Mounting structure for a fuel supply apparatus
    1.
    发明授权
    Mounting structure for a fuel supply apparatus 有权
    燃料供应装置的安装结构

    公开(公告)号:US06598593B1

    公开(公告)日:2003-07-29

    申请号:US09869803

    申请日:2001-09-27

    IPC分类号: F02M3704

    CPC分类号: F02M37/103 F02M2037/225

    摘要: A fuel supply apparatus mounting structure in which a set plate for holding a fuel supply apparatus is not corroded or deteriorated by the exposure to salt for thawing snow sprayed in winter in cold districts or to salt particles contained in sea wind in coastal areas is provided. The fuel supply apparatus mounting structure comprises a fuel pump 2 disposed within a fuel tank for pumping fuel to an internal combustion engine, a set plate 3 made of a synthetic resin and holding the fuel pump 2 and closing an opening hole 1a in the fuel tank 1, a gasket for maintaining airtight between the set plate 3 and the fuel tank 1, and a plate 4 for fastening the set plate 3 to the fuel tank 1, and a protective member 6, 8 made of a material which is not reacted, dissolved or deteriorated by a reaction product generated by a chemical reaction occurring between the plate 4 and the set plate 3 is inserted.

    摘要翻译: 一种燃料供给装置安装结构,其中设置用于保持燃料供应装置的固定板不会被暴露在盐中的冷冻地区冬季喷洒的雪或在沿海地区的海风中含有的盐颗粒中而被腐蚀或劣化。 燃料供给装置安装结构包括设置在燃料箱内的燃料泵2,用于将燃料泵送到内燃机,由合成树脂制成的固定板3,并且保持燃料泵2并关闭燃料箱中的开孔1a 1,用于在固定板3和燃料箱1之间保持气密的垫圈和用于将固定板3紧固到燃料箱1的板4和由未反应的材料制成的保护构件6,8, 通过在板4和固定板3之间发生的化学反应产生的反应产物溶解或劣化。

    Substrate treatment apparatus
    4.
    发明授权
    Substrate treatment apparatus 失效
    基板处理装置

    公开(公告)号:US06955178B1

    公开(公告)日:2005-10-18

    申请号:US10626517

    申请日:2003-07-25

    摘要: A substrate treatment apparatus includes a substrate heating device for maintaining a substrate at a temperature higher than room temperature, a wetting device for producing a wet ozone-containing gas by wetting an ozone-containing gas with a treatment solution, and a supply device for supplying the wet ozone-containing gas from the wetting device to a work object on a surface of the substrate. The supply device includes a gas disperser including apertures aligned in rows in a width direction of the work object. The apertures in adjacent rows are not aligned with each other in a direction perpendicular to the rows. At least one of the gas disperser and the substrate is movable in a direction perpendicular to the rows. A gas conduit connects the wetting device to the supply device. A wet ozone-containing gas heating device heats the wet ozone-containing gas to a temperature at least equal to the temperature of the substrate.

    摘要翻译: 一种基板处理装置,具备:将基板保持在比室温以上的温度下的基板加热装置,通过用处理液润湿含臭氧的气体来生产含湿臭氧的气体的润湿装置,以及供给装置 来自润湿装置的湿臭氧的气体到基板表面上的工件。 供给装置包括气体分散器,其包括在工作对象的宽度方向上成行排列的孔。 相邻行中的孔在垂直于行的方向上彼此不对齐。 气体分散器和基板中的至少一个可以在垂直于行的方向上移动。 气体管道将润湿装置连接到供应装置。 含湿臭氧的气体加热装置将含湿臭氧的气体加热至至少等于基板温度的温度。

    Substrate treatment method
    6.
    发明授权
    Substrate treatment method 有权
    底物处理方法

    公开(公告)号:US06616773B1

    公开(公告)日:2003-09-09

    申请号:US09686061

    申请日:2000-10-11

    IPC分类号: B08B300

    摘要: A substrate treatment assembly for treating a work object on a surface of a substrate by supplying to the work object a wet ozone-containing gas wetted with a treatment solution includes a substrate heating device for maintaining a substrate at a temperature higher than room temperature, a wetting device for producing a wet ozone-containing gas by wetting an ozone-containing gas with a treatment solution, a supply device for supplying the wet ozone-containing gas to a work object on a surface of the substrate, a gas conduit connecting the wetting device to the supply device, and a heating device for heating the wet ozone-containing gas to a temperature approximately equal to or greater than the temperature of the substrate.

    摘要翻译: 一种基板处理组件,用于通过向处理对象物供给湿润的含臭氧的气体来处理基板表面上的工件,所述基底处理组件包括用于将基板保持在高于室温的温度的基板加热装置, 润湿装置,用于通过用处理溶液润湿含臭氧的气体来产生含湿臭氧的气体;供应装置,用于将湿的含臭氧的气体供应到基板的表面上的工件;连接润湿剂的气体导管 装置,以及用于将含湿臭氧的气体加热到大约等于或大于基板的温度的温度的加热装置。

    Radiation-sensitive polymer and radiation-sensitive composition
containing the same
    8.
    发明授权
    Radiation-sensitive polymer and radiation-sensitive composition containing the same 失效
    辐射敏感聚合物和含有它的辐射敏感组合物

    公开(公告)号:US5100762A

    公开(公告)日:1992-03-31

    申请号:US549736

    申请日:1990-07-09

    IPC分类号: C08L43/00 G03F7/004 G03F7/075

    摘要: A radiation-sensitive polymer is capable of resistance to the dry etching when it is applied to form very fine patterns in VLSIs and other semiconductor devices, wherein the polymer is a radiation-sensitive polymer that contains at least one unit represented by the general formula (I): ##STR1## (where X is an alkyl group, a halogen atom or a halogenated alkyl group; R.sup.1 is an alkyl group, an alkoxy or an aryl group; R.sup.2 is carbon monoxide; M is Si, Ge, Sn, Ti, Mo or W; k is a number defined by the valence of (M minus 1); and l is zero or a positive integer), and which optionally contains at least one unit represented by the general formula (II): ##STR2## (where Y is an alkyl group, a halogen atom or a halogenated alkyl group; R.sup.3 is an alkyl group or an aryl group) and/or at least one unit represented by the general formula (III):--SO.sub.2 --R.sup.4 (III)(where R.sup.4 is a divalent alkyl or aryl group).

    摘要翻译: 当辐射敏感聚合物被施加以在VLSI和其它半导体器件中形成非常精细的图案时,能够耐干蚀刻,其中该聚合物是含有至少一个由通式表示的单元的辐射敏感性聚合物 I):其中X是烷基,卤原子或卤代烷基; R 1是烷基,烷氧基或芳基; R 2是一氧化碳; M是Si,Ge, Sn,Ti,Mo或W; k是由(M-1)的化合价定义的数字; l是0或正整数),并且任选地含有至少一个由通式(II)表示的单元: (II)(其中Y是烷基,卤原子或卤代烷基; R3是烷基或芳基)和/或至少一个由通式(III)表示的单元: - SO 2 -R 4(III)(其中R 4是二价烷基或芳基)。