摘要:
A fuel supply apparatus mounting structure in which a set plate for holding a fuel supply apparatus is not corroded or deteriorated by the exposure to salt for thawing snow sprayed in winter in cold districts or to salt particles contained in sea wind in coastal areas is provided. The fuel supply apparatus mounting structure comprises a fuel pump 2 disposed within a fuel tank for pumping fuel to an internal combustion engine, a set plate 3 made of a synthetic resin and holding the fuel pump 2 and closing an opening hole 1a in the fuel tank 1, a gasket for maintaining airtight between the set plate 3 and the fuel tank 1, and a plate 4 for fastening the set plate 3 to the fuel tank 1, and a protective member 6, 8 made of a material which is not reacted, dissolved or deteriorated by a reaction product generated by a chemical reaction occurring between the plate 4 and the set plate 3 is inserted.
摘要:
When a fine pattern is formed by using a chemical-amplification-type resist film, fall of acid in the surface of the resist can be inhibited so that a fine pattern exhibiting an excellent shape is formed. A resist coating film containing a compound having a sulfonic acid group or a carbonic acid group is formed on a chemical-amplification-type resist film of a semiconductor substrate, followed by performing exposure.
摘要:
An electrode for a battery which increases resistivity with increasing temperature. The electrode has an electron conductive material containing a conductive filler and a resin so as to increase its resistivity with increasing temperature. This solves the problem of the prior art where the battery temperature rises above a temperature at which the separator melts and flows due to an internal short circuit, with a large short circuit current being generated between the positive and negative electrodes at portions where the separator flows to cause heat generation to further increase the battery temperature. As a result, the short circuit current increases further.
摘要:
A substrate treatment apparatus includes a substrate heating device for maintaining a substrate at a temperature higher than room temperature, a wetting device for producing a wet ozone-containing gas by wetting an ozone-containing gas with a treatment solution, and a supply device for supplying the wet ozone-containing gas from the wetting device to a work object on a surface of the substrate. The supply device includes a gas disperser including apertures aligned in rows in a width direction of the work object. The apertures in adjacent rows are not aligned with each other in a direction perpendicular to the rows. At least one of the gas disperser and the substrate is movable in a direction perpendicular to the rows. A gas conduit connects the wetting device to the supply device. A wet ozone-containing gas heating device heats the wet ozone-containing gas to a temperature at least equal to the temperature of the substrate.
摘要:
Conventional batteries have the problem that, when battery temperature rises above a temperature at which the separator melts and flows due to an internal short-circuit, a large short-circuit current is generated between the positive and negative electrodes, that further raises the battery temperature. As a result, the short-circuit current further increases. The inventive electrode increases its resistivity with increasing temperature, and a processing for producing the electrode is disclosed. The electrode of the invention has an electron conductive material containing a conductive filler and a resin and increases its resistivity with increasing temperature.
摘要:
A substrate treatment assembly for treating a work object on a surface of a substrate by supplying to the work object a wet ozone-containing gas wetted with a treatment solution includes a substrate heating device for maintaining a substrate at a temperature higher than room temperature, a wetting device for producing a wet ozone-containing gas by wetting an ozone-containing gas with a treatment solution, a supply device for supplying the wet ozone-containing gas to a work object on a surface of the substrate, a gas conduit connecting the wetting device to the supply device, and a heating device for heating the wet ozone-containing gas to a temperature approximately equal to or greater than the temperature of the substrate.
摘要:
Disclosed herein is a photosensitive resin composition containing:a photobase generator expressed in the following general formula (I): ##STR1## where R.sub.1, R.sub.2 and R.sub.3 are individually selected from the group consisting of hydrogen, halogen, alkyl groups, alkenyl groups, alkinyl groups, phenyl groups and alkoxy groups; anda base-catalytic reaction compound which is cured or decomposed under basic conditions.
摘要:
A radiation-sensitive polymer is capable of resistance to the dry etching when it is applied to form very fine patterns in VLSIs and other semiconductor devices, wherein the polymer is a radiation-sensitive polymer that contains at least one unit represented by the general formula (I): ##STR1## (where X is an alkyl group, a halogen atom or a halogenated alkyl group; R.sup.1 is an alkyl group, an alkoxy or an aryl group; R.sup.2 is carbon monoxide; M is Si, Ge, Sn, Ti, Mo or W; k is a number defined by the valence of (M minus 1); and l is zero or a positive integer), and which optionally contains at least one unit represented by the general formula (II): ##STR2## (where Y is an alkyl group, a halogen atom or a halogenated alkyl group; R.sup.3 is an alkyl group or an aryl group) and/or at least one unit represented by the general formula (III):--SO.sub.2 --R.sup.4 (III)(where R.sup.4 is a divalent alkyl or aryl group).
摘要翻译:当辐射敏感聚合物被施加以在VLSI和其它半导体器件中形成非常精细的图案时,能够耐干蚀刻,其中该聚合物是含有至少一个由通式表示的单元的辐射敏感性聚合物 I):其中X是烷基,卤原子或卤代烷基; R 1是烷基,烷氧基或芳基; R 2是一氧化碳; M是Si,Ge, Sn,Ti,Mo或W; k是由(M-1)的化合价定义的数字; l是0或正整数),并且任选地含有至少一个由通式(II)表示的单元: (II)(其中Y是烷基,卤原子或卤代烷基; R3是烷基或芳基)和/或至少一个由通式(III)表示的单元: - SO 2 -R 4(III)(其中R 4是二价烷基或芳基)。