572

CPC分类号： G11B5/72 ,  Y10S428/90 ,  Y10T428/24942 ,  Y10T428/2495 ,  Y10T428/265 ,  Y10T428/30

摘要： A magnetic recording medium is formed with dual carbon-containing protective layers having a combined thickness of less than about 100 Å with high corrosion resistance and superior magnetic performance. Embodiments of the present invention include sputter depositing a first protective layer of hydrogenated carbon at a density of at least 1.9 while applying a DC bias of about 250V to about 400V to the substrate, and sputter depositing a second protective layer comprising nitrogen-doped hydrogenated carbon on the first protective layer.

摘要翻译： 形成具有小于约100的组合厚度的双含碳保护层的磁记录介质，具有高耐腐蚀性和优异的磁性能。 本发明的实施例包括以至少1.9的密度溅射沉积氢化碳的第一保护层，同时向衬底施加约250V至约400V的DC偏压，并溅射沉积包含掺氮氢化碳的第二保护层 在第一保护层上。

公开(公告)号：US06967061B1

公开(公告)日：2005-11-22

申请号：US09702667

申请日：2000-11-01

申请人： Mariana Munteanu ,  Kuo-Hsing Hwang

发明人： Mariana Munteanu ,  Kuo-Hsing Hwang

IPC分类号： G11B5/64 ,  G11B5/66 ,  G11B5/73

CPC分类号： G11B5/7325 ,  G11B5/656 ,  G11B5/66 ,  Y10T428/12465 ,  Y10T428/12646 ,  Y10T428/12861 ,  Y10T428/12931

摘要： High density longitudinal magnetic recording media are formed with two magnetic layers for enhanced SMNR, high signal, low PW 50 and high resolution. The bilayer magnetic structure comprises a first magnetic layer optimized for SMNR and a second magnetic layer formed directly on the first magnetic layer and optimized for Ms. Embodiments of the present invention include first and second magnetic layers containing Co, Cr and Pt, wherein the first magnetic layer has a higher Cr content than the second magnetic layer and the second magnetic layer has a higher Co content than the first magnetic layer.

摘要翻译： 高密度纵向磁记录介质形成两个磁层，用于增强SMNR，高信号，低PW 50和高分辨率。 双层磁性结构包括针对SMNR优化的第一磁性层和直接形成在第一磁性层上的第二磁性层，并且针对本发明进行了优化。本发明的实施例包括含有Co，Cr和Pt的第一和第二磁性层，其中第一 磁性层的Cr含量高于第二磁性层，第二磁性层的Co含量高于第一磁性层。

公开(公告)号：US20080213628A1

公开(公告)日：2008-09-04

申请号：US11712560

申请日：2007-03-01

申请人： Abebe Hailu ,  Raj Thangaraj ,  Miaogen Lu ,  Qixu Chen ,  Michael Z. Wu ,  Mariana R. Munteanu ,  Kuo-Hsing Hwang

发明人： Abebe Hailu ,  Raj Thangaraj ,  Miaogen Lu ,  Qixu Chen ,  Michael Z. Wu ,  Mariana R. Munteanu ,  Kuo-Hsing Hwang

IPC分类号： G11B5/66 ,  B05D5/12

CPC分类号： G11B5/7379

摘要： A perpendicular magnetic recording medium comprising a substrate, an underlayer, a Ta-containing seedlayer, a magnetic layer, wherein the underlayer comprises a soft magnetic material and the Ta-containing seedlayer is between the underlayer and the magnetic layer, and a process for improving corrosion resistance of the recording medium and for manufacturing the recording medium are disclosed.

摘要翻译： 一种垂直磁记录介质，包括基底，底层，含Ta种子层，磁性层，其中底层包括软磁性材料，含Ta的籽晶层位于底层和磁性层之间，以及改进的方法 公开了记录介质的耐腐蚀性和用于制造记录介质的耐腐蚀性。